公开(公告)号：US08083507B2

公开(公告)日：2011-12-27

申请号：US12050063

申请日：2008-03-17

申请人： Tea-Jin Park ,  Seung-Ki Chae ,  Kwang-Myung Lee ,  Sang-Gon Lee

发明人： Tea-Jin Park ,  Seung-Ki Chae ,  Kwang-Myung Lee ,  Sang-Gon Lee

IPC分类号： F01C1/30 ,  F03C2/00

CPC分类号： F04C18/126 ,  B08B3/02 ,  B08B5/02 ,  F04C23/001 ,  F04C29/0092 ,  F04C2220/10 ,  F04C2280/02

摘要： Provided is a vacuum pump having a rotation body cleaning unit. The vacuum pump includes a case provided with rotation guide holes at opposite end parts. The case includes a rotation body placed inside the case and including a rotation shaft having opposite ends rotatably supported by the rotation guide holes and a number of lobes provided in the rotation shaft at predetermined intervals. Further, a cleaning part is supported by the case and placed in a space between the lobes and cleans the rotation body.

摘要翻译： 提供一种具有旋转体清洁单元的真空泵。 真空泵包括在相对端部设置有旋转导向孔的壳体。 壳体包括设置在壳体内部的旋转体，包括旋转轴，其具有由旋转引导孔可旋转地支撑的相对端和以预定间隔设置在旋转轴中的多个凸角。 此外，清洁部件被壳体支撑并且放置在叶片之间的空间中并且清洁旋转体。

公开(公告)号：US06602323B2

公开(公告)日：2003-08-05

申请号：US09946632

申请日：2001-09-06

申请人： Seung-Ki Chae ,  Sang-Gon Lee ,  Sang-Hyuk Chung ,  Seong-Jin Heo

发明人： Seung-Ki Chae ,  Sang-Gon Lee ,  Sang-Hyuk Chung ,  Seong-Jin Heo

IPC分类号： B01D5000

CPC分类号： B01D53/70 ,  B01D2257/2066 ,  Y02C20/30 ,  Y02P70/605

摘要： A method of reducing PFC emissions during a semiconductor manufacturing process that includes a set of sub-processes each of which produces at least one PFC includes the steps of exhausting PFC's produced by each sub-process to a common line to form a combined exhaust stream, treating the combined exhaust stream from each sub-process using a separate PFC abatement system, combining the treated exhaust streams to form a combined treated stream, and wet scrubbing the combined treated stream.

公开(公告)号：US20100206519A1

公开(公告)日：2010-08-19

申请号：US12738553

申请日：2007-11-09

申请人： Bong-Hyun Cho ,  Chang-Woo Eun ,  Hyun-Seok Choi ,  Sang-Gon Lee ,  Kwang-Myung Lee ,  In-Joo Lee ,  Yong-Ho Choi ,  Seong-Kuk An ,  Choul-Oh Park

发明人： Bong-Hyun Cho ,  Chang-Woo Eun ,  Hyun-Seok Choi ,  Sang-Gon Lee ,  Kwang-Myung Lee ,  In-Joo Lee ,  Yong-Ho Choi ,  Seong-Kuk An ,  Choul-Oh Park

IPC分类号： F28D15/00

CPC分类号： H01L21/67248 ,  H01L21/67063

摘要： A temperature control system for semiconductor manufacturing equipment is disclosed, which can properly cool a process chamber adopted in the semiconductor manufacturing equipment such as a wafer etching device. The temperature control system for semiconductor manufacturing equipment includes a thermocline for cooling heat transfer fluid accommodated therein through a heat exchange with a heat exchanger and storing heat energy, a supply line for controlling the temperature of the heat transfer fluid in the thermocline through a heater and supplying the heat transfer fluid with a proper temperature to a process device, a recovery line for forwarding the heat transfer fluid having passed through the process device to the thermocline, and a bypass for forwarding a part of the heat transfer fluid passing through the recovery line to the supply line through the heater.

