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公开(公告)号：US11237335B1
公开(公告)日：2022-02-01
申请号：US16586249
申请日：2019-09-27
IPC分类号： G02B6/35
摘要： MEMS-actuated optical switches can be implemented on photonic chips. These switches are compact, essentially planar, simple to implement and include only one moving MEMS component per switch. The switches exhibit low optical loss, require low power to operate, and are simple to control and easy to integrate with other optical devices. Each switch has two optical waveguides that are optically coupled in an ON switch state and not coupled in an OFF switch state. An end or a medial section of one of the two waveguides may translate between the ON and OFF states to affect the coupling. Alternatively, a coupling frustrator may translate between the ON and OFF states to affect the coupling.
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公开(公告)号：US20200096336A1
公开(公告)日：2020-03-26
申请号：US16580618
申请日：2019-09-24
发明人： Eugene H. Cook , Jonathan J. Bernstein , Mirela G. Bancu , Marc Steven Weinberg , William Sawyer
IPC分类号： G01C19/5621 , B81C1/00 , B81B3/00 , G01C19/5628
摘要： Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
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公开(公告)号：US10345332B2
公开(公告)日：2019-07-09
申请号：US15288843
申请日：2016-10-07
发明人： Jonathan J. Bernstein , Marc S. Weinberg , Amy Duwel , Paul A. Ward , Nicol E. McGruer , Matteo Rinaldi , Eugene H. Cook
IPC分类号： G01P15/135 , H01H1/00 , H01H35/14
摘要： An environmental physical sensor is provided that includes a power input terminal, a sensor output terminal, and a resonant switch. The resonant switch includes a mechanical element that is responsive to an environmental stimulus and is coupled to an electrical switch. The electrical switch is operable between an open position and a closed position and electrically connects the power input terminal to the sensor output terminal when in the closed position. The mechanical element is configured to intermittently actuate the electrical switch into the closed position responsive to the environmental stimulus.
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公开(公告)号：US20160341551A1
公开(公告)日：2016-11-24
申请号：US15160421
申请日：2016-05-20
IPC分类号： G01C19/5726 , G01C19/5733
CPC分类号： G01C19/5726 , G01C19/5684 , G01C19/5733
摘要： According to one aspect, embodiments herein provide a gyroscope comprising a central anchor, a plurality of internal flexures, a plurality of masses, each mass coupled to the central anchor via at least one of the plurality of internal flexures and configured to translate in a plane of the gyroscope, and a plurality of mass-to-mass couplers, each mass-to-mass coupler coupled between two adjacent masses of the plurality of masses, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of a corresponding one of the plurality of masses, wherein the plurality of transducers is configured to drive the plurality of masses in at least a first vibratory mode and a second vibratory mode.
摘要翻译： 根据一个方面，本文的实施例提供了一种陀螺仪，其包括中心锚固体，多个内部挠曲件，多个质量块，每个质量块通过所述多个内部挠曲件中的至少一个连接到所述中心锚固件并且构造成在平面中平移 以及多个质量对质量耦合器，每个质量对质量耦合器耦合在所述多个质量块的两个相邻质量块之间，以及多个换能器，每个换能器被配置为执行驱动和感测中的至少一个 所述多个传感器中的相应一个质量块的运动被配置成以至少第一振动模式和第二振动模式驱动所述多个质量块。
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5.发明授权Rotary nanotube bearing structure and methods for manufacturing and using the same 有权旋转纳米管轴承结构及其制造和使用方法公开(公告)号：US09150405B2
公开(公告)日：2015-10-06
申请号：US14310247
申请日：2014-06-20
发明人： David Carter , Marc S. Weinberg , Eugene H. Cook , Peter Miraglia
CPC分类号： B81C1/00198 , B81B2201/0242 , B81B2201/034 , F04B19/006 , F04D13/00 , F04D25/00 , F16C33/04 , G01C19/06 , Y10T74/12
摘要： In one embodiment, a rotary device includes a multiwall nanotube that extends substantially perpendicularly from a substrate. A rotor may be coupled to an outer wall of the multiwall nanotube, be spaced apart from the substrate, and be free to rotate around an elongate axis of the multiwall nanotube.
