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公开(公告)号：US5851641A
公开(公告)日：1998-12-22
申请号：US848625
申请日：1997-04-29
申请人： Tadao Matsunaga , Takaya Matsushita , Kei Hattori
发明人： Tadao Matsunaga , Takaya Matsushita , Kei Hattori
IPC分类号： B23Q3/15 , H01L21/683 , B32B9/00
CPC分类号： H01L21/6833 , Y10T279/23 , Y10T428/24917 , Y10T428/31504
摘要： The present invention is to provide an electrostatic chucking device having improved heat conductivity and at the same time increased adsorption area and improved adsorptity as well as having no uneveness on the wafer-provided face. The electrostatic chucking device of the present invention comprises a metal base, an adhesive layer, an electrode layer comprising a metal-deposited or metal-plated layer, and an electrically insulating layer possessing a face for providing a substance to be adhered by suction, laminated thereon in this order. The electrostatic chucking device is produced by a process comprising a stage for forming a metal-deposited or metal-plated layer on one face of a heat resistant film, a stage for providing a photoresist layer on the surface of the electrode layer, carrying out pattern exposure, development, and an etching processing, a stage for forming a semi-cured adhesive layer on the surface of the etched electrode layer, a stage for punching the formed laminated sheet according to the shape of a metal base, and stage for laminating the metal base and the laminate sheet via the above-mentioned adhesive and curing the laminated product.
摘要翻译： 本发明提供一种静电吸附装置，其具有改善的导热性，并且同时增加了吸附面积和改进的吸附性，并且在晶片提供面上没有不均匀性。 本发明的静电吸附装置包括金属基底，粘合剂层，包含金属沉积或金属镀层的电极层和具有用于通过抽吸提供待粘附物质的面的电绝缘层，层压 按此顺序。 静电吸附装置通过包括在耐热膜的一个面上形成金属沉积或金属镀层的工序的工序，在电极层的表面上设置光致抗蚀剂层的工序， 曝光，显影和蚀刻处理，在蚀刻电极层的表面上形成半固化粘合剂层的阶段，根据金属基底的形状冲压所形成的层叠片的阶段和用于层压 金属基底和层压片通过上述粘合剂固化并固化层压产品。
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公开(公告)号：US5645921A
公开(公告)日：1997-07-08
申请号：US561731
申请日：1995-11-22
申请人： Tadao Matsunaga , Takaya Matsushita , Kei Hattori
发明人： Tadao Matsunaga , Takaya Matsushita , Kei Hattori
IPC分类号： B23Q3/15 , H01L21/683 , B32B9/00
CPC分类号： H01L21/6833 , Y10T279/23 , Y10T428/24917 , Y10T428/31504
摘要： The present invention is to provide an electrostatic chucking device having improved heat conductivity and at the same time increased adsorption area and improved adsorptity as well as having no uneveness on the wafer-provided face. The electrostatic chucking device of the present invention comprises a metal base, an adhesive layer, an electrode layer comprising a metal-deposited or metal-plated layer, and an electrically insulating layer possessing a face for providing a substance to be adhered by suction, laminated thereon in this order. The electrostatic chucking device is produced by a process comprising a stage for forming a metal-deposited or metal-plated layer on one face of a heat resistant film, a stage for providing a photoresist layer on the surface of the electrode layer, carrying out pattern exposure, development, and an etching processing, a stage for forming a semi-cured adhesive layer on the surface of the etched electrode layer, a stage for punching the formed laminated sheet according to the shape of a metal base, and stage for laminating the metal base and the laminate sheet via the above-mentioned adhesive and curing the laminated product.
摘要翻译： 本发明提供一种静电吸附装置，其具有改善的导热性，并且同时增加了吸附面积和改进的吸附性，并且在晶片提供面上没有不均匀性。 本发明的静电吸附装置包括金属基底，粘合剂层，包含金属沉积或金属镀层的电极层和具有用于通过抽吸提供要粘附的物质的面的电绝缘层，层压 按此顺序。 静电吸附装置通过包括在耐热膜的一个面上形成金属沉积或金属镀层的工序的工序，在电极层的表面上设置光致抗蚀剂层的工序， 曝光，显影和蚀刻处理，在蚀刻电极层的表面上形成半固化粘合剂层的阶段，根据金属基底的形状冲压所形成的层叠片的阶段和用于层压 金属基底和层压片通过上述粘合剂固化并固化层压产品。
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3.发明申请公开(公告)号：US20080227060A1
公开(公告)日：2008-09-18
申请号：US10585998
申请日：2005-01-19
IPC分类号： G09B21/00
CPC分类号： G09B21/004 , G09B21/007
摘要： A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.
