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公开(公告)号：US20190057848A1
公开(公告)日：2019-02-21
申请号：US15678962
申请日：2017-08-16
Applicant: Sputtering Components, Inc.
Inventor： Patrick Lawrence Morse , Daniel Theodore Crowley
Abstract: A magnet bar assembly for a rotary target cathode comprises a support structure, a magnet bar structure movably attached to the support structure and including a plurality of magnets, and a positioning mechanism operatively coupled to the support structure and the magnet bar structure. The positioning mechanism is configured to move the magnet bar structure between a retracted position and a deployed position while inside a magnetic target material cylinder. The retracted position substantially reduces a magnetic force between the magnets and a magnetic target material of a target cylinder when the magnet bar assembly is inserted into the target cylinder or removed from the target cylinder. The deployed position substantially increases the magnetic force between the magnets and the magnetic target material when the magnet bar assembly is in the target cylinder, and allows a magnetic field from the magnet bar structure to penetrate through the magnetic target material.
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公开(公告)号：US20140246312A1
公开(公告)日：2014-09-04
申请号：US14263250
申请日：2014-04-28
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German , William A. Meredith, JR.
CPC classification number: H01J37/3455 , C23C14/35 , C23C14/52 , H01J37/34 , H01J37/3444 , H01J37/345 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.
Abstract translation: 用于旋转靶阴极的磁控管组件包括细长的支撑结构，可移动地定位在支撑结构下方的磁棒结构以及耦合到支撑结构的多个驱动模块。 驱动模块各自包括可操作地联接到磁棒结构的电动致动机构。 控制器和电池模块耦合到支撑结构并与驱动模块进行操作性通信。 控制器和电池模块包括电子控制器和至少一个可充电电池。 电池被配置成为每个电动致动机构和电子控制器通电。 一个或多个发电模块耦合到支撑结构并与电池电连通，使得从发电模块输出的电能为电池充电。
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公开(公告)号：US20140246310A1
公开(公告)日：2014-09-04
申请号：US14019877
申请日：2013-09-06
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German
IPC: C23C14/35
CPC classification number: H01J37/3455 , H01J37/345 , H01J37/347 , H01J37/3476 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises a rigid support structure, a magnet bar structure movably attached to the rigid support structure, and at least one actuation mechanism coupled to the rigid support structure and configured to change a distance of the magnet bar structure from a surface of a rotatable target cylinder. The magnetron assembly also includes a position indicating mechanism operative to measure a position of the magnet bar structure relative to the surface of the rotatable target cylinder. A communications device is configured to receive command signals from outside of the magnetron assembly and transmit information signals to outside of the magnetron assembly.
Abstract translation: 用于旋转目标阴极的磁控管组件包括刚性支撑结构，可移动地附接到刚性支撑结构的磁棒结构，以及耦合到刚性支撑结构并被配置为改变磁棒结构与其之间的距离的至少一个致动机构 可旋转目标气缸的表面。 磁控管组件还包括位置指示机构，其可操作以测量磁棒结构相对于可旋转目标气缸的表面的位置。 通信设备被配置为从磁控管组件的外部接收命令信号，并将信息信号发送到磁控管组件的外部。
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公开(公告)号：USRE46599E1
公开(公告)日：2017-11-07
申请号：US15365512
申请日：2016-11-30
Applicant: SPUTTERING COMPONENTS, INC.
Inventor： Daniel Theodore Crowley , William A. Meredith, Jr.
CPC classification number: C23C14/35 , C23C14/354 , H01J37/3405 , H01J37/342 , H01J37/345 , H01J37/3452 , H01J37/347 , H01J37/3482
Abstract: In one embodiment, a magnetron assembly comprises a plurality of magnets and a yoke configured to hold the plurality of magnets in at least four independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion. The outer portion substantially surrounds the perimeter of the inner portion. The magnets used to form the outer portion have a first polarity and the magnets used to form the inner portion having a second polarity. The outer portion of the pattern comprises a pair of elongated sections that are substantially parallel to one another. The outer portion of the pattern comprises a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections and wherein each turnaround section comprises a plurality of magnets having the first polarity. Other embodiments are described.
