-
公开(公告)号：US06332925B1
公开(公告)日：2001-12-25
申请号：US08861007
申请日：1997-05-21
申请人： Nobuharu Noji , Yasuhiro Niimura , Hiroaki Ogamino , Hiroshi Hattori , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
发明人： Nobuharu Noji , Yasuhiro Niimura , Hiroaki Ogamino , Hiroshi Hattori , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
IPC分类号： C23C1600
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02 , Y02C20/30
摘要： An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.
摘要翻译： 公开了一种使用寿命长，结构紧凑，可靠性高的疏散系统。 该系统能够使工艺气体重复使用，从而降低资本投资和运营的总体成本。 该系统包括处理室和通过用于抽空处理室的抽空管道与处理室连通的真空泵。 排气管设有不少于两个串联布置的捕集装置，并在不同温度下操作，用于捕获从处理室排出的废气中所含的不同组分。
-
公开(公告)号：US20070026150A1
公开(公告)日：2007-02-01
申请号：US10559669
申请日：2004-06-30
IPC分类号： C23C16/00 , H01L21/302
CPC分类号： C23C16/45593 , C23C16/4412 , C30B25/02 , H01L21/67017
摘要： A substrate processing system is provided, which efficiently utilizes reactive substances or carrier gases necessary for the surface processing of a substrate, simplifies equipment for the gas transfer and effects energy saving. This system comprises a gas supply source 12 for supplying a process gas containing a reactive substance, a reservoir tank 14 connected to the gas supply source 12 for reserving the process gas, a reactor 10 for exposing a substrate placed therein to the process gas, a first circulation pipe 38 for introducing the process gas inside the reactor 10 into the reservoir tank 14, a second circulation pipe 42 for introducing at least part of the process gas in the reservoir tank 14 into the reactor 10, and a flow regulating valve 44 disposed in the second circulation pipe 42 for regulating the amount of process gas to be introduced into the reactor 10.
摘要翻译： 提供了一种基板处理系统，其有效利用基板表面处理所需的反应物质或载气，简化了用于气体传递的设备并且实现了节能。 该系统包括用于供给含有反应性物质的处理气体的气体供给源12，与气体供给源12连接以用于储存处理气体的储存罐14，将放置在其中的基板暴露于处理气体的反应器10， 用于将反应器10内的处理气体引入储存槽14的第一循环管38，用于将储存罐14中的至少一部分处理气体引入反应器10的第二循环管42和设置在流化床 在第二循环管42中，用于调节要引入反应器10的工艺气体的量。
-
公开(公告)号：US20090087564A1
公开(公告)日：2009-04-02
申请号：US12289066
申请日：2008-10-20
IPC分类号： C23C16/455
CPC分类号： C23C16/45593 , C23C16/4412 , C30B25/02 , H01L21/67017
摘要： A substrate processing system which utilizes reactive substances or carrier gases to process the surface of a substrate is provided. The system includes a gas supply source for supplying a process gas containing a reactive substance, a reservoir tank connected to the gas supply source for reserving the process gas, a reactor for exposing a substrate placed therein to the process gas, a first circulation pipe for circulating the process gas inside the reactor to the reservoir tank, a second circulation pipe for circulating at least part of the process gas in the reservoir tank to the reactor, and a flow regulating valve disposed in the second circulation pipe for controlling the amount of process gas introduced into the reactor.
摘要翻译： 提供了利用反应物质或载气来处理基板表面的基板处理系统。 该系统包括用于供应包含反应物质的处理气体的气体供应源，连接到用于储存处理气体的气体供应源的储存罐，用于将放置在其中的基板暴露于处理气体的反应器，用于 将反应器内的工艺气体循环到储罐中，将第二循环管道循环到储罐中的至少一部分处理气体到达反应器;以及流量调节阀，其设置在第二循环管道中，用于控制处理量 气体引入反应器。
-
4.发明授权公开(公告)号：US08066495B2
公开(公告)日：2011-11-29
申请号：US12613854
申请日：2009-11-06
IPC分类号： F04B35/04
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译： 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。
-
5.发明申请公开(公告)号：US20100047096A1
公开(公告)日：2010-02-25
申请号：US12613854
申请日：2009-11-06
IPC分类号： F04D19/04 , F04D29/043 , F04D29/20
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译： 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。
-
6.发明申请Vacuum evacuation device and method, and substrate processing apparatus and method 审中-公开真空抽气装置及方法，以及基板处理装置及方法公开(公告)号：US20070048145A1
公开(公告)日：2007-03-01
申请号：US11501793
申请日：2006-08-10
申请人： Katsutoshi Ishii , Ken Nakao , Takanobu Asano , Kota Umezawa , Hiroaki Ogamino , Tadashi Urata , Katsuaki Usui , Masafumi Inoue , Shinichi Sekiguchi , Hironobu Yamasaki
发明人： Katsutoshi Ishii , Ken Nakao , Takanobu Asano , Kota Umezawa , Hiroaki Ogamino , Tadashi Urata , Katsuaki Usui , Masafumi Inoue , Shinichi Sekiguchi , Hironobu Yamasaki
IPC分类号： F04B49/06
CPC分类号： F04D19/042 , F04D27/0261
摘要： A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.
