Methods and apparatus for ink delivery to nanolithographic probe systems
    2.
    发明申请
    Methods and apparatus for ink delivery to nanolithographic probe systems 失效
    用于墨水输送到纳米光刻探针系统的方法和装置

    公开(公告)号:US20070008390A1

    公开(公告)日:2007-01-11

    申请号:US11399621

    申请日:2006-04-07

    IPC分类号: B41J2/175

    摘要: Inkwells adapted for use in direct-write nanolithography and other applications including use of wells, channels, and posts. The wells can possess a geometry which matches the geometry of tips which are dipped into the inkwells. The channels can be open or closed. Hydrophilicity and hydrophobicity can be used to control ink flow. SEM can be used to characterize the inkwells. Ink flow can be monitored with video. Hydrophobic material layers can be used to prevent cross contamination. Microsyringes can be used to fill reservoirs. Satellite reservoirs can be used to prevent bubble formation.

    摘要翻译: Inkwells适用于直写纳米光刻技术和其他应用,包括使用井,通道和柱。 孔可以具有与浸入墨水孔中的尖端的几何形状相匹配的几何形状。 通道可以打开或关闭。 亲水性和疏水性可用于控制油墨流动。 SEM可用于表征墨水。 墨水流量可以用视频监控。 疏水材料层可用于防止交叉污染。 微量注射器可用于填充储存器。 可以使用卫星储层来防止气泡形成。