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公开(公告)号：US20150287568A1
公开(公告)日：2015-10-08
申请号：US14000213
申请日：2012-02-17
IPC分类号： H01J37/21 , H01J37/22 , H01J37/06 , H01J37/244
CPC分类号： H01J37/21 , H01J37/06 , H01J37/09 , H01J37/153 , H01J37/22 , H01J37/222 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/29 , H01J2237/0453 , H01J2237/049 , H01J2237/063 , H01J2237/1532 , H01J2237/21 , H01J2237/2817
摘要： A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The apparatus also includes an imaging detector configured to receive the released electrons from the locations and to form images of the locations from the released electrons. A processor analyzes the image produced by the at least one astigmatic charged particle beam and in response thereto adjusts a focus of the at least one non-astigmatic charged particle beam.
摘要翻译： 带电粒子束聚焦装置包括带电粒子束发生器，其被配置为同时将至少一个非散光带电粒子束和至少一个散光带电粒子束投射到样品表面上的位置，从而使释放的电子从 的位置。 该装置还包括成像检测器，其被配置为从该位置接收释放的电子并且从释放的电子形成位置的图像。 处理器分析由至少一个散光带电粒子束产生的图像，并且响应于此调整至少一个非散光带电粒子束的焦点。
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公开(公告)号：US09530613B2
公开(公告)日：2016-12-27
申请号：US14000213
申请日：2012-02-17
IPC分类号： G01N23/00 , H01J37/21 , H01J37/09 , H01J37/153 , H01J37/22 , H01J37/28 , H01J37/29 , H01J37/26 , H01J37/06 , H01J37/244
CPC分类号： H01J37/21 , H01J37/06 , H01J37/09 , H01J37/153 , H01J37/22 , H01J37/222 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/29 , H01J2237/0453 , H01J2237/049 , H01J2237/063 , H01J2237/1532 , H01J2237/21 , H01J2237/2817
摘要： A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The apparatus also includes an imaging detector configured to receive the released electrons from the locations and to form images of the locations from the released electrons. A processor analyzes the image produced by the at least one astigmatic charged particle beam and in response thereto adjusts a focus of the at least one non-astigmatic charged particle beam.
摘要翻译： 带电粒子束聚焦装置包括带电粒子束发生器，其被配置为同时将至少一个非散光带电粒子束和至少一个散光带电粒子束投射到样品表面上的位置，从而使释放的电子从 的位置。 该装置还包括成像检测器，其被配置为从该位置接收释放的电子并且从释放的电子形成位置的图像。 处理器分析由至少一个散光带电粒子束产生的图像，并且响应于此调整至少一个非散光带电粒子束的焦点。
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公开(公告)号：US07504622B2
公开(公告)日：2009-03-17
申请号：US11684965
申请日：2007-03-12
申请人： Emanuel Elyasaf , Nissim Elmaliah
发明人： Emanuel Elyasaf , Nissim Elmaliah
CPC分类号： G01N23/2251 , H01J37/244 , H01J37/29 , H01J2237/2446
摘要： A high-throughput inspection system and method. The system includes: (i) a charged particles to light converter adapted to convert a secondary array of charged particle beams to a first array of light beams; wherein the first array of light beams is characterized by a first ratio of an average first array light beam diameter to an average distance between adjacent first array light beams of the first array; (ii) first optics, positioned between the charged particles to light converter and between inputs of multiple fibers, wherein the first optics is adapted to provide a second array of light beams; wherein each second array light beam corresponds to a first array light beam; wherein the second array of light beams is characterized by a second ratio of an average second array light beam diameter to an average distance between adjacent second array light beams; wherein the second ratio is substantially smaller than the first ratio; (iii) multiple fibers that are adapted to direct second array light beams towards multiple detectors; wherein the inputs of the multiple fibers are positioned in response to an expected spatial disorder of the second array of light beams and to diameters of second array light beams; and (iv) multiple detectors, adapted to detect light from the multiple fibers.
