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公开(公告)号:US20100065803A1
公开(公告)日:2010-03-18
申请号:US12517554
申请日:2007-11-28
申请人: Sung-Yool Choi , Min-Ki Ryu , Hu-Young Jeong
发明人: Sung-Yool Choi , Min-Ki Ryu , Hu-Young Jeong
CPC分类号: G11C13/0007 , G11C13/0069 , G11C2013/009 , G11C2213/15 , G11C2213/32 , G11C2213/34 , G11C2213/51 , G11C2213/55 , H01L45/10 , H01L45/12 , H01L45/1233 , H01L45/146 , H01L45/1616 , H01L45/1625
摘要: Provided is a resistance variable non-volatile memory device using a trap-controlled Space Charge Limited Current (SCLC), and a manufacturing method thereof. The memory device includes a bottom electrode; an inter-electrode dielectric thin film diffusion prevention film formed on the bottom electrode; a dielectric thin film formed on the inter-electrode dielectric thin film diffusion prevention film and having a plurality of layers with different charge trap densities; and a top electrode formed on the dielectric thin film.
摘要翻译: 提供了使用陷波控制空间电荷有限电流(SCLC)的电阻变量非易失性存储器件及其制造方法。 存储器件包括底部电极; 形成在底部电极上的电极间电介质薄膜扩散防止膜; 形成在所述电极间电介质薄膜扩散防止膜上并具有不同电荷陷阱密度的多个层的电介质薄膜; 以及形成在电介质薄膜上的顶部电极。
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公开(公告)号:US20100155684A1
公开(公告)日:2010-06-24
申请号:US12479640
申请日:2009-06-05
申请人: Sung-Yool CHOI , Hu-Young Jeong , In-Kyu You , Kyoung-Ik Cho
发明人: Sung-Yool CHOI , Hu-Young Jeong , In-Kyu You , Kyoung-Ik Cho
CPC分类号: H01L45/10 , H01L45/12 , H01L45/1233 , H01L45/146 , H01L45/147 , H01L45/165
摘要: Provided are a non-volatile memory device and a method of forming the non-volatile memory device. The non-volatile memory device includes a substrate, a lower electrode on the substrate, a diffusion barrier preventing the diffusion of a space charge on the lower electrode, a charge storage layer having a space charge limited characteristic on the diffusion barrier, and an upper electrode on the charge storage layer.
摘要翻译: 提供了一种非易失性存储器件和形成非易失性存储器件的方法。 非易失性存储器件包括衬底,衬底上的下电极,阻止下电极上的空间电荷的扩散的扩散阻挡层,在扩散阻挡层上具有空间电荷限制特性的电荷存储层,以及上部 电极在电荷存储层上。
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