公开(公告)号：US12282076B2

公开(公告)日：2025-04-22

申请号：US18649207

申请日：2024-04-29

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Keita Kawamori ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

Abstract: A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a protruding surface including first and second inclined surfaces. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface. The dimension of the protruding surface in a direction parallel to the Z direction is in the range of 1.4 μm to 3.0 μm.

公开(公告)号：US20240280651A1

公开(公告)日：2024-08-22

申请号：US18649207

申请日：2024-04-29

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Keita Kawamori ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

CPC classification number: G01R33/093 ,  G01R33/0047

Abstract: A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a protruding surface including first and second inclined surfaces. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface. The dimension of the protruding surface in a direction parallel to the Z direction is in the range of 1.4 μm to 3.0 μm.

公开(公告)号：US11971461B2

公开(公告)日：2024-04-30

申请号：US17945615

申请日：2022-09-15

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

CPC classification number: G01R33/093 ,  G01R33/0047

Abstract: A magnetic sensor includes an insulating layer including a protruding surface, a first MR element, and a second MR element. The protruding surface includes a first curved surface portion. The first curved surface portion includes a first portion including an upper end portion of the protruding surface, and a second portion continuous with the first portion at a position away from the upper end portion of the protruding surface. When the shape of the protruding surface is regarded as a function Z, the mean value of the absolute value of a second derivative Z″ of the function Z corresponding to the first portion is smaller than the mean value of the absolute value of the second derivative Z″ of the function Z corresponding to the second portion.

公开(公告)号：US11867779B2

公开(公告)日：2024-01-09

申请号：US17945397

申请日：2022-09-15

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Keita Kawamori ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

CPC classification number: G01R33/093 ,  G01R33/0047

Abstract: A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a first layer and a second layer, and also includes first and second inclined surfaces formed across the first layer and the second layer. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface.

公开(公告)号：US09087982B2

公开(公告)日：2015-07-21

申请号：US14082249

申请日：2013-11-18

Applicant: TDK Corporation

Inventor： Hisayoshi Watanabe ,  Ken Fujii ,  Takayuki Nishizawa ,  Masachika Hashino

IPC: H01L21/312 ,  H01L43/12 ,  H01L43/08 ,  G03F1/00 ,  H01L21/027

CPC classification number: H01L21/0274 ,  G03F1/00 ,  G03F7/203 ,  G03F7/70633 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3958 ,  G11B5/3967 ,  G11B5/4886 ,  H01L21/312

Abstract: A method for manufacturing a pattern multilayer body that has a plurality of pattern layers, and where a pattern is formed in each pattern layer, includes a step of forming an overlay pattern within an overlay pattern formation region, and in the step of forming the overlay pattern, a photoresist film is formed, and after a photoresist film is exposed via a main mask, a resist pattern is formed by exposing a sub mask(s). The main mask has a pattern light-shielding part that is commonly used for forming a pattern in each pattern layer, and each main light-shielding part for forming each overlay pattern; and a sub mask has an opening part that is exposable to an unexposed region(s) within an overlay pattern formation region other than an unexposed region(s) on the photoresist film, which has been light-shielded by the main light-shielding part for forming a corresponding overlay pattern.

Abstract translation: 一种用于制造具有多个图案层并且在每个图案层中形成图案的图案多层体的方法包括在覆盖图案形成区域内形成覆盖图案的步骤，并且在形成覆盖层的步骤中 形成光致抗蚀剂膜，并且在通过主掩模曝光光致抗蚀剂膜之后，通过暴露子掩模形成抗蚀剂图案。 主掩模具有通常用于在每个图案层中形成图案的图案遮光部分和用于形成每个覆盖图案的每个主遮光部分; 并且子掩模具有可暴露于除光致抗蚀剂膜上的未曝光区域之外的覆盖图案形成区域内的未曝光区域的开口部分，其被主遮光部分遮光 用于形成对应的覆盖图案。

公开(公告)号：US20250155530A1

公开(公告)日：2025-05-15

申请号：US19026802

申请日：2025-01-17

Applicant: TDK CORPORATION

Inventor： Hiromichi UMEHARA ,  Keita Kawamori ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

Abstract: A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a first layer and a second layer, and also includes first and second inclined surfaces formed across the first layer and the second layer. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface.

公开(公告)号：US12235334B2

公开(公告)日：2025-02-25

申请号：US18524904

申请日：2023-11-30

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Keita Kawamori ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

Abstract: A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a first layer and a second layer, and also includes first and second inclined surfaces formed across the first layer and the second layer. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface.

公开(公告)号：US12000910B2

公开(公告)日：2024-06-04

申请号：US17945514

申请日：2022-09-15

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Keita Kawamori ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

CPC classification number: G01R33/093 ,  G01R33/0047

Abstract: A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a protruding surface including first and second inclined surfaces. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface. The dimension of the protruding surface in a direction parallel to the Z direction is in the range of 1.4 μm to 3.0 μm.

公开(公告)号：US09747933B1

公开(公告)日：2017-08-29

申请号：US15044559

申请日：2016-02-16

Applicant: TDK Corporation

Inventor： Hisayoshi Watanabe ,  Naomichi Degawa ,  Satoshi Miura ,  Masachika Hashino ,  Tetsuya Hiraki ,  Hidekazu Kojima

IPC: G11B5/39

CPC classification number: G11B5/3912 ,  G11B2005/3996

Abstract: A magneto-resistive effect element (MR element) has an upper shield that is magnetized in a cross track direction, a lower shield that is positioned at an interval relative to the upper shield in a down track direction, and a multilayer film that is positioned between the upper shield and the lower shield and that faces an air bearing surface (ABS). The multilayer film has a free layer where its magnetization direction fluctuates relative to an external magnetic field, a pinned layer where its magnetization direction is pinned against the external magnetic field, a nonmagnetic spacer layer that is positioned between the free layer and the pinned layer, and an insulating layer that is positioned at a back side of the free layer viewed from the ABS. The MR element further has a pair of side shields that are positioned at both sides of the free layer and the insulating layer in a cross track direction. The side shields contact the upper shield on the sides of the free layer and the insulating layer in the cross track direction.

公开(公告)号：US12298364B2

公开(公告)日：2025-05-13

申请号：US18620102

申请日：2024-03-28

Applicant: TDK CORPORATION

Inventor： Hiromichi Umehara ,  Kenzo Makino ,  Masachika Hashino

IPC: G01R33/09 ,  G01R33/00

Abstract: A magnetic sensor includes an insulating layer including a protruding surface, a first MR element, and a second MR element. The protruding surface includes a first curved surface portion. The first curved surface portion includes a first portion including an upper end portion of the protruding surface, and a second portion continuous with the first portion at a position away from the upper end portion of the protruding surface. When the shape of the protruding surface is regarded as a function Z, the mean value of the absolute value of a second derivative Z″ of the function Z corresponding to the first portion is smaller than the mean value of the absolute value of the second derivative Z″ of the function Z corresponding to the second portion.