公开(公告)号：US07635501B2

公开(公告)日：2009-12-22

申请号：US10203804

申请日：2001-02-14

申请人： Tetsuo Komai ,  Norihiko Nomura

发明人： Tetsuo Komai ,  Norihiko Nomura

IPC分类号： C23C16/00

CPC分类号： C23C16/4412

摘要： An exhaust pipe (10) includes an inner cylinder (11) having an exhaust gas passage (10′) formed therein, an outer cylinder provided outside the inner cylinder with a gap (15) being formed therebetween and a heating device (13) attached to the inner cylinder 11. The gap (15) is communicated with the exhaust gas passage (10′). When a gas is discharged from the reaction vacuum chamber, a vacuum is created not only in the exhaust gas passage (10′) but also in the gap (15). Therefore, release of heat from the heating device to the outside can be suppressed. Consequently, the inner cylinder (11) can be efficiently heated to a sufficiently high temperature, thus preventing deposition and accumulation of a substance contained in the discharged gas on the inner surface of the inner cylinder (11). The deposition and accumulation of such a substance can also be prevented by forming a gas flow layer (18) of, for example, an inert gas, along the inner surface of the inner cylinder (11.

摘要翻译： 排气管（10）具有形成有排气通路（10'）的内筒（11），设置在内筒外侧的外筒，在其间形成有间隙（15），以及安装有加热装置 间隙（15）与废气通道（10'）连通。 当气体从反应真空室排出时，不仅在排气通道（10'）中而且在间隙（15）中也产生真空。 因此，可以抑制从加热装置释放到外部的热量。 因此，能够将内筒（11）有效地加热到足够高的温度，从而防止包含在排出气体中的物质在内筒（11）的内表面上的堆积和堆积。 也可以通过沿内筒（11）的内表面形成例如惰性气体的气流层（18）来防止这种物质的沉积和堆积。

公开(公告)号：US6158226A

公开(公告)日：2000-12-12

申请号：US990582

申请日：1997-12-15

申请人： Nobuharu Noji ,  Norihiko Nomura ,  Tetsuro Sugiura ,  Yuji Matsuoka

发明人： Nobuharu Noji ,  Norihiko Nomura ,  Tetsuro Sugiura ,  Yuji Matsuoka

IPC分类号： F04B37/16 ,  B01D53/00 ,  C23C16/44 ,  F25B21/02 ,  B01D8/00 ,  F25D17/06

CPC分类号： C23C16/4412 ,  B01D53/002 ,  F25B21/02

摘要： A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a regeneration means; not less than two trap sections communicable either with the exhaust path or with the regeneration path; and switching means for transposing the trap sections either to the exhaust path or to the regeneration path. A trapping operation and a regeneration operation can be performed concurrently respectively in the exhaust path and the regeneration path.

摘要翻译： 提出一种捕集装置，以提高真空处理装置的生产效率。 捕集装置包括用于通过真空泵将来自密封室的处理气体排出的排气路径; 再生路径，邻近排气通道设置并包括再生装置; 不少于两个可与排气路径或再生路径通信的陷阱段; 以及用于将收集部分转置到排气路径或再生路径的切换装置。 可以在排气路径和再生路径中同时进行捕集操作和再生操作。

公开(公告)号：US06464466B1

公开(公告)日：2002-10-15

申请号：US09706694

申请日：2000-11-07

申请人： Norihiko Nomura ,  Nobuharu Noji

发明人： Norihiko Nomura ,  Nobuharu Noji

IPC分类号： F04F1100

CPC分类号： C23C16/4412

摘要： A trap apparatus is provided for improving the efficiency of trapping a product or the efficiency of regenerating the trap unit, i.e., the efficiency of removing the product deposited on the trap unit. The trap apparatus is disposed in a discharge path for evacuating a hermetically sealed chamber through a vacuum pump. The trap apparatus comprises a trap unit for depositing thereon a product contained in a discharged gas and removing the product, and the trap unit has a surface which has been subjected to hydrophilization treatment.