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公开(公告)号：US09406487B2
公开(公告)日：2016-08-02
申请号：US14138833
申请日：2013-12-23
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , William A. Meredith, Jr. , John Robert German , Michelle Lynn Neal
CPC classification number: H01J37/3405 , H01J37/3417 , H01J37/3438 , H01J37/3444 , H01J37/345
Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
Abstract translation: 一个实施例涉及一种等离子体源，包括其中形成空腔的主体和设置在空腔内的至少两个独立的磁控管组件。 磁控管组件彼此电气隔离并与主体相互隔离。 在这种实施例的一个实现中，独立的磁控管组件包括闭合漂移磁控管组件。 公开了其他实施例。
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Patent Agency Ranking
公开(公告)号：US09312108B2
公开(公告)日：2016-04-12
申请号：US14263250
申请日：2014-04-28
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German , William A. Meredith, Jr.
CPC classification number: H01J37/3455 , C23C14/35 , C23C14/52 , H01J37/34 , H01J37/3444 , H01J37/345 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.
Abstract translation: 用于旋转靶阴极的磁控管组件包括细长的支撑结构，可移动地定位在支撑结构下方的磁棒结构以及耦合到支撑结构的多个驱动模块。 驱动模块各自包括可操作地联接到磁棒结构的电动致动机构。 控制器和电池模块耦合到支撑结构并与驱动模块进行操作性通信。 控制器和电池模块包括电子控制器和至少一个可充电电池。 电池被配置成为每个电动致动机构和电子控制器通电。 一个或多个发电模块耦合到支撑结构并与电池电连通，使得从发电模块输出的电能为电池充电。
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公开(公告)号：US20160225591A1
公开(公告)日：2016-08-04
申请号：US15094608
申请日：2016-04-08
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German , William A. Meredith, JR.
CPC classification number: H01J37/3455 , C23C14/35 , C23C14/52 , H01J37/34 , H01J37/3444 , H01J37/345 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.
Abstract translation: 用于旋转靶阴极的磁控管组件包括细长的支撑结构，可移动地定位在支撑结构下方的磁棒结构以及耦合到支撑结构的多个驱动模块。 驱动模块各自包括可操作地联接到磁棒结构的电动致动机构。 控制器和电池模块耦合到支撑结构并与驱动模块进行操作性通信。 控制器和电池模块包括电子控制器和至少一个可充电电池。 电池被配置成为每个电动致动机构和电子控制器通电。 一个或多个发电模块耦合到支撑结构并与电池电连通，使得从发电模块输出的电能为电池充电。
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公开(公告)号：US09362093B2
公开(公告)日：2016-06-07
申请号：US14138833
申请日：2013-12-23
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , William A. Meredith, Jr. , John Robert German , Michelle Lynn Neal
Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
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公开(公告)号：US09198274B2
公开(公告)日：2015-11-24
申请号：US13932632
申请日：2013-07-01
Applicant: Sputtering Components, Inc.
Inventor： Patrick Lawrence Morse
IPC: H05H1/24 , C23C16/48 , H01J37/32 , C23C16/515 , H05H1/46
CPC classification number: H05H1/24 , C23C16/486 , C23C16/515 , H01J37/32027 , H01J37/32146 , H05H2001/4682
Abstract: One embodiment is directed to a plasma source comprising a cavity and at least first and second electrodes. The plasma source is configured to, during a first portion of each cycle, bias the first electrode as a cathode and use the second electrode as an anode, during a second portion of each cycle, apply an ion flush bias to the first and second electrodes, during a third portion of each cycle, bias the second electrode as a cathode and use the first electrode as an anode, and during a fourth portion of each cycle, apply an ion flush bias to the first and second electrodes. Other embodiments are disclosed.
Abstract translation: 一个实施例涉及包括空腔和至少第一和第二电极的等离子体源。 等离子体源被配置为在每个周期的第一部分期间，将第一电极作为阴极偏置并且使用第二电极作为阳极，在每个周期的第二部分期间，向第一和第二电极施加离子冲洗偏压 在每个周期的第三部分期间，将第二电极偏置为阴极，并使用第一电极作为阳极，并且在每个周期的第四部分期间，对第一和第二电极施加离子冲洗偏压。 公开了其他实施例。
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公开(公告)号：US20140184073A1
公开(公告)日：2014-07-03
申请号：US14138833
申请日：2013-12-23
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , William A. Meredith, JR. , John Robert German , Michelle Lynn Neal
IPC: H01J37/32
CPC classification number: H01J37/3405 , H01J37/3417 , H01J37/3438 , H01J37/3444 , H01J37/345
Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
Abstract translation: 一个实施例涉及一种等离子体源，包括其中形成空腔的主体和设置在空腔内的至少两个独立的磁控管组件。 磁控管组件彼此电气隔离并与主体相互隔离。 在这种实施例的一个实现中，独立的磁控管组件包括闭合漂移磁控管组件。 公开了其他实施例。
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