Negative photosensitive composition and method for forming patterns
using the composition
    4.
    发明授权
    Negative photosensitive composition and method for forming patterns using the composition 失效
    负光敏组合物和使用该组合物形成图案的方法

    公开(公告)号:US5529885A

    公开(公告)日:1996-06-25

    申请号:US253776

    申请日:1994-06-03

    摘要: Disclosed are a negative photosensitive composition comprising an alkali-soluble resin, a photo acid generating system, and a crosslinking agent for the alkali-soluble resin which acts on the resin under acidic conditions, in which the crosslinking agent is a highly-alkylated alkoxymethylmelamine resin having a monomer content of from 5 to 40% by weight, and a method for forming a negative photo-resist pattern using the composition. The resist composition is stable during storage and gives good pattern profiles having high aspect ratios even though the resist film is made thick.

    摘要翻译: 公开了一种负型感光性组合物,其包含在酸性条件下作用于树脂的碱溶性树脂,光酸产生体系和用于碱溶性树脂的交联剂,其中交联剂是高度烷基化的烷氧基甲基蜜胺树脂 单体含量为5〜40重量%,以及使用该组合物形成负光致抗蚀剂图案的方法。 抗蚀剂组合物在保存期间是稳定的,并且即使抗蚀剂膜变厚,也能获得具有高纵横比的良好图案轮廓。

    Polymerizable composition for a color filter
    6.
    发明授权
    Polymerizable composition for a color filter 失效
    用于滤色器的可聚合组合物

    公开(公告)号:US6048653A

    公开(公告)日:2000-04-11

    申请号:US10108

    申请日:1998-01-21

    摘要: The present invention provides a polymerizable composition for a color filter, which comprises a (meth)acrylate copolymer containing alicyclic (meth)acryloyl groups in its side chains, a compound having at least one ethylenically unsaturated double bond, a photopolymerization initiator and a colorant, a color filter obtained by coating the composition on a glass substrate, followed by exposure and development; and a method for producing a color filter, which comprises coating the composition on a glass substrate, followed by exposure and development.The polymerizable composition of the present invention is highly sensitive and excellent in chemical resistance. Accordingly, according to the present invention, it is possible to produce a color filter of a high quality without a protective layer such as an oxygen-shielding film.

    摘要翻译: 本发明提供一种滤色器用聚合性组合物,其含有在侧链含有脂环式(甲基)丙烯酰基的(甲基)丙烯酸酯共聚物,具有至少一个烯键式不饱和双键的化合物,光聚合引发剂和着色剂, 通过将组合物涂布在玻璃基板上,然后曝光和显影而获得的滤色器; 以及一种生产滤色器的方法,其包括将组合物涂覆在玻璃基板上,然后曝光和显影。 本发明的聚合性组合物的高灵敏度,耐化学性优异。 因此,根据本发明,可以制造高质量的滤色器,而不需要诸如氧气屏蔽膜的保护层。