摘要翻译： 公开了一种用于半导体制造设备的温度控制系统，其可以适当地冷却诸如晶片蚀刻装置的半导体制造设备中采用的处理室。 用于半导体制造设备的温度控制系统包括用于通过与热交换器进行热交换而容纳在其中的传热流体冷却并存储热能的温跃层，用于通过加热器控制温跃层中的传热流体的温度的供应管线， 将具有适当温度的传热流体供应到处理装置，用于将已经通过处理装置的传热流体转移到温跃层的回收管线，以及用于将通过回收管线的部分传热流体转运的旁路 通过加热器到供应线。

公开(公告)号：US08963818B2

公开(公告)日：2015-02-24

申请号：US13212782

申请日：2011-08-18

申请人： Chang-Sin Kim ,  Byeong-Doo Kang ,  Yong-Soon Lee ,  Ock-Jin Kim ,  Sang-Gon Lee

发明人： Chang-Sin Kim ,  Byeong-Doo Kang ,  Yong-Soon Lee ,  Ock-Jin Kim ,  Sang-Gon Lee

IPC分类号： G09G3/36 ,  G02F1/1343

CPC分类号： G09G3/3688 ,  G09G3/3648 ,  G09G2300/0413 ,  G09G2310/0232

摘要： A display panel includes a plurality of data lines, a plurality of gate lines, a plurality of dummy loads, a pad portion and a fanout portion. The data lines are disposed in a display area, on which a plurality of pixels are disposed. The gate lines are disposed in the display area and cross the data lines. The dummy loads are disposed in a peripheral area surrounding the display area. The pad portion is disposed in the peripheral area and includes signal pads and dummy pads. The fanout portion includes a first fanout line portion connecting the data lines to the signal pads, and a second fanout line portion connecting the dummy loads to the dummy pads.

摘要翻译： 显示面板包括多条数据线，多条栅极线，多个虚拟负载，焊盘部分和扇出部分。 数据线设置在其上设置有多个像素的显示区域中。 栅极线设置在显示区域中并与数据线交叉。 虚拟负载设置在显示区域周围的周边区域中。 焊盘部分设置在周边区域中，并且包括信号焊盘和虚拟焊盘。 扇出部分包括将数据线连接到信号焊盘的第一扇出线部分和将虚拟负载连接到虚拟焊盘的第二扇出线部分。

公开(公告)号：US07381274B2

公开(公告)日：2008-06-03

申请号：US10870598

申请日：2004-06-16

申请人： Sang-Gon Lee

发明人： Sang-Gon Lee

IPC分类号： C23C16/455 ,  C23F1/00 ,  H01L21/306 ,  C23C16/44

CPC分类号： C23C16/45544 ,  C23C16/4401 ,  C23C16/4409 ,  C23C16/45574

摘要： A gas valve assembly for a deposition apparatus includes: a driving shaft including a plurality of gas supply paths therein; a housing surrounding the driving shaft and including a plurality of through holes therein; a plurality of magnetic seal pairs between the driving shaft and the housing, the plurality of magnetic seal pairs including a magnetic fluid; and a leakage-preventing means between the driving shaft and the housing, the leakage-preventing means preventing a leakage of the magnetic fluid.

摘要翻译： 一种用于沉积设备的气阀组件，包括：驱动轴，其中包括多个气体供应通道; 围绕所述驱动轴并且在其中包括多个通孔的壳体; 所述驱动轴和所述壳体之间的多个磁性密封对，所述多个磁性密封对包括磁性流体; 以及在驱动轴和壳体之间的防漏装置，防漏装置防止磁性流体的泄漏。

公开(公告)号：US20050000453A1

公开(公告)日：2005-01-06

申请号：US10860534

申请日：2004-06-02

申请人： Chul-Ju Hwang ,  Sang-Gon Lee

发明人： Chul-Ju Hwang ,  Sang-Gon Lee

IPC分类号： H01L21/68 ,  H01L21/00 ,  H01L21/687 ,  C23C16/00

CPC分类号： H01L21/68764 ,  H01L21/67103 ,  H01L21/68771

摘要： An apparatus for a semiconductor device includes: a chamber; a susceptor in the chamber; a plurality of heating-blocks on the susceptor; a lift pin assembly through the susceptor; a substrate holder over the susceptor, the substrate holder having a plurality of through holes corresponding to the plurality of heating-blocks; and a shaft combined with the substrate holder-through the susceptor.