摘要翻译： 高通量检测系统及方法。 该系统包括：（i）带电粒子到光转换器，其适于将带电粒子束的二次阵列转换成第一阵列的光束; 其中所述第一光束阵列的特征在于平均第一阵列光束直径与所述第一阵列的相邻第一阵列光束之间的平均距离的第一比率; （ii）位于带电粒子与光转换器之间以及多个光纤的输入之间的第一光学器件，其中第一光学器件适于提供第二阵列的光束; 其中每个第二阵列光束对应于第一阵列光束; 其中所述第二阵列光束的特征在于平均第二阵列光束直径与相邻的第二阵列光束之间的平均距离的第二比率; 其中所述第二比例基本上小于所述第一比率; （iii）适于将第二阵列光束导向多个检测器的多个光纤; 其中所述多个光纤的输入响应于所述第二阵列阵列的预期空间紊乱和所述第二阵列光束的直径来定位; 和（iv）多个检测器，适于检测来自多根纤维的光。
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公开(公告)号：US06219011B1
公开(公告)日：2001-04-17
申请号：US08931942
申请日：1997-09-17
申请人： Meir Aloni , Amir Rosenthal , Avinoam Livni , Nissim Elmaliah
发明人： Meir Aloni , Amir Rosenthal , Avinoam Livni , Nissim Elmaliah
IPC分类号： G09G500
CPC分类号： H04N17/04 , G06F3/147 , G09G2300/026 , G09G2320/0233 , G09G2320/0693 , H04N9/28 , H04N9/3147 , H04N9/3185 , H04N9/3194
摘要： Electro-optical display apparatus includes a plurality of modular units each having a projector for receiving electrical signals, converting them to optical images, and projecting the optical images via an optical projection system onto a screen. The modular units are arranged in a side-by-side array such as to produce a combined display on the screen. A calibration system detects distortions in the combined display caused by the projection system of each modular unit and modifies the electrical signals applied to the projector of each modular unit to correct the combined display with respect to the detected distortions.
摘要翻译： 电光显示装置包括多个模块单元，每个模块单元具有用于接收电信号的投影仪，将它们转换成光学图像，以及经由光学投影系统将光学图像投影到屏幕上。 模块化单元被排成并排阵列，以便在屏幕上产生组合显示。 校准系统检测由每个模块单元的投影系统引起的组合显示中的失真，并修改施加到每个模块单元的投影仪的电信号，以相对于检测到的失真校正组合显示。
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公开(公告)号：US20070228274A1
公开(公告)日：2007-10-04
申请号：US11684965
申请日：2007-03-12
申请人： Emanuel Elyasaf , Nissim Elmaliah
发明人： Emanuel Elyasaf , Nissim Elmaliah
IPC分类号： G01N23/00
CPC分类号： G01N23/2251 , H01J37/244 , H01J37/29 , H01J2237/2446
摘要： A high-throughput inspection system and method. The system includes: (i) a charged particles to light converter adapted to convert a secondary array of charged particle beams to a first array of light beams; wherein the first array of light beams is characterized by a first ratio of an average first array light beam diameter to an average distance between adjacent first array light beams of the first array; (ii) first optics, positioned between the charged particles to light converter and between inputs of multiple fibers, wherein the first optics is adapted to provide a second array of light beams; wherein each second array light beam corresponds to a first array light beam; wherein the second array of light beams is characterized by a second ratio of an average second array light beam diameter to an average distance between adjacent second array light beams; wherein the second ratio is substantially smaller than the first ratio; (iii) multiple fibers that are adapted to direct second array light beams towards multiple detectors; wherein the inputs of the multiple fibers are positioned in response to an expected spatial disorder of the second array of light beams and to diameters of second array light beams; and (iv) multiple detectors, adapted to detect light from the multiple fibers.
摘要翻译： 高通量检测系统及方法。 该系统包括：（i）带电粒子到光转换器，其适于将带电粒子束的二次阵列转换成第一阵列的光束; 其中所述第一光束阵列的特征在于平均第一阵列光束直径与所述第一阵列的相邻第一阵列光束之间的平均距离的第一比率; （ii）位于带电粒子与光转换器之间以及多个光纤的输入之间的第一光学器件，其中第一光学器件适于提供第二阵列的光束; 其中每个第二阵列光束对应于第一阵列光束; 其中所述第二阵列光束的特征在于平均第二阵列光束直径与相邻的第二阵列光束之间的平均距离的第二比率; 其中所述第二比例基本上小于所述第一比率; （iii）适于将第二阵列光束导向多个检测器的多个光纤; 其中所述多个光纤的输入响应于所述第二阵列阵列的预期空间紊乱和所述第二阵列光束的直径来定位; 和（iv）多个检测器，适于检测来自多根纤维的光。
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