公开(公告)号：US11673223B2

公开(公告)日：2023-06-13

申请号：US17711724

申请日：2022-04-01

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Yu-Chen Wei ,  Jheng-Si Su ,  Shih-Ho Lin ,  Jen-Chieh Lai ,  Chun-Chieh Chan

IPC分类号： B24B49/18 ,  B24B49/16 ,  B24B49/10 ,  B24B37/005 ,  B24B37/32 ,  B24B53/017 ,  B24B37/20 ,  B24B37/04 ,  H01L21/321 ,  B24B53/00

CPC分类号： B24B37/20 ,  B24B37/005 ,  B24B37/04 ,  B24B37/32 ,  B24B49/10 ,  B24B49/16 ,  B24B49/18 ,  B24B53/001 ,  B24B53/017 ,  H01L21/3212

摘要： A chemical mechanical polishing method is provided, including polishing a batch of wafers in sequence on a polishing surface of a polishing pad; conditioning the polishing surface with a pad conditioner, wherein the pad conditioner is operable to apply downward force according to a predetermined downward force stored in a controller to condition the polishing surface; measuring the downward force applied by the pad conditioner with a measurement tool when the pad conditioner is at a home position and after conditioning the polishing surface; comparing the downward force measured by the measurement tool and the predetermined downward force with the controller to determine whether a difference between the downward force measured by the measurement tool and the predetermined downward force exceeds a range of acceptable values; and calibrating the downward force applied by the pad conditioner with the controller when the difference exceeds the range of acceptable values.

公开(公告)号：US12076831B2

公开(公告)日：2024-09-03

申请号：US18308878

申请日：2023-04-28

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Yu-Chen Wei ,  Jheng-Si Su ,  Shih-Ho Lin ,  Jen-Chieh Lai ,  Chun-Chieh Chan

IPC分类号： B24B37/005 ,  B24B37/04 ,  B24B37/20 ,  B24B37/32 ,  B24B49/10 ,  B24B49/16 ,  B24B49/18 ,  B24B53/00 ,  B24B53/007 ,  B24B53/017 ,  H01L21/321

CPC分类号： B24B37/20 ,  B24B37/005 ,  B24B37/04 ,  B24B37/32 ,  B24B49/10 ,  B24B49/16 ,  B24B49/18 ,  B24B53/001 ,  B24B53/017 ,  H01L21/3212

摘要： A chemical mechanical polishing (CMP) apparatus is provided, including a polishing pad and a polishing head. The polishing pad has a polishing surface. The polishing head is configured to hold a wafer in contact with the polishing surface during the polishing process. The polishing head includes a retaining ring, at least one fluid channel, and a vacuum pump. The retaining ring is arranged along the periphery of the polishing head and configured to retain the wafer. The at least one fluid channel is provided inside the polishing head, wherein the retaining ring includes a bottom surface facing the polishing surface and a plurality of holes in fluid communication with the bottom surface and the at least one fluid channel. The vacuum pump is fluidly coupled to the at least one fluid channel.

公开(公告)号：US11251063B2

公开(公告)日：2022-02-15

申请号：US17065022

申请日：2020-10-07

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Jheng-Si Su ,  Yu-Chen Wei ,  Chih-Yuan Yang ,  Shih-Ho Lin ,  Jen-Chieh Lai

IPC分类号： H01L21/677 ,  H01L21/683 ,  H01L21/687 ,  B25J15/06 ,  B65G61/00 ,  B24B37/20 ,  H01L21/67 ,  B25J11/00

摘要： A transporter for transporting an article used in semiconductor fabrication is provided. The transporter includes a robotic arm. The transporter further includes two platens connected to the robotic arm. Each of the two platens an inner surface facing the other, and a number of gas holes are formed on each of the inner surfaces of the two platens. The transporter also includes a gas supplier placed in communication with the gas holes. The gas supplier is used to control the flow of gas through the gas holes.