摘要翻译： 一种半导体器件的装置，包括：腔室; 室内的一个感受器; 基座上的多个加热块; 提升销组件通过基座; 在所述基座上方的基板保持器，所述基板保持具有对应于所述多个加热块的多个通孔; 以及与基板支架结合的轴穿过基座。

公开(公告)号：US07503458B2

公开(公告)日：2009-03-17

申请号：US11344774

申请日：2006-01-31

申请人： Seung-Un Kim ,  Sa-Mun Hong ,  Wang-Keun Kim ,  Sang-Gon Lee ,  Sang-Yeoul Hwang

发明人： Seung-Un Kim ,  Sa-Mun Hong ,  Wang-Keun Kim ,  Sang-Gon Lee ,  Sang-Yeoul Hwang

IPC分类号： B04C5/24 ,  B04C5/13

CPC分类号： B04C5/13 ,  B04C5/081 ,  B24B57/00

摘要： A cyclone used in a separator apparatus includes a body and a vortex finder. The body includes an inlet passageway, a cylindrical passageway connected to the inlet passageway, and a conical passageway connected to the cylindrical passageway. The cylindrical passageway has an upper end through which first particles in a fluid are exhausted, and a lower end. The conical passageway has an upper end connected to the lower end of the cylindrical passageway, and an opened lower end through which second particles having a specific gravity greater than that of the first particle are exhausted. The vortex finder is connected to the upper end of the cylindrical passageway. A first exhaust passageway is vertically formed in the vortex finder so that the first particles spirally ascend through the first exhaust passageway from the cylindrical passageway.

摘要翻译： 在分离器装置中使用的旋风分离器包括主体和涡流探测器。 主体包括入口通道，连接到入口通道的圆柱形通道和连接到圆柱形通道的锥形通道。 圆柱形通道具有上端，流体中的第一颗粒通过该上端排出，下端。 锥形通道具有连接到圆柱形通道的下端的上端，并且具有比第一颗粒的比重更大的第二颗粒的​​打开的下端被排出。 涡流探测器连接到圆柱形通道的上端。 第一排气通道垂直地形成在旋涡取样器中，使得第一颗粒从圆柱形通道螺旋地通过第一排气通道上升。

公开(公告)号：US08020707B2

公开(公告)日：2011-09-20

申请号：US12364126

申请日：2009-02-02

申请人： Seung-Un Kim ,  Sa-Mun Hong ,  Wang-Keun Kim ,  Sang-Gon Lee ,  Sang-Yeoul Hwang

发明人： Seung-Un Kim ,  Sa-Mun Hong ,  Wang-Keun Kim ,  Sang-Gon Lee ,  Sang-Yeoul Hwang

IPC分类号： B04C5/24

CPC分类号： B04C5/13 ,  B04C5/081 ,  B24B57/00

摘要： A cyclone used in a separator apparatus includes a body and a vortex finder. The body includes an inlet passageway, a cylindrical passageway connected to the inlet passageway, and a conical passageway connected to the cylindrical passageway. The cylindrical passageway has an upper end through which first particles in a fluid are exhausted, and a lower end. The conical passageway has an upper end connected to the lower end of the cylindrical passageway, and an opened lower end through which second particles having a specific gravity greater than that of the first particle are exhausted. The vortex finder is connected to the upper end of the cylindrical passageway. A first exhaust passageway is vertically formed in the vortex finder so that the first particles spirally ascend through the first exhaust passageway from the cylindrical passageway.

