公开(公告)号：US08258891B2

公开(公告)日：2012-09-04

申请号：US12608397

申请日：2009-10-29

申请人： Michio Miura ,  Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Kazunori Inoue ,  Satoru Matsuda

发明人： Michio Miura ,  Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Kazunori Inoue ,  Satoru Matsuda

IPC分类号： H03H9/25 ,  H03H9/15 ,  H03H9/70 ,  H03H9/72 ,  H03H3/02 ,  H03H3/08 ,  H03H3/04 ,  H03H3/10

CPC分类号： H03H3/10 ,  H03H9/0222 ,  H03H9/25 ,  Y10T29/42 ,  Y10T29/49005

摘要： An acoustic wave device includes a piezoelectric substrate, interdigital electrodes arranged on the piezoelectric substrate, a first dielectric element arranged between the interdigital electrodes, a second dielectric element that covers the interdigital electrodes and the first dielectric element, and an adjustment element that has been formed on the first dielectric element. The adjustment element has been formed from a material whose specific gravity is greater than that of the first dielectric element and that of the second dielectric element.

摘要翻译： 声波装置包括：压电基板，布置在压电基板上的叉指电极，布置在叉指电极之间的第一电介质元件，覆盖指状电极和第一电介质元件的第二电介质元件和已形成的调节元件 在第一电介质元件上。 调整元件由比重大于第一电介质元件和第二电介质元件的比重的材料形成。

公开(公告)号：US07830067B2

公开(公告)日：2010-11-09

申请号：US12431427

申请日：2009-04-28

申请人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/04

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US20080074212A1

公开(公告)日：2008-03-27

申请号：US11902800

申请日：2007-09-25

申请人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/64 ,  H03H9/25

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6459 ,  H03H9/6469 ,  H03H9/6483

摘要： A filter includes a parallel resonator having first comb electrodes provided on a piezoelectric substrate and a first dielectric film that covers the first comb electrodes, and a series resonator having second comb electrodes provided on the piezoelectric substrate and a second dielectric film covers the second comb electrodes and is made of a material identical to that of the first dielectric film. The first dielectric film has a different thickness from that of the second dielectric film.

摘要翻译： 滤波器包括并联谐振器，其具有设置在压电基板上的第一梳状电极和覆盖第一梳状电极的第一电介质膜，以及设置在压电基板上的具有第二梳状电极的串联谐振器，第二电介质膜覆盖第二梳状电极 并且由与第一电介质膜相同的材料制成。 第一电介质膜的厚度与第二电介质膜的厚度不同。

公开(公告)号：US08354896B2

公开(公告)日：2013-01-15

申请号：US12511162

申请日：2009-07-29

申请人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda

发明人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda

IPC分类号： H03H9/00 ,  H01L41/08

CPC分类号： H03H9/0222 ,  H03H3/08 ,  Y10T29/42

摘要： An acoustic wave device includes a plurality of acoustic wave devices each including a substrate made of a piezoelectric material, a pair of interdigital electrodes formed on the substrate, each of the interdigital electrodes including a plurality of electrode fingers, and an adjustment medium. The adjustment medium includes at least a single layer and is formed on at least a part of the pair of the interdigital electrodes. The adjustment medium further includes at least one thick portion and a thin portion, the thin portion being null or thinner than the thick portion, a total area of the at least one thick portion in a region covering the pair of interdigital electrodes being determined according to a predetermined characteristic value, wherein the plurality of acoustic wave devices include at least two acoustic wave devices that differ from each other with respect to the size of the total area of the at least one thick portion of the adjustment medium.