摘要翻译： 使用形状记忆合金的驱动机构包括第一和第二形状记忆合金线圈（1,2），连接到沿着轴线延伸的每个形状记忆合金线圈（1,2）的销状驱动构件（3） 具有布线图案（11）的基板（4）和向形状记忆合金线圈（1,2）供给电流的驱动电路（7a），以及用于将驱动部件 （3），并且所述磁性锁定部（9）在所述驱动部件（3）的轴向上具有闩锁位置，所述驱动电路（4a）选择性地驱动所述第一形状记忆合金线圈（1） ，2）中，驱动的第一或第二形状记忆合金线圈（1,2）被加热和压缩以使驱动构件（3）沿轴向方向移动，并且设置到驱动构件的磁体（9a，9b） （3）磁性固定在锁定位置，从而固定并保持在轴向。
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公开(公告)号：US20080063344A1
公开(公告)日：2008-03-13
申请号：US11896224
申请日：2007-08-30
申请人： Masayoshi Suzuki , Tadao Matsunaga , Tomoki Furue , Ken Sukegawa
发明人： Masayoshi Suzuki , Tadao Matsunaga , Tomoki Furue , Ken Sukegawa
IPC分类号： G02B6/44
CPC分类号： G01C19/722 , G02B6/4457 , Y10T29/49885
摘要： An optical fiber coil and a production method therefor reduce the likelihood of optical transmission loss due to stress or temperature changes at low cost. Plural single optical fibers are arranged in parallel and are integrally covered with a covering portion so as to form an optical fiber ribbon, and the optical fiber ribbon is wound into a coiled state.
摘要翻译： 光纤线圈及其制造方法降低了由于应力或温度变化而导致的光传输损耗的可能性低成本。 多个单根光纤平行布置并且被覆盖部分整体地覆盖以形成光纤带，并且光纤带卷绕成卷绕状态。
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公开(公告)号：US08944995B2
公开(公告)日：2015-02-03
申请号：US13510806
申请日：2010-11-22
申请人： Shinichirou Suda , Yoichi Haga , Tadao Matsunaga
发明人： Shinichirou Suda , Yoichi Haga , Tadao Matsunaga
IPC分类号： A61B1/00 , A61B1/05 , A61B1/012 , A61B1/018 , A61B1/313 , A61B17/34 , A61M25/00 , A61M25/01 , A61B17/00
CPC分类号： A61B1/05 , A61B1/0008 , A61B1/00181 , A61B1/0125 , A61B1/018 , A61B1/313 , A61B2017/003 , A61B2017/3443 , A61M25/0074 , A61M25/0133
摘要： An insertion device and an endoscope which are inserted and extracted through a small incision and have multiple functions. A device body has grip forceps as a treatment means. A first folding back section and a second folding back section are provided at a distal portion of the device body such that the first and second folding back sections are aligned in a row in the longitudinal direction of the device body. The first folding back section and the second folding back section respectively have image obtaining means. An operation means can move the first folding back section to a folded back position in which the first folding back section is folded back relative to the second folding back section, and can also move the second folding back section to a position in which the second folding back section is folded back relative to the device body.
摘要翻译： 插入装置和内窥镜，其通过小切口插入和抽出并具有多种功能。 装置主体具有作为治疗装置的夹持钳。 第一折回部分和第二折回部分设置在装置主体的远端部分处，使得第一和第二折回部分在装置主体的纵向方向上排列成一排。 第一折回部分和第二折回部分分别具有图像获取装置。 操作装置可以将第一折回部分移动到折叠位置，其中第一折回部分相对于第二折回部折回，并且还可以将第二折回部分移动到第二折叠部分的第二折叠部分 后部相对于装置主体折回。
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6.发明授权公开(公告)号：US07723896B2
公开(公告)日：2010-05-25
申请号：US10585998
申请日：2005-01-19
CPC分类号： G09B21/004 , G09B21/007
摘要： A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.
摘要翻译： 使用形状记忆合金的驱动机构包括第一和第二形状记忆合金线圈（1,2），连接到沿着轴线延伸的每个形状记忆合金线圈（1,2）的销状驱动构件（3） 具有布线图案的基板（4）和向形状记忆合金线圈（1,2）供给电流的驱动电路（4a）和用于保持驱动部件的磁性卡定部（9） 3），并且磁性锁定部（9）在驱动部件（3）的轴向具有闩锁位置，驱动电路（4a）选择性地电流驱动第一形状记忆合金线圈（1,2） ），驱动的第一或第二形状记忆合金线圈（1,2）被加热和压缩以使驱动构件（3）沿轴向移动，并且设置到驱动构件（3）的磁体（9a，9b）是 磁性固定在锁定位置，从而固定并保持在轴向。
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公开(公告)号：US07583884B2
公开(公告)日：2009-09-01
申请号：US11790395
申请日：2007-04-25
IPC分类号： G02B6/00
CPC分类号： G02B6/25 , G02B6/382 , G02B6/4212
摘要： A refractive index matching tape adhering device easily handles a refractive index matching film. The adhering device has a refractive index matching tape adhering portion which can be adhered by stretching the refractive index matching tape. In the adhering device having a refractive index matching tape supplying portion, a refractive index matching tape adhering portion, and a refractive index matching tape collecting portion, the refractive index matching tape adhering portion has a pair of tape supporting members which can stretch the refractive index matching tape and a cradle which holds the refractive index matching tape in the adhering.
