公开(公告)号：US11682571B2

公开(公告)日：2023-06-20

申请号：US17849337

申请日：2022-06-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  Kai-Chieh Huang ,  Wei-Ting Hsiao ,  Yang-Ann Chu ,  I-Lun Yang ,  Hsuan Lee

IPC: H01L21/67 ,  H01L21/677 ,  B65G47/90 ,  H01L21/673

CPC classification number: H01L21/67745 ,  B65G47/90 ,  H01L21/67294 ,  H01L21/67333

Abstract: Apparatus and methods for handling die carriers are disclosed. In one example, a disclosed apparatus includes: a load port configured to load a die carrier operable to hold a plurality of dies into a processing tool; and a lane changer coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool and transfer the at least one die into the processing tool for processing the at least one die.

公开(公告)号：US11251064B2

公开(公告)日：2022-02-15

申请号：US16807026

申请日：2020-03-02

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  I-Lun Yang ,  Chih-Hung Huang ,  Jiun-Rong Pai ,  Chung-Hsin Chien ,  Yang-Ann Chu

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/677

Abstract: A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.

公开(公告)号：US12300532B2

公开(公告)日：2025-05-13

申请号：US17574302

申请日：2022-01-12

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  I-Lun Yang ,  Chih-Hung Huang ,  Jiun-Rong Pai ,  Chung-Hsin Chien ,  Yang-Ann Chu

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/677

Abstract: A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.

公开(公告)号：US20210272837A1

公开(公告)日：2021-09-02

申请号：US16807026

申请日：2020-03-02

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  I-Lun Yang ,  Chih-Hung Huang ,  Jiun-Rong Pai ,  Chung-Hsin Chien ,  Yang-Ann Chu

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/677

Abstract: A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.