摘要翻译： 在分离器装置中使用的旋风分离器包括主体和涡流探测器。 主体包括入口通道，连接到入口通道的圆柱形通道和连接到圆柱形通道的锥形通道。 圆柱形通道具有上端，流体中的第一颗粒通过该上端排出，下端。 锥形通道具有连接到圆柱形通道的下端的上端，并且具有比第一颗粒的比重更大的第二颗粒的​​打开的下端被排出。 涡流探测器连接到圆柱形通道的上端。 第一排气通道垂直地形成在旋涡取样器中，使得第一颗粒从圆柱形通道螺旋地通过第一排气通道上升。

公开(公告)号：US20120256970A1

公开(公告)日：2012-10-11

申请号：US13247467

申请日：2011-09-28

申请人： Ock Jin Kim ,  Sang-Gon Lee ,  Yong-Soon Lee ,  Chang Sin Kim

发明人： Ock Jin Kim ,  Sang-Gon Lee ,  Yong-Soon Lee ,  Chang Sin Kim

IPC分类号： G09G5/10

CPC分类号： G09G3/3696 ,  G09G3/2003 ,  G09G3/3614 ,  G09G2310/027 ,  G09G2320/0242 ,  G09G2320/0276 ,  G09G2320/0666

摘要： A display device includes a driving device, which includes a signal controller which receives an input image signal and an input control signal and outputs an image data and a data control signal; a reference voltage generator which generates a first reference voltage and a second reference voltage; and a data driver which receives the image data and the data control signal from the signal controller and outputs a data voltage. The data control signal includes a first color gamma control signal, a second color gamma control signal, and a third color gamma control signal. The data driver includes a reference gamma voltage generator which receives the first reference voltage and the second reference voltage from the reference voltage generator, receives the first color, second color, and third color gamma control signals from the signal controller, and generates a reference gamma voltage according to color information of the image data.

摘要翻译： 显示装置包括：驱动装置，其包括接收输入图像信号的信号控制器和输入控制信号，并输出图像数据和数据控制信号; 参考电压发生器，其产生第一参考电压和第二参考电压; 以及从信号控制器接收图像数据和数据控制信号并输出​​数据电压的数据驱动器。 数据控制信号包括第一颜色伽马控制信号，第二颜色伽马控制信号和第三颜色伽马控制信号。 数据驱动器包括参考伽玛电压发生器，其从参考电压发生器接收第一参考电压和第二参考电压，从信号控制器接收第一颜色，第二颜色和第三颜色伽马控制信号，并产生参考伽马 电压根据图像数据的颜色信息。

公开(公告)号：US20070119480A1

公开(公告)日：2007-05-31

申请号：US11498302

申请日：2006-08-02

申请人： Tae-Young Nam ,  Wang-Keun Kim ,  Sang-Gon Lee ,  Young-Seok Roh ,  Ho-Wang Kim ,  Jin-Won Kim ,  Hyung-Geuk Kim

发明人： Tae-Young Nam ,  Wang-Keun Kim ,  Sang-Gon Lee ,  Young-Seok Roh ,  Ho-Wang Kim ,  Jin-Won Kim ,  Hyung-Geuk Kim

IPC分类号： B08B9/00

CPC分类号： B08B3/00 ,  C23C16/4482

摘要： An apparatus for supplying a chemical solution includes a mother tank storing a chemical solution, an intermediate tank disposed in a higher position than the mother tank with a first height difference (h), and the intermediate tank is adapted to receive a fixed amount of chemical solution from the mother tank. The apparatus further includes a bubbling tank disposed in a higher position than the intermediate tank with a second height difference (h′) and the bubbling tank is adapted to receive the fixed amount of the chemical solution from the intermediate tank.

摘要翻译： 一种用于提供化学溶液的装置包括储存化学溶液的母罐，设置在比母罐高的位置具有第一高差（h）的中间罐，并且中间罐适于接收固定量的化学品 解决方案从母箱。 该装置还包括设置在具有第二高度差（h'）的中间罐的更高位置的鼓泡罐，并且所述鼓泡罐适于从中间罐接收固定量的化学溶液。