摘要翻译： 提供一种捕集装置，用于提高捕集产品的效率或再生捕集器的效率，即，去除沉积在捕集器上的产品的效率。 捕集装置设置在用于通过真空泵抽真空密封室的排出路径中。 捕集装置包括用于在其上沉积包含在排出气体中的产品并去除产品的捕集器，并且捕集单元具有已进行亲水处理的表面。

公开(公告)号：US06554879B1

公开(公告)日：2003-04-29

申请号：US09630639

申请日：2000-08-01

申请人： Norihiko Nomura

发明人： Norihiko Nomura

IPC分类号： F04B3716

CPC分类号： C23C16/4412 ,  B01D8/00 ,  B01D53/02 ,  B01D53/14 ,  B01D53/34

摘要： A trap apparatus includes a discharge path for evacuating a hermetically sealed chamber through a vacuum pump, a hermetically sealed trap container extended across the discharge path and a regeneration path disposed adjacent to the discharge path, a trap unit disposed in the trap container for attaching a product in a discharged gas thereon and removing the product form the discharged gas, the trap unit being selectively located at the discharge path or the regeneration path, a valve element disposed on both sides of the trap unit and being movable integrally with the trap unit, and a sealing material mounted on an outer circumferential surface of the valve element so as to slide over an inner circumferential surface of the trap container when the trap unit is moved.

摘要翻译： 捕集装置包括用于通过真空泵抽真空密封室的排放路径，横跨排出路径延伸的气密收集容器和邻近排放路径设置的再生路径，设置在捕集容器中的捕集单元，用于附接 产品在其中排出的气体，并从排出的气体中除去产品，该捕集单元选择性地位于排出路径或再生路径处;阀元件，设置在捕集单元的两侧并与捕集单元一体地移动， 以及密封材料，其安装在所述阀体的外周面上，以在所述捕集器移动时在所述捕集容器的内周面上滑动。

公开(公告)号：US06368371B1

公开(公告)日：2002-04-09

申请号：US09485616

申请日：2000-02-14

申请人： Norihiko Nomura ,  Nobuharu Noji

发明人： Norihiko Nomura ,  Nobuharu Noji

IPC分类号： B01D4508

CPC分类号： F04B37/16 ,  B01D45/08 ,  F04B37/08

摘要： The present invention provides a trap apparatus which is capable of increasing the trapping efficiency while fulfilling a conductance allowed by a vacuum chamber in a depositing process or the like, for thereby increasing the service life of a vacuum pump and protecting a toxic substance removing device for increased operation reliability, and reducing equipment and running costs. The trap apparatus has a trap unit (18) disposed in a discharge passage (14) for discharging therethrough a gas from a vacuum chamber (10) with a vacuum pump (12) for trapping and removing a product in a discharged gas. The trap unit (18) has trap passages comprising an upstream passage portion (44) spreading outwardly from the center and a downstream passage portion (42) directed inwardly toward the center.

摘要翻译： 本发明提供一种捕集装置，其能够在沉积处理等中实现真空室允许的导电性的同时提高捕集效率，从而提高真空泵的使用寿命并保护有毒物质去除装置 提高运行可靠性，降低设备运行成本。 捕集装置具有设置在排出通道（14）中的捕集单元（18），用于通过真空室（10）从真空室（10）中排出气体，用于捕集和去除排放气体中的产物。 捕集器（18）具有捕集通道，该通道包括从中心向外展开的上游通道部分（44）和向内朝向中心的下游通道部分（42）。

公开(公告)号：US07217306B2

公开(公告)日：2007-05-15

申请号：US10839288

申请日：2004-05-06

申请人： Norihiko Nomura ,  Nobuharu Noji ,  Kiyoshi Yanagisawa

发明人： Norihiko Nomura ,  Nobuharu Noji ,  Kiyoshi Yanagisawa

IPC分类号： B01D45/00

CPC分类号： C23C16/4412 ,  B01D8/00 ,  Y10S55/15

摘要： A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.