摘要翻译： 在一个实施例中，旋转装置包括从衬底基本上垂直延伸的多壁纳米管。 转子可以耦合到多壁纳米管的外壁，与基底间隔开，并且可以围绕多壁纳米管的细长轴自由旋转。
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公开(公告)号：US11530917B2
公开(公告)日：2022-12-20
申请号：US16580618
申请日：2019-09-24
发明人： Eugene H. Cook , Jonathan J. Bernstein , Mirela G. Bancu , Marc Steven Weinberg , William Sawyer
IPC分类号： G01C19/5621 , B81C1/00 , B81B3/00 , G01C19/5628
摘要： Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
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公开(公告)号：US10113873B2
公开(公告)日：2018-10-30
申请号：US15160421
申请日：2016-05-20
IPC分类号： G01C19/574 , G01C19/5684 , G01C19/5726 , G01C19/5733
摘要： According to one aspect, embodiments herein provide a gyroscope comprising a central anchor, a plurality of internal flexures, a plurality of masses, each mass coupled to the central anchor via at least one of the plurality of internal flexures and configured to translate in a plane of the gyroscope, and a plurality of mass-to-mass couplers, each mass-to-mass coupler coupled between two adjacent masses of the plurality of masses, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of a corresponding one of the plurality of masses, wherein the plurality of transducers is configured to drive the plurality of masses in at least a first vibratory mode and a second vibratory mode.
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公开(公告)号：US20180245946A1
公开(公告)日：2018-08-30
申请号：US15906177
申请日：2018-02-27
发明人： Marc Steven Weinberg , Ralph Cohn , Eugene H. Cook
IPC分类号： G01C25/00 , G01C19/5776
CPC分类号： G01C25/00 , G01C19/5684 , G01C19/5776 , G01C25/005
摘要： According to one aspect, embodiments herein provide a whole angle gyroscope comprising a central point, at least one mass arranged symmetrically about the central point, a plurality of transducers, each configured to perform at least one of driving and sensing motion of the at least one mass, and a processor coupled to the plurality of transducers, the processor configured to operate the plurality of transducers to drive the at least one mass in at least a first vibratory mode and a second vibratory mode, identify a rate dead zone of the whole angle gyroscope, and operate the plurality of transducers to apply a force to the at least one mass to reduce the identified rate dead zone of the whole angle gyroscope.
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公开(公告)号：US10014204B2
公开(公告)日：2018-07-03
申请号：US15207185
申请日：2016-07-11
发明人： Eugene H. Cook , Amy Duwel , David J. Carter , Gayatri E. Perlin
IPC分类号： H01L21/683 , H01L21/304 , H01L21/3065 , H01L21/78 , H01L23/00 , G06K19/073
CPC分类号： H01L21/6835 , G06K19/07381 , H01L21/304 , H01L21/30604 , H01L21/3065 , H01L21/78 , H01L23/57 , H01L2221/68327
摘要： A method of fabricating ultra-thin semiconductor devices includes forming an array of semiconductor dielets mechanically suspended on a frame with at least one tether connecting each semiconductor dielet of the array of semiconductor dielets to the frame.
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公开(公告)号：US20170367418A1
公开(公告)日：2017-12-28
申请号：US15534907
申请日：2015-12-09
发明人： David J. Carter , Tirunelveli S. Sriram , Parshant Kumar , Clayton Morris , William W. McFarland , Eugene H. Cook , John LeBlanc , Alla Gimbel
IPC分类号： A41D19/015 , B29C33/42 , B29D99/00 , B29C33/38 , B29C39/10 , B29C45/37 , B29C39/02 , B29L31/48
CPC分类号： A41D19/01564 , B29C33/3842 , B29C33/424 , B29C33/58 , B29C37/0053 , B29C39/026 , B29C39/10 , B29C39/26 , B29C45/372 , B29C2059/023 , B29D99/0067 , B29K2075/00 , B29K2105/0097 , B29K2863/00 , B29K2891/00 , B29L2031/4864
摘要： A mold for casting a micro-scale structure includes an upper surface including a first cavity having a first depth. A negative pattern for an array of micro-scale structures is defined in a surface of the first cavity. The mold includes at least one second cavity having a second depth defined in the cavity outside of the negative pattern for the array of micro-scale structures. The at least one second cavity defines a negative pattern for a standoff of the micro-scale structure. A fabric retaining frame is disposed in the first cavity.
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