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公开(公告)号：US20050115668A1
公开(公告)日：2005-06-02
申请号：US10949325
申请日：2004-09-27
CPC分类号： G02B6/266 , G02B6/3508 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/3596
摘要： Disclosed is a multi-channel optical attenuator having a Planar Lightwave Circuit (PLC) structure for controlling a light path by waveguides and manufacturing method thereof. In this optical attenuator, a bonding medium layer of polymer is used to bond an actuator structure and a support structure. A silicon layer is provided with waveguides for transmitting optical signals from an optical signal transmission line and an activator formed at a predetermined portion thereof. The waveguides are inserted into cavities of the bonding medium layer. A support layer is attached to the bonding medium layer at an opposite face to a face where the bonding medium layer is bonded with a silicon substrate.
摘要翻译： 公开了一种具有用于通过波导控制光路的平面光波回路（PLC）结构的多通道光衰减器及其制造方法。 在该光衰减器中，使用聚合物的粘结介质层来粘合致动器结构和支撑结构。 硅层设置有用于从光信号传输线和在其预定部分形成的激活器传输光信号的波导。 将波导插入到接合介质层的空腔中。 在粘合介质层与硅衬底结合的面的相对面上，将粘合介质层附着在支撑层上。
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公开(公告)号：US20050117867A1
公开(公告)日：2005-06-02
申请号：US10791696
申请日：2004-03-04
CPC分类号： G02B6/266 , G02B6/3508 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/3596
摘要： A multi-channel optical attenuator having a Planar Lightwave Circuit (PLC) structure for controlling a light path by waveguides includes a bonding medium layer of polymer that is used to bond an actuator structure and a support structure. A silicon layer is provided with waveguides for transmitting optical signals from an optical signal transmission line and an actuator formed at a predetermined portion thereof. The waveguides are inserted into cavities of the bonding medium layer. A support layer is attached to the bonding medium layer at an opposite face to a face where the bonding medium layer is bonded with a silicon substrate.
摘要翻译： 具有用于通过波导控制光路的平面光波回路（PLC）结构的多通道光衰减器包括用于结合致动器结构和支撑结构的聚合物的接合介质层。 硅层设置有用于从光信号传输线和在其预定部分形成的致动器传输光信号的波导。 将波导插入到接合介质层的空腔中。 在粘合介质层与硅衬底结合的面的相对面上，将粘合介质层附着在支撑层上。
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公开(公告)号：US20050280106A1
公开(公告)日：2005-12-22
申请号：US10927459
申请日：2004-08-27
CPC分类号： B81C1/00936 , B81C2201/0132
摘要： A MEMS structure includes a floating space formed on the upper silicon layer by a first dry etching, and then dry etched to a predeterminded depth on the lower silicon layer by etching gas supplied through the etched holes from which the oxide film has been removed at the bottom surface thereof in a second dry etching process, so as to float the movable portion; and the oxide film for preventing electrical short circuit remaining on the lower surface of the movable portion so as to correspond to the lower silicon layer leaving the floating space therebetween.
摘要翻译： MEMS结构包括通过第一干蚀刻在上硅层上形成的浮动空间，然后通过蚀刻通过蚀刻孔提供的气蚀干蚀刻到下硅层上的预制深度 其第二干蚀刻工艺中的底表面浮起可动部分; 以及用于防止可动部分的下表面上的电短路的氧化膜，以便对应于在其间留下浮动空间的下硅层。
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公开(公告)号：US20050133478A1
公开(公告)日：2005-06-23
申请号：US10822693
申请日：2004-04-13
CPC分类号： G02B3/04 , G02B3/0031
摘要： The present invention relates to a microlens fabrication method for fabricating a non-global microlens from a multi-layer substrate. In the microlens fabrication method of the invention, a first layer of a predetermined etching rate is formed first, and then a second layer is formed on the first layer. The second layer has a predetermined etching rate different from that of the first layer. A mask pattern in use for etching is formed on the second layer, and then the first and second layers are etched to form a non-spherical lens contour therein.
