公开(公告)号：US20240371661A1

公开(公告)日：2024-11-07

申请号：US18760302

申请日：2024-07-01

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masataka GOSHO ,  Yuichi DOUKI ,  Satoshi BIWA ,  Satoshi OKAMURA ,  Katsuhiro OOKAWA ,  Yuichiro KUNUGIMOTO

IPC: H01L21/67 ,  B08B3/08 ,  B08B7/04 ,  H01L21/02 ,  H01L21/66 ,  H01L21/687

Abstract: There is provided a substrate processing apparatus comprising a liquid amount detecting part configured to detect a liquid amount of a liquid film formed on a substrate; and a coating state detecting part configured to detect a coating state of the substrate with the liquid film formed thereon.

公开(公告)号：US20190206702A1

公开(公告)日：2019-07-04

申请号：US16238236

申请日：2019-01-02

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masataka GOSHO ,  Yuichi DOUKI ,  Satoshi BIWA ,  Satoshi OKAMURA ,  Katsuhiro OOKAWA ,  Yuichiro KUNUGIMOTO

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/66 ,  H01L21/02 ,  B08B3/08 ,  B08B7/04

CPC classification number: H01L21/67051 ,  B08B3/08 ,  B08B7/04 ,  H01L21/02057 ,  H01L21/67248 ,  H01L21/67253 ,  H01L21/68764 ,  H01L22/20

Abstract: There is provided a substrate processing apparatus comprising a liquid amount detecting part configured to detect a liquid amount of a liquid film formed on a substrate; and a coating state detecting part configured to detect a coating state of the substrate with the liquid film formed thereon.

公开(公告)号：US20170018444A1

公开(公告)日：2017-01-19

申请号：US15278155

申请日：2016-09-28

Applicant: Tokyo Electron Limited

Inventor： Tokutarou HAYASHI ,  Yuichi DOUKI ,  Hiromitsu MAEJIMA

IPC: H01L21/67 ,  G05B19/418 ,  H01L21/68 ,  G05D3/12 ,  H01L21/677

CPC classification number: H01L21/67259 ,  G05B19/4189 ,  G05B2219/45032 ,  G05B2219/45051 ,  G05D3/125 ,  H01L21/67742 ,  H01L21/681

Abstract: A substrate transfer apparatus to transfer a circular substrate provided with a cutout at an edge portion thereof, includes: a sensor part including three light source parts applying light to positions different from one another at the edge portion, and three light receiving parts paired with the light source parts; and a drive part for moving the substrate holding part, wherein the three light source parts apply light to the light receiving parts so that whether or not a detection range of the sensor part overlaps with the cutout of the substrate is determined on the basis of an amount of received light by each light receiving part, and when it is determined that there is an overlap at any position, positions of the edge portion of the substrate are further detected with the position of the substrate displaced with respect to the sensor part.

Abstract translation: 一种用于在其边缘部分传送设置有切口的圆形基板的基板传送装置，包括：传感器部分，包括三个光源部分，该光源部分将光施加到边缘部分处彼此不同的位置，以及三个光接收部分 光源部件; 以及用于移动所述基板保持部的驱动部，其中，所述三个光源部向所述受光部施加光，使得所述传感器部的检测范围是否与所述基板的切口重叠，基于 每个光接收部分的接收光量，并且当确定在任何位置处存在重叠时，基板的边缘部分的位置被进一步检测到基板相对于传感器部分移位的位置。

公开(公告)号：US20140234991A1

公开(公告)日：2014-08-21

申请号：US14248765

申请日：2014-04-09

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuichi DOUKI ,  Tokutarou HAYASHI ,  Naruaki IIDA ,  Suguru ENOKIDA

IPC: H01L21/68 ,  H01L21/66

CPC classification number: H01L21/68 ,  H01L21/6715 ,  H01L21/67748 ,  H01L21/681 ,  H01L21/68707 ,  H01L22/10 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.

