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1.发明申请DEVICE MEMBER INICLUDING CAVITY AND METHOD OF PRODUCING THE DEVICE MEMBER INCLUDING CAVITY 有权装置构件确定空穴和制造包括腔室的装置构件的方法公开(公告)号：US20150211949A1
公开(公告)日：2015-07-30
申请号：US14430321
申请日：2013-06-18
CPC分类号： G01L9/0073 , B81B2201/0264 , B81C1/00047 , B81C1/00293 , G01L9/0042 , H01L29/84
摘要： [Problem]The enclosing layer is not invaded in the gap, and the gap might not be buried, and the cavity which has the predetermined shape to be aimed can be formed by an easy step.[Resolution Approach]In the invention, comprising; the base member including the semiconductor 12, the interlayer 14, which is formed on the base member 12 and has the nonconductivity, the upper layer 16, which is formed on the interlayer 14 and includes the semiconductor, the opening portion 18 formed to the upper layer 16, the gas-permeable sealing layer 20, which is formed to seal the opening portion 18, wherein the cavity 22 is a cavity which is formed by removing the interlayer 14 with an etching gas that is penetrated through the sealing layer 20.
摘要翻译： [问题]封闭层不会在间隙中侵入，并且间隙可能不被埋入，并且具有预定形状的目标腔体可以通过简单的步骤形成。 [解决方法]在本发明中，包括： 包括半导体12的基底构件，形成在基底构件12上并具有非导电性的中间层14，形成在中间层14上并包括半导体的上层16，形成在上部的开口部18 层16，形成为密封开口部分18的透气性密封层20，其中空腔22是通过穿过密封层20的蚀刻气体去除中间层14而形成的空腔。
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2.发明授权公开(公告)号：US09726563B2
公开(公告)日：2017-08-08
申请号：US14430321
申请日：2013-06-18
CPC分类号： G01L9/0073 , B81B2201/0264 , B81C1/00047 , B81C1/00293 , G01L9/0042 , H01L29/84
摘要： A device member including a cavity, includes a base member, an interlayer, an upper layer, an opening portion, and a gas-permeable sealing layer. The base member includes a first semiconductor. The interlayer is formed on the base member and is non-conductive. The upper layer is formed on the interlayer and includes a second semiconductor. The opening portion is formed at the upper layer. The gas-permeable sealing layer is formed to seal the opening portion formed at the upper layer. The cavity is formed by removing the interlayer with an etching gas that penetrates through the sealing layer.
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公开(公告)号：US11489460B2
公开(公告)日：2022-11-01
申请号：US17053609
申请日：2019-04-25
摘要： The vibration-driven energy harvester includes: a first electrode; a second electrode facing the first electrode; a holder holding the first electrode and the second electrode so as to be movable relative to each other; a half-wave rectifier electrically connected to the first and the second electrodes that causes current flowing from the first electrode to the second electrode to flow to an output unit, and cuts off current flowing from the second electrode toward the first electrode; and a second rectifying element electrically connected to the first and the second electrodes that allows the current flowing from the second electrode to the first electrode and blocks the current flowing from the first electrode to the second electrode, wherein: the first electrode has a positively charged electret in a surface facing the second electrode, or the second electrode has a negatively charged electret in a surface facing the first electrode.
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公开(公告)号：US20220324697A1
公开(公告)日：2022-10-13
申请号：US17615978
申请日：2020-03-19
摘要： An electrostatic device includes: a fixed portion, a moveable portion, and an elastically-supporting portion that are formed in a same substrate; and a first glass package and a second glass package that are anodically bonded to each other on one and the other of front and back surfaces of the substrate with the fixed portion and the elastically-supporting portion separated from each other, the second glass package forms a sealed space in which the moveable portion is arranged between the first and second glass packages, an electret is formed at least partially in the fixed portion and the moveable portion, and a first electrode connected to the fixed portion and exposed on an outer surface of the second glass package and a second electrode connected to the elastically-supporting portion and exposed on the outer surface of the second glass package are formed in the second glass package.
