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    DEVICE AND METHOD FOR TESTING IMPEDANCE CHARACTERISTIC AND EXPANSION PERFORMANCE OF SOUND ABSORPTION MATERIAL
    4.
    发明申请
    DEVICE AND METHOD FOR TESTING IMPEDANCE CHARACTERISTIC AND EXPANSION PERFORMANCE OF SOUND ABSORPTION MATERIAL 审中-公开

    公开(公告)号：US20170276540A1

    公开(公告)日：2017-09-28

    申请号：US15513942

    申请日：2015-06-15

    申请人： Goertek Inc.

    发明人： Dong Qiu ,  Xiaodong Cao

    IPC分类号： G01H15/00 ,  G01N29/09 ,  G10K11/162 ,  G01B17/00

    CPC分类号： G01H15/00 ,  G01B17/00 ,  G01H3/00 ,  G01N29/09 ,  G01N2291/028 ,  G10K11/162

    摘要： Disclosed are a device and a method for testing impedance characteristic and expansion performance of a sound absorption material. The device includes a first cavity and a second cavity which are both sealed. The first cavity is communicated with the second cavity through a slit channel. The second cavity is used for placing a sound absorption material therein. The device further includes a sound excitation source whose sounding face is located in the first cavity and used to provide a testing sound pressure. The device further includes two sound pickup sensors whose sound pickup surfaces are respectively arranged in the first cavity and the second cavity and respectively used to detect sound pressure in the first cavity and the second cavity. The device further includes a material for enclosing the first cavity and the second cavity is a hard sound insulation material.

    Fibre optic sensing
    5.
    发明授权
    Fibre optic sensing 有权

    公开(公告)号：US09746393B2

    公开(公告)日：2017-08-29

    申请号：US14410851

    申请日：2013-06-27

    申请人： OPTASENSE HOLDINGS LIMITED

    发明人： Alastair Godfrey

    IPC分类号： G01N29/09 ,  G01D5/353 ,  G01M11/08

    CPC分类号： G01M11/088 ,  G01D5/35358 ,  G01H9/004 ,  G01N29/09 ,  G01N2291/018

    摘要： This application relates to methods and apparatus for fiber optic sensing which can provide information about the environment in which the fiber optic is deployed. In particular the application relates to fiber optic based sensing of the mechanical impedance of the environment. The method comprises using an interrogator (201) to interrogate an optical fiber (104) which is coupled to a first element (202; 802) which is responsive to electromagnetic fields. In use a varying electric current (I), which may be an alternating current, is applied so as to induce a varying force (F) on said first element. The optical radiation backscattered from within the optical fiber is analyzed to determine a measurement signal indicative of a variation in the backscattered radiation corresponding with said electric current applied. The first element may be a first conductor (202) and the varying current may be supplied to the first conductor, or to a second conductor (701). Alternatively the first element could be a magnetic element (802). By applying a variable force to the first element, and hence the optical fiber, the characteristics of the environment can be determined.

    Method of using dual-port measurement system to measure acoustic impedance
    6.
    发明授权
    Method of using dual-port measurement system to measure acoustic impedance 有权

    公开(公告)号：US09612225B2

    公开(公告)日：2017-04-04

    申请号：US14521755

    申请日：2014-10-23

    申请人： National Tsing Hua University

    发明人： Mingsian R. Bai ,  Yi-Yang Lo

    IPC分类号： G01N29/028 ,  G01N29/09 ,  G01N29/24 ,  G01N29/44

    CPC分类号： G01N29/09 ,  G01N29/24 ,  G01N29/4472 ,  G01N2291/018

    摘要： A method of using a dual-port measurement system to measure acoustic impedance is used to measure an acoustic impedance Z of a tested object. The tested object includes an input end and an output end opposite to the input end. The dual-port measurement system comprises a first impedance tube and a second impedance tube. The first impedance tube includes a first inlet where a plane wave of a sound source is input, and a first outlet connected with the input end. The second impedance tube includes a second inlet connected with the output end, and a second outlet where the plane wave is output. The method uses the dual-port measurement system and a two-boundary method to obtain the acoustic impedances Z, whereby the dual-port measurement system is conveniently applied to various fields, such as the design of earphones, muffler tubes, sound absorption materials, and artificial ears.

    WAFER CLAMP DETECTION BASED ON VIBRATION OR ACOUSTIC CHARACTERISTIC ANALYSIS
    7.
    发明申请
    WAFER CLAMP DETECTION BASED ON VIBRATION OR ACOUSTIC CHARACTERISTIC ANALYSIS 有权
    基于振动或声学特性分析的波形钳位检测

    公开(公告)号：US20160187302A1

    公开(公告)日：2016-06-30

    申请号：US14963703

    申请日：2015-12-09

    申请人： Axcelis Technologies, Inc.