摘要翻译： 本发明涉及从多层基板制造非全局微透镜的微透镜制造方法。 在本发明的微透镜制造方法中，首先形成预定蚀刻速度的第一层，然后在第一层上形成第二层。 第二层具有与第一层不同的预定蚀刻速率。 在第二层上形成用于蚀刻的掩模图案，然后蚀刻第一和第二层以在其中形成非球面透镜轮廓。
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公开(公告)号：US20060280661A1
公开(公告)日：2006-12-14
申请号：US11448833
申请日：2006-06-08
CPC分类号： B01J19/0093 , B01J2219/00783 , B01J2219/00835 , B01J2219/00873 , C01B3/323 , C01B2203/0233 , C01B2203/0283 , C01B2203/066 , C01B2203/085 , C01B2203/1035 , C01B2203/107 , C01B2203/1076 , C01B2203/1223 , Y10T29/49345
摘要： The invention relates to a micro-reformer using a liquid fuel such as methanol and a manufacturing method thereof. The reformer for producing hydrogen gas from the liquid fuel includes a first substrate having a first grooved path and a catalyst layer, and a second substrate having a second grooved path and a catalyst layer, the first and second grooved paths are overlapped on each other forming a micro-channel. The micro-channel has a fuel inlet, a hydrogen outlet, a reforming section, and a carbon monoxide removing section with heating means disposed therein. Although reduced in size, the reformer allows increased hydrogen emission amount due to increased area of the inner path, and is operable with low power due to effective disposition of a heater. This allows manufacturing at low costs and mass-production via semiconductor process.
摘要翻译： 本发明涉及使用甲醇等液体燃料的微型重整器及其制造方法。 用于从液体燃料生产氢气的重整器包括具有第一开槽路径和催化剂层的第一基板和具有第二槽道和催化剂层的第二基板，第一和第二槽道彼此重叠形成 一个微信道。 微通道具有燃料入口，氢气出口，重整部分和设置在其中的加热装置的一氧化碳除去部分。 尽管尺寸减小，但由于内部路径的面积增加，重整器允许增加氢气排放量，并且由于加热器的有效配置而可以以低功率运行。 这允许通过半导体工艺以低成本和批量生产制造。
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公开(公告)号：US20070071659A1
公开(公告)日：2007-03-29
申请号：US11527421
申请日：2006-09-27
CPC分类号： B01J19/0093 , B01B1/005 , B01J2219/00783 , B01J2219/00835 , B01J2219/00873 , C01B3/384 , C01B2203/0233 , C01B2203/044 , C01B2203/047 , C01B2203/085 , C01B2203/1294
摘要： The invention relates to a thin micro reforming apparatus used in a fuel cell system. The reforming apparatus includes a substrate having a flow path formed therein, and a fuel inlet portion for introducing fuel to the flow path of the substrate. The fuel inlet portion allows the fuel to flow through a predetermined length of a channel, thereby preheating the fuel. The reforming apparatus also includes an evaporator having a flow path for gasifying liquid fuel, and a reformer for reforming fuel into hydrogen gas via heat absorption reaction. The reforming apparatus further includes a CO remover for removing CO gas contained in the hydrogen gas via heat generation reaction, and a cover for sealing the flow paths of the substrate. The channel of the fuel inlet portion surrounds the evaporator, reformer and CO remover, thereby facilitating insulation at the sides of the reforming apparatus and increasing heat efficiency.
摘要翻译： 本发明涉及一种用于燃料电池系统的薄型微型重整装置。 重整装置包括其中形成有流路的基板和用于将燃料引入基板的流路的燃料入口部。 燃料入口部分允许燃料流过预定长度的通道，从而预热燃料。 重整装置还包括具有用于气化液体燃料的流路的蒸发器和用于通过吸热反应将燃料重整成氢气的重整器。 重整装置还包括CO去除器，用于通过发热反应除去包含在氢气中的CO气体，以及用于密封基板的流动路径的盖。 燃料入口部分的通道围绕蒸发器，重整器和CO去除器，从而促进重整设备侧面的绝缘并提高热效率。
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公开(公告)号：US20070087235A1
公开(公告)日：2007-04-19
申请号：US11524195
申请日：2006-09-21
CPC分类号： H01M8/0612 , H01M8/026 , H01M8/0263 , H01M8/0267 , H01M8/0271 , H01M8/0289 , H01M8/04022 , H01M8/04089 , H01M8/0662 , H01M8/1007 , H01M8/103 , H01M8/242 , Y02P70/56
摘要： The invention relates to a micro multi-layered thin film hydrogen fuel cell system, which includes a reformer comprising a flow path formed at a side of a substrate and a catalyst in the flow path to reform a fuel into hydrogen. The fuel cell system also includes a cell for generating current using the hydrogen from the reformer. The cell comprises a pair of first and second substrates covering the substrate of the reformer with a membrane electrode assembly disposed between the pair of substrates with a catalyst formed thereon. The fuel cell system further includes a combustor for burning remaining fuel gas to generate heat. The combustor comprises a substrate disposed at an outer side of the second substrate of the cell, and a flow path formed in the substrate with a catalyst formed thereon.
