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公开(公告)号:US07109123B2
公开(公告)日:2006-09-19
申请号:US10647433
申请日:2003-08-26
IPC分类号: H01L21/302
CPC分类号: H01J37/32082 , H01J37/3266 , H01J2237/334 , H01L21/3065 , H01L21/308 , H01L21/76898
摘要: A Si etching method etches a Si wafer held on a susceptor placed in a processing vessel by a plasma-assisted etching process. A mixed etching gas prepared by mixing fluorosulfur gas, such as SF6 gas, or fluorocarbon gas, O2 gas and fluorosilicon gas, such as SiF4 gas is supplied into the processing vessel. RF power of 40 MHz or above is applied to the mixed etching gas to generate a plasma. The Si wafer is etched with radicals and ions contained in the plasma.
摘要翻译: Si蚀刻方法通过等离子体辅助蚀刻工艺蚀刻保持在放置在处理容器中的基座上的Si晶片。 通过混合诸如SF 6气体的氟化硫气体或碳氟化合物气体O 2气体和诸如SiF 4气体的氟硅气体制备的混合蚀刻气体, 将气体供应到处理容器中。 将40MHz以上的RF功率施加到混合蚀刻气体以产生等离子体。 用等离子体中所含的自由基和离子蚀刻Si晶片。
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公开(公告)号:US20120214220A1
公开(公告)日:2012-08-23
申请号:US13505310
申请日:2009-11-24
申请人: Yahui Huang , Chunhui Hsieh , Hsuanyu Lai
发明人: Yahui Huang , Chunhui Hsieh , Hsuanyu Lai
IPC分类号: C12N9/96
CPC分类号: C12N9/2482 , C12N9/96 , C12Y302/01008
摘要: A xylanase composition and a method for manufacturing the xylanase composition are provided, wherein the xylanase composition comprises a xylanase and a stabilizer, and the xylanase is from an anaerobic fungus, the stabilizer comprises a polyol, and the content of the polyol is at least 40 wt %, based on the total weight of the xylanase composition.
摘要翻译: 提供木聚糖酶组合物和木聚糖酶组合物的制造方法,其中所述木聚糖酶组合物包含木聚糖酶和稳定剂,所述木聚糖酶来自厌氧真菌,所述稳定剂包含多元醇,多元醇的含量为至少40 重量%,基于木聚糖酶组合物的总重量。
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3.
公开(公告)号:US08809018B2
公开(公告)日:2014-08-19
申请号:US13513952
申请日:2010-02-10
申请人: Yahui Huang , Chunhui Hsieh
发明人: Yahui Huang , Chunhui Hsieh
CPC分类号: C12N9/2482 , C12Y302/01008
摘要: Modified nucleotide molecules of xylanase and the application of the nucleotide molecules in constructing recombinant vectors, host cells or producing xylanase are disclosed, wherein the nucleotide molecules contain nucleotide sequences having greater than 80% identity with nucleotide sequence shown by SEQ ID NO: 1.
摘要翻译: 公开了木聚糖酶的修饰的核苷酸分子和构建重组载体,宿主细胞或产生木聚糖酶的核苷酸分子的应用,其中核苷酸分子含有与SEQ ID NO:1所示核苷酸序列具有大于80%同一性的核苷酸序列。
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公开(公告)号:US08735118B2
公开(公告)日:2014-05-27
申请号:US13505310
申请日:2009-11-24
申请人: Yahui Huang , Chunhui Hsieh , Hsuanyu Lai
发明人: Yahui Huang , Chunhui Hsieh , Hsuanyu Lai
IPC分类号: C12N9/96
CPC分类号: C12N9/2482 , C12N9/96 , C12Y302/01008
摘要: A xylanase composition and a method for manufacturing the xylanase composition are provided, wherein the xylanase composition comprises a xylanase and a stabilizer, and the xylanase is from an anaerobic fungus, the stabilizer comprises a polyol, and the content of the polyol is at least 40 wt %, based on the total weight of the xylanase composition.
摘要翻译: 提供木聚糖酶组合物和木聚糖酶组合物的制造方法,其中所述木聚糖酶组合物包含木聚糖酶和稳定剂,所述木聚糖酶来自厌氧真菌,所述稳定剂包含多元醇,多元醇的含量为至少40 重量%,基于木聚糖酶组合物的总重量。
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5.
公开(公告)号:US20120288915A1
公开(公告)日:2012-11-15
申请号:US13513952
申请日:2010-02-10
申请人: Yahui Huang , Chunhui Hsieh
发明人: Yahui Huang , Chunhui Hsieh
CPC分类号: C12N9/2482 , C12Y302/01008
摘要: Modified nucleotide molecules of xylanase and the application of the nucleotide molecules in constructing recombinant vectors, host cells or producing xylanase are disclosed, wherein the nucleotide molecules contain nucleotide sequences having greater than 80% identity with nucleotide sequence shown by SEQ ID NO: 1.
摘要翻译: 公开了木聚糖酶的修饰的核苷酸分子和构建重组载体,宿主细胞或产生木聚糖酶的核苷酸分子的应用,其中核苷酸分子含有与SEQ ID NO:1所示核苷酸序列具有大于80%同一性的核苷酸序列。
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