Homogeneously fine-grained vapor-deposited material in bulk form
    2.
    发明授权
    Homogeneously fine-grained vapor-deposited material in bulk form 失效
    均质颗粒状蒸汽沉积物质

    公开(公告)号:US3615275A

    公开(公告)日:1971-10-26

    申请号:US3615275D

    申请日:1967-12-12

    Abstract: In one form of the invention a substrate in the condition and form of a hot titanium strip is advanced over a refractory mask in which are slots for admitting to a face of the strip the vapor of a crystalline material. Crucibles are arranged in a sequence beneath the mask to supply the vapor through the slots for deposition in very thin layers on the substrate. In another batch form of the invention the substrate comprises a fixed substrate sheet located above a slotted rotating shutter. Below the shutter is a crucible containing the material to be vaporized and deposited in the very thin layers upon the substrate. In both forms, the apparatus above described is located in a chamber which may be evacuated or contain a desired atmosphere. In each case the substrate is maintained at a temperature such that, as successive very thin layers of the vaporant are laid down, each condenses before the next is applied so that the latter will nucleate and condense without continuous columnar grain growth normal to the plane of the multiply material on the substrate. A number of layers are laid down until the material deposited on the substrate reaches a bulk thickness in the range of about 1 to 10 mils. The resulting homogeneously grained and layered composite is then stripped from the substrate.

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