公开(公告)号：US20130234263A1

公开(公告)日：2013-09-12

申请号：US13603967

申请日：2012-09-05

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: B81B3/00

CPC classification number: B81B3/0018 ,  B81B3/0051 ,  B81B2201/0264 ,  G01L9/0044 ,  G01L9/0072

Abstract: According to one embodiment, a MEMS element comprises a first electrode that is fixed on a substrate and has plate shape, a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having plate shape, and a first film that includes a first cavity in which the second electrode is accommodated on the substrate. The second electrode is connected to an anchor portion connected to the substrate via a spring portion. An upper surface of the second electrode is connected to the first film.

Abstract translation: 根据一个实施例，MEMS元件包括固定在基板上并具有板形状的第一电极，第二电极，其设置在第一电极的上方，同时面向第一电极，第二电极可在垂直方向上移动并具有 板状，以及包括第一空腔的第一膜，其中第二电极容纳在基板上。 第二电极经由弹簧部连接到与基板连接的锚定部。 第二电极的上表面与第一膜连接。

公开(公告)号：US20090001845A1

公开(公告)日：2009-01-01

申请号：US11851784

申请日：2007-09-07

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: H02N11/00 ,  H01L35/00

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  H01H59/0009 ,  H02N1/008

Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

Abstract translation: 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。

公开(公告)号：US20100246087A1

公开(公告)日：2010-09-30

申请号：US12797391

申请日：2010-06-09

Applicant: Tamio IKEHASHI ,  Hiroaki Yamazaki

Inventor： Tamio IKEHASHI ,  Hiroaki Yamazaki

IPC: H01G4/002

CPC classification number: H01H59/0009 ,  H01H2001/0063 ,  H01H2059/0018 ,  H02N1/006

Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract translation: 半导体集成电路包括静电致动器，估计电路，存储电路和偏置电路。 静电致动器具有顶部电极，底部电极和设置在顶部电极和底部电极之间的绝缘膜。 估计电路估计在静电致动器的绝缘膜中累积的电荷的量。 存储电路通过估计电路存储对电荷量的估计结果。 偏置电路根据存储在存储电路中的估计结果改变驱动静电致动器的驱动电压。

公开(公告)号：US20100126834A1

公开(公告)日：2010-05-27

申请号：US12563433

申请日：2009-09-21

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: H01H57/00

CPC classification number: H01H59/0009 ,  G11C23/00 ,  H01L23/62 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

Abstract: The switch of an aspect of the present invention including first and second electrodes provided on a substrate, an anchor provided on the first electrode, a movable structure of which a first end is supported by the anchor, extending from the anchor to a position above the second electrode, using a conductor, and configured to move in a vertical direction with respect to the second electrode, a contact portion provided at a second end of the movable structure and disposed above the second electrode, a film having a different stress value with respect to the stress value of the movable structure, and warping the contact portion toward the second electrode, and a cap provided on the substrate to cover the movable structure, configured to be in contact with the film, and functioning as a driving electrode.

Abstract translation: 本发明的一个方面的开关包括设置在基板上的第一电极和第二电极，设置在第一电极上的锚杆，可移动结构，其第一端由锚支撑，从锚固件延伸到 第二电极，使用导体，并且构造成相对于第二电极在垂直方向上移动;接触部分，设置在可移动结构的第二端并设置在第二电极上方，具有不同应力值的膜，相对于 相对于可移动结构的应力值，并且使接触部分朝向第二电极翘曲，以及设置在基板上以覆盖被构造为与膜接触并可用作驱动电极的可移动结构的盖。

公开(公告)号：US20100051428A1

公开(公告)日：2010-03-04

申请号：US12552741

申请日：2009-09-02

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: H01H57/00

CPC classification number: H01H59/0009 ,  H01G5/18 ,  H01H1/0036 ,  H01H1/50 ,  H01H1/60

Abstract: A switch includes a first electrode provided on a substrate, an anchor provided on the substrate, a movable structure which is supported by the anchor, provided above the first electrode to be extended from the anchor in a direction, formed of a conductor, and moves downwards, and a contact member which is attached to an edge of the movable structure, formed of a conductor, and warps toward the first electrode.

Abstract translation: 开关包括设置在基板上的第一电极，设置在基板上的锚固体，由锚固件支撑的可移动结构，设置在第一电极上方，以从锚固体沿导体形成的方向延伸并移动 以及接触构件，其附接到由导体形成的可移动结构的边缘，并且朝向第一电极弯曲。

公开(公告)号：US20110115546A1

公开(公告)日：2011-05-19

申请号：US13011334

申请日：2011-01-21

Applicant: Tamio IKEHASHI ,  Hiroaki YAMAZAKI

Inventor： Tamio IKEHASHI ,  Hiroaki YAMAZAKI

IPC: H02B1/00 ,  H01H59/00

CPC classification number: H01H59/0009 ,  H01H2001/0063 ,  H01H2059/0018 ,  H02N1/006

Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract translation: 半导体集成电路包括静电致动器，估计电路，存储电路和偏置电路。 静电致动器具有顶部电极，底部电极和设置在顶部电极和底部电极之间的绝缘膜。 估计电路估计在静电致动器的绝缘膜中累积的电荷的量。 存储电路通过估计电路存储对电荷量的估计结果。 偏置电路根据存储在存储电路中的估计结果，改变驱动静电致动器的驱动电压。

公开(公告)号：US20100295486A1

公开(公告)日：2010-11-25

申请号：US12845921

申请日：2010-07-29

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: G05D1/02 ,  H01L37/00

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  H01H59/0009 ,  H02N1/008

Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

Abstract translation: 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。

公开(公告)号：US20080265710A1

公开(公告)日：2008-10-30

申请号：US12109071

申请日：2008-04-24

Applicant: Tamio IKEHASHI ,  Hiroaki Yamazaki

Inventor： Tamio IKEHASHI ,  Hiroaki Yamazaki

IPC: H02N1/00

CPC classification number: H02N1/006 ,  H01G5/16

Abstract: An electrostatic actuator includes first and second lower electrodes formed apart from each other above a substrate, an electrode portion formed above the first and second lower electrodes and first and second upper electrodes, a distance between the first upper electrode and the first lower electrode at a first portion being greater than that at a second portion, a distance between the second upper electrode and the second lower electrode at a third portion being greater than that at a fourth portion, a first boundary portion between the first and third upper electrodes having a convex shape, a second boundary portion between the second and third upper electrodes having a convex shape, and the electrode portion driving the third upper electrode, and first and second layers formed in the first and second boundary portions.

Abstract translation: 静电致动器包括在基板之上彼此分开形成的第一和第二下部电极，形成在第一和第二下部电极以及第一和第二上部电极上方的电极部分，第一上部电极和第一下部电极之间的距离为 第一部分大于第二部分处的第二部分，第三部分处的第二上部电极和第二下部电极之间的距离大于第四部分处的第二部分，第一和第三上部电极之间的第一边界部分具有凸起 形状，具有凸形的第二和第三上部电极之间的第二边界部分，驱动第三上部电极的电极部分以及形成在第一和第二边界部分中的第一和第二层。