摘要翻译： 折射率匹配带粘合装置容易地处理折射率匹配膜。 粘合装置具有可通过拉伸折射率匹配带粘合的折射率匹配带粘合部分。 在具有折射率匹配带供应部分，折射率匹配带粘附部分和折射率匹配带收集部分的粘合装置中，折射率匹配带粘附部分具有可以拉伸折射率的一对带支撑部件 匹配胶带和在粘附中保持折射率匹配胶带的支架。
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公开(公告)号：US06473288B2
公开(公告)日：2002-10-29
申请号：US09862297
申请日：2001-05-23
IPC分类号： H02N1300
CPC分类号： C09J7/22 , C09J7/35 , C09J2201/128 , C09J2461/00 , C09J2463/00 , C09J2479/08 , C09J2483/006 , H01L21/6831 , Y10T279/23 , Y10T428/2804 , Y10T428/2848 , Y10T428/2887
摘要： The present invention provide an adhesive sheet for electrostatic chucking device having high heat resistance and to an electrostatic chucking device which causes little curvature of the ceramic board after application of heat and is excellent in heat resistance and adsorptity. The adhesive sheet of the present invention comprises a silicone resin elastic layer 11 and thermosetting adhesive layers 12 and 13 which are each laminated on the silicone resin elastic layer, wherein said thermosetting adhesive layers are composed of epoxy resin or phenol resin. The electrostatic chucking device of the present invention is produced by laminating an electrode and a ceramic layer having an adsorptive surface on a metal base in this order via the adhesive sheet of the present invention.
摘要翻译： 本发明提供了一种具有高耐热性的静电吸附装置用粘合片和一种在施加热量后陶瓷板几乎没有弯曲并且耐热性和吸附性优异的静电吸附装置。 本发明的粘合片包含层叠在有机硅树脂弹性层上的有机硅树脂弹性层11和热固性粘合层12,13，其中所述热固性粘合剂层由环氧树脂或酚醛树脂构成。 本发明的静电吸附装置是通过本发明的粘合片将电极和具有吸附表面的陶瓷层依次层叠在金属基底上而制成的。
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公开(公告)号：US07936958B2
公开(公告)日：2011-05-03
申请号：US12723745
申请日：2010-03-15
申请人： Masayoshi Suzuki , Tadao Matsunaga , Tomoki Furue , Ken Sukegawa
发明人： Masayoshi Suzuki , Tadao Matsunaga , Tomoki Furue , Ken Sukegawa
IPC分类号： G02B6/44
CPC分类号： G01C19/722 , G02B6/4457 , Y10T29/49885
摘要： An optical fiber coil and a production method therefor reduce the likelihood of optical transmission loss due to stress or temperature changes at low cost. Plural single optical fibers are arranged in parallel and are integrally covered with a covering portion so as to form an optical fiber ribbon, and the optical fiber ribbon is wound into a coiled state.
摘要翻译： 光纤线圈及其制造方法降低了由于应力或温度变化而导致的光传输损耗的可能性低成本。 多个单根光纤平行布置并且被覆盖部分整体地覆盖以形成光纤带，并且光纤带卷绕成卷绕状态。
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公开(公告)号：US20070083084A1
公开(公告)日：2007-04-12
申请号：US10582355
申请日：2004-12-10
IPC分类号： A61B1/00
CPC分类号： A61B1/0058 , A61B1/0051 , G02B23/2476
摘要： An active tube and its system are offered which can be directed by bending its tip, controlling the degree of bend, thereby easily capable of insertion into difficult positions, and which can be driven at low temperature at which it can be used for inspection and medical treatment. A bending mechanism (21) is constructed by wiring an SMA coil (21e) along an outer side of a working channel tube (21a). The bending mechanism (21) is inserted into an outer skin tube (25) with a plurality of built-in weights (22). A front tip (23) is attached to the front end side of the bending mechanism (21) as a tip (2) of an active tube (1). A main tube (4) is connected through the working channel tube (21a) at the tip (2). A wire (21g) is connected to the SMA coil (21e). Said wire (21g) is inserted to the behind end side (41) of the main tube (4) in a wiring channel (4B9 of the main tube, thereby makes it possible to drive the bending mechanism (21) from outside.
摘要翻译： 提供一种主动管及其系统，其可以通过弯曲其尖端来引导，控制弯曲度，从而容易地插入困难位置，并且可以在可用于检查和医疗的低温下驱动 治疗。 弯曲机构（21）通过沿着工作通道管（21a）的外侧布线SMA线圈（21e）而构成。 弯曲机构（21）被插入具有多个内置重物（22）的外皮管（25）中。 前端（23）作为活动管（1）的前端（2）安装在弯曲机构（21）的前端侧。 主管（4）通过工作通道管（21a）在尖端（2）处连接。 电线（21g）连接到SMA线圈（21e）。 所述线（21g）在布线通道（主管的4B 9）中插入主管（4）的后端侧（41），从而可以从外部驱动弯曲机构（21） 。
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