Abstract translation: 一种能够在不使用任何定位夹具的情况下定位基板支架的基板支架定位方法，包括：测量保持在基板承载机构中的基板保持器上的基板的第一位置; 将保持在所述基板保持器上的所述基板承载到用于保持和旋转所述基板的基板旋转单元; 通过基板旋转单元将由基板旋转单元保持的基板转动预定角度; 将由基板旋转单元转动的基板从基板旋转单元传送到基板保持器; 测量从所述基板旋转单元转移到所述基板保持器的所述基板的第二位置; 基于第一位置和第二位置确定基板旋转单元的旋转中心的位置; 并且基于旋转中心的位置来定位衬底保持器。

公开(公告)号：US20230187233A1

公开(公告)日：2023-06-15

申请号：US18107935

申请日：2023-02-09

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masataka GOSHO ,  Yuichi DOUKI ,  Satoshi BIWA ,  Satoshi OKAMURA ,  Katsuhiro OOKAWA ,  Yuichiro KUNUGIMOTO

IPC: H01L21/67 ,  B08B7/04 ,  H01L21/66 ,  H01L21/02 ,  B08B3/08 ,  H01L21/687

CPC classification number: H01L21/67051 ,  H01L21/67253 ,  B08B7/04 ,  H01L22/20 ,  H01L21/02057 ,  B08B3/08 ,  H01L21/68764 ,  H01L21/02101 ,  H01L21/67028 ,  H01L21/67288 ,  H01L22/12 ,  H01L21/67248

Abstract: There is provided a substrate processing apparatus comprising a liquid amount detecting part configured to detect a liquid amount of a liquid film formed on a substrate; and a coating state detecting part configured to detect a coating state of the substrate with the liquid film formed thereon.

公开(公告)号：US20220152780A1

公开(公告)日：2022-05-19

申请号：US17522191

申请日：2021-11-09

Applicant: Tokyo Electron Limited

Inventor： Yuichi DOUKI ,  Kouzou KANAGAWA ,  Junichi KITANO

IPC: B24B49/16 ,  B24B57/02 ,  B24B37/015 ,  B24B37/27

Abstract: A substrate processing apparatus includes: a cassette block configured to mount a cassette that accommodates a substrate; a processing block configured to process the substrate; a relay block configured to relay the substrate between the cassette block and the processing block; and a controller. The processing block includes a processing module that performs a removal process of removing a part of the substrate. The relay block includes a weight measuring unit that measures a weight of the substrate before or after being processed by the processing block. The controller includes a removal amount determination unit that calculates a weight difference of the substrate before and after being processed by the processing block using the measurement result of the weight measuring unit and determines whether a removal amount by the removal process is within a permissible range.

公开(公告)号：US20150114561A1

公开(公告)日：2015-04-30

申请号：US14525541

申请日：2014-10-28

Applicant: TOKYO ELECTRON LIMITED

Inventor： Jiro HIGASHIJIMA ,  Yuichi DOUKI ,  Masami AKIMOTO ,  Shigehisa INOUE

IPC: H01L21/67

CPC classification number: H01L21/6715 ,  B08B1/04 ,  H01L21/67051 ,  H01L21/6708 ,  Y10S134/902

Abstract: A liquid processing apparatus of the present disclosure performs a liquid processing by supplying a processing liquid to a substrate that is rotating. A substrate holding unit configured to be rotatable around a vertical axis is provided with a holding surface to attract and hold a bottom surface of the substrate horizontally. A guide unit is formed integrally with the substrate holding unit, disposed around the substrate held in the substrate holding unit, and provided at a position equal to or lower than a height of a top surface of a periphery of the substrate. The guide unit includes a guide surface configured to guide the processing liquid. A rotary cup rotates integrally with the substrate holding unit, and guides the processing liquid towards the cup between the rotary cup and the guide unit.