摘要翻译： 连续处理捕集装置能够在保持真空室所需的电导的同时提高捕集效率。 捕集装置包括：排气通道，用于通过真空泵排出密封室;气密密封的捕集和再生壳体，其跨过排气通道延伸;再生通道和邻近排气通道的再生通道;以及捕集单元，可移动地容纳在捕集器中， 再生壳体，用于在连接到排气通道的捕获位置和连接到再生通道的再生位置之间进行选择性运动。 捕集装置还包括一个在收集单元的每一侧上设置的阀体和在其外圆周表面上的用于密封排气通道和再生通道的支撑密封件，以及用于监测密封件是否正常工作的监控机构。

公开(公告)号：US06332925B1

公开(公告)日：2001-12-25

申请号：US08861007

申请日：1997-05-21

申请人： Nobuharu Noji ,  Yasuhiro Niimura ,  Hiroaki Ogamino ,  Hiroshi Hattori ,  Norihiko Nomura ,  Tetsuro Sugiura ,  Yuji Matsuoka

发明人： Nobuharu Noji ,  Yasuhiro Niimura ,  Hiroaki Ogamino ,  Hiroshi Hattori ,  Norihiko Nomura ,  Tetsuro Sugiura ,  Yuji Matsuoka

IPC分类号： C23C1600

CPC分类号： C23C16/4412 ,  B01D53/002 ,  F25B21/02 ,  Y02C20/30

摘要： An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.

摘要翻译： 公开了一种使用寿命长，结构紧凑，可靠性高的疏散系统。 该系统能够使工艺气体重复使用，从而降低资本投资和运营的总体成本。 该系统包括处理室和通过用于抽空处理室的抽空管道与处理室连通的真空泵。 排气管设有不少于两个串联布置的捕集装置，并在不同温度下操作，用于捕获从处理室排出的废气中所含的不同组分。

公开(公告)号：US6051053A

公开(公告)日：2000-04-18

申请号：US990577

申请日：1997-12-15

申请人： Nobuharu Noji ,  Norihiko Nomura ,  Tetsuro Sugiura

发明人： Nobuharu Noji ,  Norihiko Nomura ,  Tetsuro Sugiura

IPC分类号： B01D8/00 ,  B01D53/00 ,  C23C16/44

CPC分类号： C23C16/4412 ,  B01D53/002 ,  B01D8/00

摘要： A trapping device that performs a regeneration operation efficiently so as to raise the overall operational reliability by improving the service life as well as to lower the capital and operation cost of the processing system. The trapping device includes an exhaust path for evacuating a spent gas from a hermetic chamber through a vacuum pump; a trap section for trapping component substances from the spent gas flowing through the exhaust path; a cleaning path disposed adjacent to the exhaust path for flowing a cleaning solution for cleaning the trap section; and driving device for transposing the trap section to communicate either with the exhaust path or with the cleaning path.

摘要翻译： 一种捕获装置，其有效地进行再生操作，以通过提高使用寿命来提高整体的运行可靠性，以及降低处理系统的资本和运营成本。 捕集装置包括用于通过真空泵将来自密封室的废气排出的排气路径; 用于捕集来自流过排气路径的废气中的成分物质的捕集部分; 与排气通道相邻设置的清洁通道，用于使用于清洁捕集部分的清洁溶液流动; 以及驱动装置，用于转置捕获部分以与排气路径或与清洁路径通信。

公开(公告)号：US06763700B2

公开(公告)日：2004-07-20

申请号：US10387567

申请日：2003-03-14

申请人： Norihiko Nomura ,  Nobuharu Noji ,  Kiyoshi Yanagisawa

发明人： Norihiko Nomura ,  Nobuharu Noji ,  Kiyoshi Yanagisawa

IPC分类号： G01M302

CPC分类号： C23C16/4412 ,  B01D8/00 ,  Y10S55/15

摘要： A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.

公开(公告)号：US06553811B2

公开(公告)日：2003-04-29

申请号：US09986672

申请日：2001-11-09

申请人： Norihiko Nomura ,  Nobuharu Noji ,  Kiyoshi Yanagisawa

发明人： Norihiko Nomura ,  Nobuharu Noji ,  Kiyoshi Yanagisawa

IPC分类号： G01M308

CPC分类号： C23C16/4412 ,  B01D8/00 ,  Y10S55/15

摘要： A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.