摘要翻译： 本发明涉及一种微型多层薄膜氢燃料电池系统，其包括重整器，该重整器包括形成在基板一侧的流路和流路中的催化剂，以将燃料转化为氢气。 燃料电池系统还包括用于使用来自重整器的氢气产生电流的电池。 电池包括一对第一和第二衬底，覆盖重整器的衬底，膜电极组件设置在一对衬底之间，其上形成有催化剂。 燃料电池系统还包括用于燃烧剩余燃料气体以产生热的燃烧器。 燃烧器包括设置在电池的第二基板的外侧的基板和形成在其上形成有催化剂的基板中的流路。
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公开(公告)号：US20070071661A1
公开(公告)日：2007-03-29
申请号：US11525920
申请日：2006-09-25
IPC分类号： B01J19/00
CPC分类号： B01J19/249 , B01J19/0093 , B01J2219/00783 , B01J2219/00788 , B01J2219/00822 , B01J2219/00828 , B01J2219/00831 , B01J2219/00835 , B01J2219/00844 , B01J2219/00873 , B01J2219/00891 , B01J2219/2453 , B01J2219/2458 , B01J2219/2479 , B01J2219/2485 , B01J2219/2486 , B01J2219/2488 , B01J2219/2495 , C01B3/384 , C01B2203/0227 , C01B2203/066 , C01B2203/085 , C01B2203/1076 , C01B2203/1288 , H01M8/0612 , H01M8/0668 , Y02P20/52
摘要： The invention relates to a reformer with superior heat characteristics for supplying hydrogen gas as fuel to a fuel cell of a fuel cell system. The reformer includes a base having an evaporating part, a reforming part and flow paths each formed in the evaporating part and the reforming part. The reformer also includes heaters each attached on the base corresponding to the positions of the evaporating part and the reforming section. The reformer further includes a catalyst disposed in the reforming section of the base and a porous part integrally formed in a portion of the base extending from the evaporating part to the heater. The reformer has the porous part including nano-pores to increase heat absorption, preventing heat losses. This allows increased heat efficiency and sufficient heat supply with minimal energy, thereby enhancing operational characteristics of the reformer.
摘要翻译： 本发明涉及一种具有优良的热特性的重整器，用于将燃料气体作为燃料供给燃料电池系统的燃料电池。 重整器包括具有蒸发部分，重整部分和形成在蒸发部分和重整部分中的流动路径的基底。 重整器还包括各自附着在与蒸发部分和重整部分的位置相对应的基座上的加热器。 重整器还包括设置在基座的重整部分中的催化剂，以及一体地形成在从蒸发部分延伸到加热器的基部的一部分中的多孔部分。 重整器具有包括纳米孔的多孔部分以增加热吸收，防止热损失。 这允许以最小的能量提高热效率和足够的供热，从而提高重整器的操作特性。
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公开(公告)号：US20050207720A1
公开(公告)日：2005-09-22
申请号：US10911492
申请日：2004-08-05
申请人： Sung Jun Lee , Yoon Hong , Ro Lee , Jong Kim
发明人： Sung Jun Lee , Yoon Hong , Ro Lee , Jong Kim
CPC分类号： G02B6/266 , G02B6/3502 , G02B6/3552 , G02B6/3572 , G02B6/3594
摘要： Disclosed herein is a cantilever-type PLC optical attenuator. The optical attenuator includes a base substrate made of silicon, an input waveguide, and output waveguide. Front portions of the upper and lower silicon substrates around the output waveguide are thinner than rear portions of the upper and lower silicon substrates around the output waveguide to provide a cantilever part having upper and lower cantilever substrate parts. A first electrode is provided on a bottom of the lower cantilever substrate part, and a second electrode is provided on the base substrate to electromagnetically correspond to the first electrode. When a voltage is applied between the first and second electrodes, the cantilever part moves up and down by an electromagnetic force, thus controlling the output light.
摘要翻译： 这里公开了一种悬臂型PLC光衰减器。 光衰减器包括由硅制成的基底，输入波导和输出波导。 输出波导周围的上硅衬底和下硅衬底的前部比输出波导周围的上硅衬底和下硅衬底的后部更薄，以提供具有上和下悬臂衬底部件的悬臂部件。 第一电极设置在下悬臂基板部分的底部，并且第二电极设置在基底基板上以与第一电极电磁对应。 当在第一和第二电极之间施加电压时，悬臂部分通过电磁力上下移动，从而控制输出光。
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