    发明人： Shu Satoh

    IPC分类号： G01N29/34 ,  H01L21/683 ,  G01N29/24 ,  H01L21/66 ,  G01N29/09 ,  G01N29/12

    CPC分类号： G01N29/34 ,  G01H13/00 ,  G01N29/09 ,  G01N29/12 ,  G01N29/2418 ,  G01N2291/014 ,  G01N2291/018 ,  G01N2291/028 ,  H01L21/67259 ,  H01L21/67288 ,  H01L21/6831 ,  H01L22/10

    摘要： A workpiece clamping status detection system and method for detecting a clamping state of a clamping device is provided. A clamping device having a clamping surface is configured to selectively clamp a workpiece to the clamping surface. The clamping device may be an electrostatic chuck or a mechanical clamp for selectively securing a semiconductor wafer thereto. A vibration-inducing mechanism is further provided, wherein the vibration-inducing mechanism is configured to selectively vibrate one or more of the clamping device and workpiece. A vibration-sensing mechanism is also provided, wherein the vibration-sensing mechanism is configured to detect the vibration of the one or more of the clamping device and workpiece. Detection of clamping status utilizes changes in acoustic properties, such as a shift of natural resonance frequency or acoustic impedance, to determine clamping condition of the workpiece. A controller is further configured to determine a clamping state associated with the clamping of the workpiece to the clamping surface, wherein the clamping state is associated with the detected vibration of the one or more of the clamping device and workpiece.

    摘要翻译： 提供了用于检测夹紧装置的夹紧状态的工件夹紧状态检测系统和方法。 具有夹紧表面的夹紧装置构造成选择性地将工件夹紧到夹紧表面。 夹紧装置可以是用于将半导体晶片选择性地固定到其上的静电卡盘或机械夹具。 还提供了一种振动诱导机构，其中，所述振动诱导机构构造成选择性地振动所述夹紧装置和工件中的一个或多个。 还提供了一种振动感测机构，其中所述振动感测机构构造成检测所述夹紧装置和所述工件中的一个或多个的振动。 夹紧状态的检测利用声学特性的变化，例如固有谐振频率或声阻抗的移动，以确定工件的夹紧状态。 控制器还被配置为确定与将工件夹紧到夹紧表面相关联的夹紧状态，其中夹紧状态与夹紧装置和工件中的一个或多个的检测到的振动相关联。

    Differential ultrasonic waveguide cure monitoring probe
    8.
    发明授权
    Differential ultrasonic waveguide cure monitoring probe 有权
    差速超声波波导固化监测探头

    公开(公告)号：US09297789B2

    公开(公告)日：2016-03-29

    申请号：US13623503

    申请日：2012-09-20

    申请人： MATERIALS AND SENSORS TECHNOLOGIES, INC.

    发明人： Borislav B. Djordjevic ,  Lawrence L. Rouch

    IPC分类号： G01N29/28 ,  G01N29/11 ,  G01N29/028 ,  G01N29/09 ,  G01N29/24 ,  G01N29/44

    CPC分类号： G01N29/11 ,  G01N29/028 ,  G01N29/09 ,  G01N29/2462 ,  G01N29/4427 ,  G01N2203/0092 ,  G01N2291/0251

    摘要： The present invention is seen to provide a new methodology, testing system designs and concept to enable in situ real time monitoring of the cure process. Apparatus, system, and method for the non-destructive, in situ monitoring of the time dependent curing of advanced materials using one or more differential ultrasonic waveguide cure monitoring probes. A differential ultrasonic waveguide cure monitoring probe in direct contact with the material to be cured and providing in situ monitoring of the cure process to enable assessment of the degree of cure or cure level in a non-cure related signal variances (e.g., temperature) independent calibrated response manner. A differential ultrasonic waveguide cure monitoring probe including a transducer coupled to a waveguide and incorporating correction and calibration methodology to accurately and reproducibly monitor the cure process and enable assessment of cure level via ultrasonic reflection measurements. The amplitude of the corrected interface response signal reflected from the probe-resin interface indicating changes in the modulus of the material during the cure.

    摘要翻译： 本发明可以提供一种新的方法，测试系统的设计和概念，以实现对固化过程的实时监测。 用于使用一个或多个差分超声波波导固化监测探针对先进材料进行时间依赖固化的非破坏性，现场监测的装置，系统和方法。 差示超声波波导固化监测探头与要固化的材料直接接触，并提供固化过程的现场监测，以便能够在非固化相关信号方差（例如温度）独立性下评估固化程度或固化水平 校准响应方式。 差示超声波波导固化监测探头，其包括耦合到波导的传感器并且包含校正和校准方法以精确和可重复地监测固化过程，并且能够通过超声波反射测量来评估固化水平。 校正的界面响应信号的幅度从探针 - 树脂界面反射，指示在固化期间材料的模量的变化。