摘要翻译： 本发明的真空排气装置2包括：真空泵4,5，用于在处理室21中排出气体G 2，工艺气体G 1引入到该气体G 2中并进行处理反应，以在所述 处理室21; 以及用于执行调节所述真空泵4,5的转速的第一控制的控制装置6，使得所述处理室21中的压力条件达到在所述处理反应期间适用于所述处理反应的压力条件，其中所述控制装置 图6基于与所述处理反应相关的处理信息计算出所述真空泵4,5的指定转速，并且执行使所述真空泵4,5在所述第一控制之前达到所述指定转速的第二控制。 真空排气装置2能够在不使真空泵4,5过载的情况下在短时间内将处理室21内的压力提高到目标压力，而与过程反应条件无关。
-
公开(公告)号：US06926493B1
公开(公告)日：2005-08-09
申请号：US09473137
申请日：1999-12-28
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/522 , F04D29/701
摘要： A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to any damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump includes a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion.
摘要翻译： 提出了高安全性和可靠性的涡轮分子泵，如果在转子侧出现异常状况，则不会对定子或泵壳等静止部分造成任何损坏，从而导致真空损失 真空处理系统。 涡轮分子泵包括转子; 围绕转子的定子组件; 以及围绕定子组件的壳体部分，其中在定子组件和壳体部分之间形成至少一个部分间隙，使得当从转子施加到定子组件的异常转矩时，防止直接冲击传递 定子组件到壳体部分。
-
公开(公告)号：US06447271B2
公开(公告)日：2002-09-10
申请号：US09732739
申请日：2000-12-11
申请人： Yoshinori Ojima , Kozo Matake , Genichi Sato , Yasushi Hisabe , Masami Nagayama , Katsuaki Usui , Hiroaki Ogamino
发明人： Yoshinori Ojima , Kozo Matake , Genichi Sato , Yasushi Hisabe , Masami Nagayama , Katsuaki Usui , Hiroaki Ogamino
IPC分类号： F04B3504
CPC分类号： F04C28/08 , F04C29/0085 , H02K16/02 , H02K21/16 , H02K29/03
摘要： A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
-
公开(公告)号：US08109744B2
公开(公告)日：2012-02-07
申请号：US12410780
申请日：2009-03-25
CPC分类号： F04D19/042 , F04D17/168 , F04D29/0513 , F04D29/28
摘要： An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supporting the rotor blades, and a bearing and motor section having a motor for rotating the main shaft and a bearing mechanism for supporting the main shaft rotatably. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft.
摘要翻译： 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分，用于支撑转子叶片的主轴以及具有用于使主轴旋转的马达的轴承和马达部分以及用于 可旋转地支撑主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承，在气体轴承的静止部分的两个表面上形成螺旋槽，并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。
-
公开(公告)号：US07360454B2
公开(公告)日：2008-04-22
申请号：US11418142
申请日：2006-05-05
IPC分类号： G01F1/22
摘要： A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.
摘要翻译： 流量计可以测量流量小的流量，测量精度高，可制成小型化，可以处理各种类型的化学药品，并能以低成本轻松生产。 该流量计包括：具有放大部分并垂直设置的壳体; 以及包围在壳体的扩大部分中并且至少部分地具有检测表面的浮子。 浮子被从下方流入壳体的液体向上推，并在壳体内向上流动。 流量计还包括设置在壳体的扩大部分外部的至少一个位移传感器，用于通过磁化浮子的检测表面来检测浮子的轴向位移。
-
-
-
-
-
-
-
-
-
搜索结果
18 条记录 (耗时 0.028 秒)
