公开(公告)号：US20190078194A1

公开(公告)日：2019-03-14

申请号：US16019277

申请日：2018-06-26

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO ,  Reiji TERADA ,  Kiyoaki NISHITSUJI

IPC: C23C14/04 ,  H01L51/00 ,  C23F1/02

Abstract: The percentage of a height of each undulation with respect to a length of the undulation is a unit steepness. A steepness is an average value of unit steepnesses of all undulations in a longitudinal direction at each of different positions in a width direction or a metal sheet. The maximum value of steepnesses in a center section in the width direction is less than or equal to 0.3%. The maximum value of steepnesses in a first edge in the width direction and a maximum value of steepnesses in a second edge section in the width direction are less than or equal to 0.6%. The maximum value of steepnesses in at least one of the first edge section and the second edge section in the width direction is less than the maximum value of steepnesses in the center section in the width direction.

公开(公告)号：US20190112715A1

公开(公告)日：2019-04-18

申请号：US15928357

申请日：2018-03-22

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO

IPC: C23F1/02 ,  C23C16/04 ,  C23C14/04 ,  C21D9/52 ,  C21D8/02 ,  C21D6/00 ,  C25D1/04 ,  C25D1/10 ,  B21B1/22

Abstract: A metal sheet has a longitudinal direction and a width direction. The metal sheet has shapes in the width direction that are taken at different positions in the longitudinal direction of the metal sheet and differ from one another. Each of the shapes is an undulated shape including protrusions and depressions repeating in the width direction of the metal sheet. A length in the width direction of a surface of the metal sheet is a surface distance. A minimum value of surface distances at different positions in the longitudinal direction of the metal sheet is a minimum surface distance. A ratio of a difference between a surface distance and the minimum surface distance to the minimum surface distance is an elongation difference ratio in the width direction. A maximum value of elongation difference ratios is less than or equal to 2×10−5.

公开(公告)号：US20190112699A1

公开(公告)日：2019-04-18

申请号：US15928376

申请日：2018-03-22

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO

IPC: C23C14/04

Abstract: A metal sheet has shapes in a width direction that are taken at different positions in a longitudinal direction of the metal sheet and differ from one another. Each shape includes undulations repeating in the width direction. Each undulation includes a valley at each of two ends of the undulation. Each undulation has a length, which is a length of a straight line in the width direction that connects one of the valleys of the undulation to the other valley. A percentage of a height of each undulation relative to the length of the undulation is a unit steepness. The metal sheet has a unit length in the longitudinal direction of 500 mm. A maximum value of the unit steepnesses of the metal sheet per the unit length is a first steepness. The first steepness is less than or equal to 0.5%.

公开(公告)号：US20200274068A1

公开(公告)日：2020-08-27

申请号：US16870716

申请日：2020-05-08

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO ,  Masashi KURATA ,  Naoko MIKAMI

IPC: H01L51/00 ,  C23C14/04 ,  C25D1/04 ,  C25D1/10 ,  C25D3/56 ,  C25D5/50 ,  H01L51/56

Abstract: A metal foil includes a first surface and a second surface opposite to the first surface. The first surface has a first nickel mass proportion (mass %), which is a percentage of a mass of nickel in a sum of a mass of iron and the mass of nickel at the first surface. The second surface has a second nickel mass proportion (mass %), which is a percentage of a mass of nickel in a sum of a mass of iron and the mass of nickel at the second surface. An absolute value of a difference between the first nickel mass proportion (mass %) and the second nickel mass proportion (mass %) is a mass difference (mass %). A value obtained by dividing the mass difference by a thickness (μm) of the vapor deposition mask substrate is a standard value. The standard value is less than or equal to 0.05 (mass %/μm).

公开(公告)号：US20180312979A1

公开(公告)日：2018-11-01

申请号：US16025857

申请日：2018-07-02

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO ,  Reiji TERADA ,  Kiyoaki NISHITSUJI ,  Masashi KURATA ,  Kenta TAKEDA ,  Naoko MIKAMI ,  Sumika AKIYAMA

IPC: C23F1/02 ,  C23F1/16 ,  B21B1/38

Abstract: The ratio of the difference between a surface distance L at each of the different positions in a width direction DW of a metal sheet and a minimum surface distance Lm to the minimum surface distance Lm is an elongation difference ratio. The elongation difference ratio in a center section in the width direction DW of the metal sheet is less than or equal to 3×10−5. The elongation difference ratios in two edge sections in the width direction DW of the metal sheet are less than or equal to 15×10−5. The elongation difference ratio in at least one of the two edge sections in the width direction DW of the metal sheet is less than the elongation difference ratio in the center section in the width direction of the metal sheet.

公开(公告)号：US20180038002A1

公开(公告)日：2018-02-08

申请号：US15786455

申请日：2017-10-17

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Sumika TAMURA ,  Mikio SHINNO ,  Daisei FUJITO ,  Kiyoaki NISHITSUJI ,  Takehiro NISHI ,  Naoko MIKAMI

IPC: C25B11/04 ,  C25C7/08 ,  C25D1/10 ,  C25C1/08 ,  C25D11/34 ,  C25D5/16

CPC classification number: C25B11/041 ,  C23C14/042 ,  C25C1/08 ,  C25C7/08 ,  C25D1/04 ,  C25D1/10 ,  C25D3/562 ,  C25D5/16 ,  C25D11/34 ,  H01L51/0011

Abstract: A vapor deposition metal mask substrate includes a nickel-containing metal sheet including a obverse surface and a reverse surface, which is opposite to the obverse surface. At least one of the obverse surface and the reverse surface is a target surface for placing a resist layer. The target surface has a surface roughness Sa of less than or equal to 0.019 μm. The target surface has a surface roughness Sz of less than or equal to 0.308 μm.