公开(公告)号：US11226536B2

公开(公告)日：2022-01-18

申请号：US16987972

申请日：2020-08-07

Applicant: Gigaphoton Inc. ,  The University of Tokyo

Inventor： Chen Qu ,  Yohei Kobayashi ,  Zhigang Zhao ,  Hironori Igarashi

IPC: G03B27/54 ,  G02F1/35 ,  G02F1/355 ,  G03F7/20

Abstract: A wavelength conversion system including: A. a first nonlinear optical crystal to which first pulsed laser light having a first polarization state and a first wavelength and second pulsed laser light having a second polarization state and a second wavelength are inputted and which is configured to output in response to the input the second pulsed laser light and first sum frequency light having the second polarization state and a third wavelength produced by sum frequency mixing of the first wavelength with the second wavelength; and B. a second nonlinear optical crystal to which the first sum frequency light and the second pulsed laser light outputted from the first nonlinear optical crystal are inputted and which is configured to output in response to the input third pulsed laser light having a fourth wavelength.

公开(公告)号：US10095084B2

公开(公告)日：2018-10-09

申请号：US15912004

申请日：2018-03-05

Applicant: The University of Tokyo ,  GIGAPHOTON INC.

Inventor： Yohei Kobayashi ,  Shinji Ito

IPC: G02F1/37 ,  H01S3/30 ,  H01S3/067 ,  G02F1/35

Abstract: A solid-state laser system may include: a solid-state laser unit configured to output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength; a first solid-state amplifier configured to receive the first pulsed laser light, and output third pulsed laser light with the first wavelength; a wavelength converter configured to receive the third pulsed laser light, and output harmonic light with a third wavelength; a second solid-state amplifier configured to receive the second pulsed laser light, and output fourth pulsed laser light with the second wavelength; a Raman laser unit configured to receive the fourth pulsed laser light, and output Stokes light with a fourth wavelength; and a wavelength conversion system configured to receive the harmonic light and the Stokes light, and output fifth pulsed laser light with a fifth wavelength converted in wavelength from the third wavelength and the fourth wavelength.

公开(公告)号：US11951562B2

公开(公告)日：2024-04-09

申请号：US16283130

申请日：2019-02-22

Applicant: THE UNIVERSITY OF TOKYO

Inventor： Yohei Kobayashi ,  Shuntaro Tani ,  Yutsuki Aoyagi

IPC: B23K26/03 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/36 ,  B23K26/362 ,  B23K26/70 ,  G06N3/08

CPC classification number: B23K26/032 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/36 ,  B23K26/362 ,  B23K26/705 ,  G06N3/08

Abstract: A laser processing system is equipped with a processing laser beam irradiation device configured to irradiate a processing object with processing laser beam and perform ablation processing. The laser processing system is configured to obtain an ablation image of a processed portion of the processing object based on scattered light from the processed portion during processing of the processing object with the processing laser beam and to estimate an ablation volume by applying a learning result obtained by deep learning of a relationship between the ablation image and the ablation volume to the obtained ablation image.

公开(公告)号：US09594253B2

公开(公告)日：2017-03-14

申请号：US14294480

申请日：2014-06-03

Applicant: CANON KABUSHIKI KAISHA ,  The University of Tokyo

Inventor： Takashi Sukegawa ,  Yohei Kobayashi ,  Akira Ozawa ,  Mamoru Endo ,  Makoto Gonokami

IPC: G01N21/00 ,  G02B27/10 ,  G01J3/28 ,  G01J3/18 ,  G01N21/75 ,  G02B5/18 ,  G01J3/02 ,  G01J1/04 ,  G01J3/22

CPC classification number: G02B27/1086 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0425 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0221 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/1804 ,  G01J3/22 ,  G01J3/2823 ,  G01J2003/1861 ,  G01N21/75 ,  G02B5/18 ,  G02B2005/1804

Abstract: The present invention provides a spectral apparatus for spectrally separating light including a predetermined wavelength, including a slit that the light enters, a first optical system configured to collimate the light from the slit, a transmissive type diffraction element configured to diffract the light from the first optical system, and a second optical system including a first mirror configured to reflect the light diffracted by the transmissive type diffraction element, and a second mirror configured to reflect the light reflected by the first mirror and diffracted by the transmissive type diffraction element, and configured to make the light reciprocally travel between the first mirror and the second mirror via the transmissive type diffraction element.

Abstract translation: 本发明提供了一种用于光谱分离包括光入射的狭缝的预定波长的光的光谱装置，被配置为准直来自狭缝的光的第一光学系统，被配置为衍射来自第一 光学系统，以及第二光学系统，包括被配置为反射由透射型衍射元件衍射的光的第一反射镜，以及被配置为反射由第一反射镜反射并被透射型衍射元件衍射的光的第二反射镜， 以使光通过透射型衍射元件在第一反射镜和第二反射镜之间往复行进。

公开(公告)号：US12092570B2

公开(公告)日：2024-09-17

申请号：US17802695

申请日：2021-02-26

Applicant: THE UNIVERSITY OF TOKYO

Inventor： Yohei Kobayashi ,  Shuntaro Tani ,  Hiroharu Tamaru

IPC: G01N21/3504 ,  G01N33/00

CPC classification number: G01N21/3504 ,  G01N33/0027 ,  G01N2201/0634

Abstract: A configuration of the present disclosure specifies a signal point of a specific component and a background point, based on time series two-dimensional spectroscopic image data of a gas; calculates a correlation coefficient between a time series detection signal at the signal point and a time series detection signal at the background point; and generates a time series detection signal of the specific component, based on a corrected time series detection signal obtained by subtracting a product of the correlation coefficient and the time series detection signal at the background point from the time series detection signal at the signal point.

公开(公告)号：US11350515B2

公开(公告)日：2022-05-31

申请号：US16919216

申请日：2020-07-02

Applicant: Gigaphoton Inc. ,  The University of Tokyo

Inventor： Hironori Igarashi ,  Kouji Kakizaki ,  Yohei Kobayashi ,  Shuntaro Tani

IPC: H05G2/00

Abstract: A laser system includes A. a laser apparatus configured to output pulsed laser light; B. a rare gas chamber; C. a light focusing optical system configured to focus the pulsed laser light in the rare gas chamber to excite the rare gas; D. a filter chamber configured to selectively transmit EUV light contained in harmonic light produced in the rare gas chamber; E. an exhauster connected to the filter chamber; F. at least one through hole disposed in the optical path between the rare gas chamber and the filter chamber; G. a rare gas supplier; H. a flow rate control valve configured to control the flow rate of the rare gas flowing from the rare gas supplier into the rare gas chamber; I. a first pressure sensor configured to detect the pressure of the rare gas in the rare gas chamber; J. a first controller configured to control the flow rate control valve in such a way that the pressure detected with the first pressure sensor falls within a reference range; and K. a second controller configured to control the pulse energy of the pulsed laser light outputted from the laser apparatus based at least on the pressure detected with the first pressure sensor.