Functional Device Package
    6.
    发明申请
    Functional Device Package 有权
    功能器件封装

    公开(公告)号:US20080217752A1

    公开(公告)日:2008-09-11

    申请号:US12028108

    申请日:2008-02-08

    IPC分类号: H01L23/02

    摘要: A packaging structure for hermitically sealing a functional device by solder connection at a wafer level in which a first Si substrate having a concave portion metallized on its internal surface and a second Si substrate metallized at a position opposed to said concave portion are used, the metallization applied to the internal surface of the concave portion of the first Si substrate and the metallization applied to the second Si substrate at the position opposed to the concave portion are connected by molten solder to hermetically seal the functional device between the first Si substrate and the second Si substrate, whereby the wettability of the solder for the two Si substrates is improved, the bondability between the Si substrates is enhanced, and the yield at which the package is manufactured is improved.

    摘要翻译: 一种用于通过在晶片级焊接连接来密封功能器件的封装结构,其中使用在其内表面上具有金属化的凹部的第一Si衬底和在与所述凹部相对的位置上金属化的第二Si衬底,所述金属化 施加到第一Si衬底的凹部的内表面,并且在与凹部相对的位置处施加到第二Si衬底的金属化通过熔融焊料连接,以将功能器件密封在第一Si衬底和第二Si衬底之间 Si衬底,由此提高了用于两个Si衬底的焊料的润湿性,提高了Si衬底之间的粘合性,并提高了制造封装的成品率。

    Functional device package with metallization arrangement for improved bondability of two substrates
    7.
    发明授权
    Functional device package with metallization arrangement for improved bondability of two substrates 有权
    具有金属化布置的功能器件封装,用于改善两个衬底的粘合性

    公开(公告)号:US07939938B2

    公开(公告)日:2011-05-10

    申请号:US12028108

    申请日:2008-02-08

    IPC分类号: H01L23/04

    摘要: A packaging structure for hermetically sealing a functional device by solder connection at a wafer level in which a first Si substrate having a concave portion metallized on its internal surface and a second Si substrate metallized at a position opposed to said concave portion are used, the metallization applied to the internal surface of the concave portion of the first Si substrate and the metallization applied to the second Si substrate at the position opposed to the concave portion are connected by molten solder to hermetically seal the functional device between the first Si substrate and the second Si substrate, whereby the wettability of the solder for the two Si substrates is improved, the bondability between the Si substrates is enhanced, and the yield at which the package is manufactured is improved.

    摘要翻译: 一种封装结构,用于通过在晶片级焊接连接来密封功能器件,其中使用在其内表面上具有金属化的凹部的第一Si衬底和在与所述凹部相对的位置上金属化的第二Si衬底,所述金属化 施加到第一Si衬底的凹部的内表面,并且在与凹部相对的位置处施加到第二Si衬底的金属化通过熔融焊料连接,以将功能器件密封在第一Si衬底和第二Si衬底之间 Si衬底,由此提高了用于两个Si衬底的焊料的润湿性,提高了Si衬底之间的粘合性,并提高了制造封装的成品率。