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公开(公告)号：US11848614B2
公开(公告)日：2023-12-19
申请号：US17059959
申请日：2019-05-30
CPC分类号： H02M3/335 , H02J50/001
摘要： A power supply circuit that outputs an electric power that is input from a vibration-driven energy harvesting element to an external load, includes: a negative half-wave rectifying circuit that half-wave rectifies an alternating current power that is input from the vibration-driven energy harvesting element, into a negative voltage output; an inverting chopper circuit that inverts and outputs the negative voltage output which is output from the negative half-wave rectifying circuit, into a positive voltage output.
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公开(公告)号：US12107518B2
公开(公告)日：2024-10-01
申请号：US17621398
申请日：2020-06-19
CPC分类号： H02N11/002 , G05F1/561
摘要： An energy harvesting device having an energy converting element that converts environmental energy into electric energy, an environmental sensor that is disposed in an identical environment as the energy converting element, and a power supply circuit that receives electricity from the energy converting element and outputs the electricity to an external load. The power supply circuit is configured to change an operation condition of, for example, a voltage converting circuit of the power supply circuit, in accordance with an output of the environmental sensor.
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公开(公告)号：US11664749B2
公开(公告)日：2023-05-30
申请号：US17059890
申请日：2019-05-30
CPC分类号： H02N2/186 , H02M3/1588
摘要： A power supply circuit that outputs an electric power input from a vibration-driven energy harvesting element to an external load includes a rectifying circuit that rectifies an alternating current power input from the vibration-driven energy harvesting element; a first capacitor that accumulates a power output from the rectifying circuit; a chopper circuit that has a switching element controlling a chopper timing and has an input terminal connected to the first capacitor; and a control signal generation unit that supplies a control signal to the switching element, wherein: the control signal generation unit generates the control signal without referring to a voltage of the first capacitor.
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公开(公告)号：US20220224253A1
公开(公告)日：2022-07-14
申请号：US17615153
申请日：2020-03-19
IPC分类号： H02N1/08
摘要： This vibration-driven energy harvesting element includes a fixed part, a movable part, an elastic support part that is integrally formed with the movable part and that elastically supports the movable part, and a glass base part in which the fixed part and the elastic support part are anodically bonded to each other in a separated state.
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公开(公告)号：US11722074B2
公开(公告)日：2023-08-08
申请号：US17289115
申请日：2019-11-15
IPC分类号： H02N1/08
CPC分类号： H02N1/08
摘要： A vibration-driven energy harvesting element includes: a pair of fixed electrode portions that have a plurality of fixed comb teeth and are arranged such that the plurality of fixed comb teeth face each other; and a movable electrode portion that is arranged between the pair of fixed electrode portions and has a pair of a plurality of movable comb teeth being inserted between the fixed comb teeth of the respective fixed electrode portions, wherein: the vibration-driven energy harvesting element has a three-terminal structure in which the fixed comb teeth and/or the movable comb teeth are electretized; a gap dimension of a clearance region between the fixed comb teeth and the movable comb teeth is smaller than 20 μm; and an aspect ratio being a ratio of a dimension of the clearance region in a comb tooth height direction to the gap dimension of the clearance region, is 20 or more.
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10.发明授权公开(公告)号：US11716033B2
公开(公告)日：2023-08-01
申请号：US17053598
申请日：2019-04-19
CPC分类号： H02N1/08 , B81B3/0086 , B81B2203/0163
摘要： A vibration-driven energy harvesting element that outputs an alternating current power from an output line, due to vibration from outside includes: an intermediate electrode that is not connected to the output line; a plurality of electret electrodes, each electret electrode being arranged to face the intermediate electrode and having an electret on at least a part of a surface of the electret electrode on a side facing the intermediate electrode; a holding unit that holds the intermediate electrode and the plurality of electret electrodes such that the intermediate electrode and the plurality of electret electrodes can vibrate with respect to each other; and a charge injector that injects a charge having characteristics opposite to a charge of the electrets formed in the surfaces of the plurality of electret electrodes, to the intermediate electrode.
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