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公开(公告)号：US20050223988A1
公开(公告)日：2005-10-13
申请号：US10515038
申请日：2003-05-26
IPC分类号： B05D3/00 , B05D7/24 , B08B7/00 , B29C49/42 , B65D23/02 , C03C17/00 , C08J9/00 , C23C14/04 , C23C14/50 , C23C14/56 , C23C16/04 , C23C16/40 , C23C16/44 , C23C16/458 , C23C16/511 , C23C16/54 , C23C16/00
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/458 , C23C16/511 , H01J37/32733
摘要： An apparatus and method for a vacuum coating of substrates is provided. The apparatus for vacuum coating of substrates includes a conveyor device, at least one coating station having a plurality of coating places, which is conveyed on the conveyor device, an evacuation device, as well as a device for rotating the coating places on the conveyor device.
摘要翻译： 提供了一种用于基板真空涂覆的装置和方法。 用于真空涂覆基材的装置包括输送装置，至少一个具有多个涂布位置的涂布台，该输送装置在输送装置上输送，抽真空装置以及用于旋转输送装置上的涂布部位的装置 。
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公开(公告)号：US07810448B2
公开(公告)日：2010-10-12
申请号：US10515514
申请日：2003-05-26
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C16/029 , C23C16/045 , C23C16/402 , H01J37/32733
摘要： The invention relates to an apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD. It is an object of the invention to ensure a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The invention in particular proposes a rotary apparatus which comprises a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.
摘要翻译： 本发明涉及一种用于涂覆中空体的装置和方法，特别是通过PICVD对塑料饮料瓶的内部涂覆。 本发明的目的是确保灵活的工艺顺序，高产量，改进的流体供应和高质量涂层。 本发明特别提出了一种旋转装置，其包括具有双反应器的处理装置，每个反应器用于在每种情况下接收至少一个工件，流体供应装置和至少一个流体控制装置，其可用于控制向 治疗装置。 优选地，真空泵布置在转子上，使得它们与其一起旋转。
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公开(公告)号：US20060099340A1
公开(公告)日：2006-05-11
申请号：US10515514
申请日：2003-05-26
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C16/029 , C23C16/045 , C23C16/402 , H01J37/32733
摘要： An apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD is provided. The method ensures a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The rotary apparatus includes a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.
摘要翻译： 提供一种用于涂覆中空体的装置和方法，特别是通过PICVD对塑料饮料瓶的内部涂覆。 该方法确保了灵活的工艺顺序，高产量，改善的流体供应和高质量的涂层。 旋转装置包括具有双反应器的处理装置，每个反应器用于在每种情况下接收至少一个工件，流体供应装置和至少一个流体控制装置，其可用于控制向处理装置供应流体。 优选地，真空泵布置在转子上，使得它们与其一起旋转。
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