Abstract translation: 本公开的液体处理装置通过向正在旋转的基板供给处理液来进行液体处理。 被配置为能够围绕垂直轴线旋转的基板保持单元设置有保持表面，以水平地吸引并保持基板的底面。 引导单元与基板保持单元一体形成，设置在保持在基板保持单元中的基板周围，并且设置在等于或低于基板的周边的顶表面的高度的位置。 引导单元包括构造成引导处理液体的引导表面。 旋转杯与基板保持单元一体地旋转，并且将处理液朝向旋转杯和引导单元之间的杯引导。

公开(公告)号：US20130204421A1

公开(公告)日：2013-08-08

申请号：US13752440

申请日：2013-01-29

Applicant: Tokyo Electron Limited

Inventor： Tokutarou HAYASHI ,  Yuichi DOUKI ,  Hiromitsu MAEJIMA

IPC: G05D3/12

CPC classification number: H01L21/67259 ,  G05B19/4189 ,  G05B2219/45032 ,  G05B2219/45051 ,  G05D3/125 ,  H01L21/67742 ,  H01L21/681

Abstract: A substrate transfer apparatus to transfer a circular substrate provided with a cutout at an edge portion thereof, includes: a sensor part including three light source parts applying light to positions different from one another at the edge portion, and three light receiving parts paired with the light source parts; and a drive part for moving the substrate holding part, wherein the three light source parts apply light to the light receiving parts so that whether or not a detection range of the sensor part overlaps with the cutout of the substrate is determined on the basis of an amount of received light by each light receiving part, and when it is determined that there is an overlap at any position, positions of the edge portion of the substrate are further detected with the position of the substrate displaced with respect to the sensor part.

Abstract translation: 一种用于在其边缘部分传送设置有切口的圆形基板的基板传送装置，包括：传感器部分，包括三个光源部分，该光源部分将光施加到边缘部分处彼此不同的位置，以及三个光接收部分 光源部件; 以及用于移动所述基板保持部的驱动部，其中，所述三个光源部向所述受光部施加光，使得所述传感器部的检测范围是否与所述基板的切口重叠，基于 每个光接收部分的接收光量，并且当确定在任何位置处存在重叠时，基板的边缘部分的位置被进一步检测到基板相对于传感器部分移位的位置。

公开(公告)号：US20130202388A1

公开(公告)日：2013-08-08

申请号：US13759471

申请日：2013-02-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tokutarou HAYASHI ,  Yuichi DOUKI ,  Hirotoshi MORI ,  Akihiro TERAMOTO

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/677 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/67259 ,  H01L21/67288 ,  H01L21/673 ,  H01L21/67742

Abstract: There is provided a technique which can prevent poor processing of successive substrates in the event of a failure of a module or a transport mechanism for transporting a substrate between modules. A substrate processing apparatus includes: a plurality of modules from which a substrate holder of a substrate transport mechanism receives a substrate; a sensor section for detecting a displacement of the holding position of a substrate, held by the substrate holder, from a reference position preset in the substrate holder; and a storage section for storing the displacement, detected when the substrate holder receives a substrate from each of the modules, in a chronological manner for each module. A failure of one of the modules or the substrate transport mechanism is estimated based on the chronological data on the displacement for each module, stored in the storage section. This enables an early detection of a failure or abnormality.

Abstract translation: 提供了一种技术，其可以防止在模块故障或用于在模块之间传送基板的输送机构的情况下连续的基板的加工不良。 基板处理装置包括：多个模块，基板传送机构的基板保持器从该多个模块接收基板; 传感器部分，用于检测由衬底保持器保持的衬底的保持位置从预设在衬底保持器中的参考位置的位移; 以及存储部，用于存储当基板保持器从每个模块接收到基板时检测到的位移，用于每个模块的按时间顺序排列。 基于存储在存储部中的每个模块的位移的时间顺序数据来估计模块或基板传送机构中的一个的故障。 这使得能够及早发现故障或异常。