摘要翻译： 声波装置包括多个声波装置，每个声波装置包括由压电材料制成的基板，形成在基板上的一对叉指电极，每个叉指电极包括多个电极指和调节介质。 调节介质至少包括单层，并且形成在该对叉指电极的至少一部分上。 所述调整介质还包括至少一个厚部分和薄部分，所述薄部分比所述厚部分零或更薄，覆盖所述一对叉指电极的区域中的所述至少一个厚部分的总面积根据 预定特性值，其中所述多个声波装置包括至少两个声波装置，所述至少两个声波装置相对于所述调节介质的所述至少一个较厚部分的总面积的大小彼此不同。

公开(公告)号：US07741931B2

公开(公告)日：2010-06-22

申请号：US11902800

申请日：2007-09-25

申请人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/72 ,  H03H9/64

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6459 ,  H03H9/6469 ,  H03H9/6483

摘要： A filter includes a parallel resonator having first comb electrodes provided on a piezoelectric substrate and a first dielectric film that covers the first comb electrodes, and a series resonator having second comb electrodes provided on the piezoelectric substrate and a second dielectric film covers the second comb electrodes and is made of a material identical to that of the first dielectric film. The first dielectric film has a different thickness from that of the second dielectric film.

摘要翻译： 滤波器包括并联谐振器，其具有设置在压电基板上的第一梳状电极和覆盖第一梳状电极的第一电介质膜，以及设置在压电基板上的具有第二梳状电极的串联谐振器，第二电介质膜覆盖第二梳状电极 并且由与第一电介质膜相同的材料制成。 第一电介质膜的厚度与第二电介质膜的厚度不同。

公开(公告)号：US07659653B2

公开(公告)日：2010-02-09

申请号：US11902184

申请日：2007-09-19

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/145 ,  H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0057 ,  H03H9/02574 ,  H03H9/02929 ,  H03H9/14538 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film formed on the piezoelectric substrate, and electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers. At least a part of the first dielectric film is cut out between adjacent electrode fingers among the electrode fingers.

摘要翻译： 声波装置包括压电基板，形成在压电基板上的第一电介质膜，以及设置在第一电介质膜上并激发声波的电极，电极包括电极指。 在电极指中相邻的电极指之间切出第一电介质膜的至少一部分。

公开(公告)号：US20090212659A1

公开(公告)日：2009-08-27

申请号：US12431427

申请日：2009-04-28

申请人： Satoru MATSUDA ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru MATSUDA ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/04

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US20080061657A1

公开(公告)日：2008-03-13

申请号：US11898359

申请日：2007-09-11

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/13 ,  H01L41/083

CPC分类号： H03H9/02559 ,  H03H9/0038 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film provided on the piezoelectric substrate, electrodes that are provided on the first dielectric film and excite an acoustic wave, and a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes.

摘要翻译： 声波装置包括压电基板，设置在压电基板上的第一电介质膜，设置在第一电介质膜上并激发声波的电极和设置成覆盖电极的第二电介质膜， 比电极厚。

公开(公告)号：US20070210676A1

公开(公告)日：2007-09-13

申请号：US11714157

申请日：2007-03-06

申请人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/00

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US08720022B2

公开(公告)日：2014-05-13

申请号：US12647071

申请日：2009-12-24

申请人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda

发明人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda

IPC分类号： H03H3/013 ,  H01L41/047

CPC分类号： H03H3/10 ,  H03H9/0222 ,  H03H9/02929

摘要： A method of producing an acoustic wave device includes: forming an interdigital electrode on a piezoelectric substrate; forming a barrier film so as to cover the interdigital electrode; forming a medium on the barrier film; measuring a frequency characteristic of an acoustic wave excited by the interdigital electrode; and forming, in an excitation region, an adjustment region having a thickness different from other portions by patterning the barrier film or further providing an adjustment film. When forming the adjustment region, an area T of the adjusting area is adjusted in accordance with the measured frequency characteristic.

摘要翻译： 声波装置的制造方法包括：在压电基板上形成叉指电极; 形成阻挡膜以覆盖叉指电极; 在阻挡膜上形成介质; 测量由叉指电极激发的声波的频率特性; 以及通过对所述阻挡膜进行图案化或进一步提供调整膜，在激发区域中形成具有与其它部分不同的厚度的调节区域。 在形成调整区域时，根据测定的频率特性调整调整区域的面积T.