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    Semiconductor wafer lifting device and methods for implementing the same
    1.
    发明授权
    Semiconductor wafer lifting device and methods for implementing the same 有权

    公开(公告)号：US06646857B2

    公开(公告)日：2003-11-11

    申请号：US09823817

    申请日：2001-03-30

    申请人： Thomas W. Anderson ,  Greg S. Sexton

    发明人： Thomas W. Anderson ,  Greg S. Sexton

    IPC分类号： H02H2300

    CPC分类号： H01L21/6831 ,  H01L21/68742 ,  Y10T279/23

    摘要： An apparatus and a method for lifting a wafer off of an electrostatic chuck after wafer processing operations are provided. In a specific example, a wafer lifting mechanism for controlling the lifting of the wafer off of an electrostatic chuck at a completion of processing is defined. The wafer lifting mechanism includes a pin lifter yoke that is oriented below an electrostatic chuck. The pin lifter yoke has a set of pins connected thereto, and the set of pins are configured to traverse through the electrostatic chuck and contact a bottom surface of the wafer. A link is also provided and connected to the pin lifter yoke. The link is moveable so as to cause the pin lifter yoke and the set of pins to move within the electrostatic chuck and contact the bottom surface of the wafer, and once in contact with the bottom surface of the wafer, the set of pins are capable of lifting the wafer off of the electrostatic chuck. Further included is a motor for moving the link and a force feedback system for limiting an application of force by the set of pins to the bottom surface of the wafer during the lifting. The application of force, in one example, is discontinued when a strain level grows to a level that can potentially cause damage to the wafer, such as in those cases where the wafer is still strongly adhered to the chuck with electrostatic forces.

    Solidifying layer for wafer cleaning
    2.
    发明授权
    Solidifying layer for wafer cleaning 有权
    晶圆清洗固化层

    公开(公告)号：US07503977B1

    公开(公告)日：2009-03-17

    申请号：US11237190

    申请日：2005-09-27

    申请人： Robert J. O'Donnell ,  Thomas W. Anderson

    发明人： Robert J. O'Donnell ,  Thomas W. Anderson

    IPC分类号： B05B7/06 ,  B05B5/00 ,  B05C11/10

    CPC分类号： H01L21/6715 ,  H01L21/67115

    摘要： A substrate preparation system includes a proximity head configured to be positioned near a surface of the substrate to deliver a solution to the surface of the substrate. The proximity head includes a plurality of inlets for delivering the solution and a plurality of outlets for removing a portion of the solution from the surface of the substrate. The surface of the substrate maintains a remaining portion of the solution as a coherent film after the proximity head is scanned over the surface of the substrate. The coherent film is configured to be cured. The remaining portion of the solution acts on the surface of the substrate and binds particulates present on the surface of the substrate as the coherent film cures.

    摘要翻译： 衬底制备系统包括被配置为定位在衬底的表面附近以将溶液输送到衬底的表面的邻近头。 邻近头包括用于输送溶液的多个入口和用于从基底的表面去除溶液的一部分的多个出口。 在将基片的表面上扫描邻近头后，衬底的表面将溶液的剩余部分保持为相干膜。 相干膜被构造成固化。 溶液的剩余部分作用在衬底的表面上，并且当粘结膜固化时，结合存在于衬底表面上的微粒。

    Packet filtering/classification and/or policy control support from both visited and home networks
    3.
    发明申请
    Packet filtering/classification and/or policy control support from both visited and home networks 有权
    来自访问和家庭网络的包过滤/分类和/或策略控制支持

    公开(公告)号：US20090037999A1

    公开(公告)日：2009-02-05

    申请号：US11888175

    申请日：2007-07-31

    申请人： Thomas W. Anderson ,  Chung-Zin Liu ,  Harold A. Lassers ,  Stinson S. Mathai

    发明人： Thomas W. Anderson ,  Chung-Zin Liu ,  Harold A. Lassers ,  Stinson S. Mathai

    IPC分类号： G06F9/00

    CPC分类号： H04W28/16 ,  H04L69/14 ,  H04W8/082 ,  H04W76/10 ,  H04W80/04 ,  H04W80/10

    摘要： A method of supporting access to a selected Internet Protocol (IP) multimedia application via an IP Multimedia Subsystem (IMS) is provided for a roaming mobile node (MN)—i.e., user equipment (UE) (10)—served by a wireless telecommunications system. The method includes: establishing a first IP tunnel (20) between the UE (10) and a local access gateway (30) of a visited network in which the UE (10) is roaming, the first tunnel (20) being anchored at the local access gateway (30); establishing a second IP tunnel (22′) between the UE (10) and a home gateway (40′) of a home network to which the UE (10) belongs, the second tunnel (22′) being anchored at the home gateway (40′); receiving data packets at the local access gateway (30) for the UE (10); filtering the packets received at the local access gateway (30) to suitably classify corresponding traffic into one of a plurality of data flows (20a, 20b, . . . 20n) supported within the first tunnel (20) at varying Quality of Service (QoS) levels; receiving data packets at the home gateway (40′) for the UE (10); and, filtering the packets received at the home gateway (40′) to suitably classify corresponding traffic into one of a plurality of data flows (22a, 22b, . . . 22n) supported within the second tunnel (22′) at varying QoS levels.

    摘要翻译： 为漫游移动节点（MN）提供支持通过IP多媒体子系统（IMS）对所选择的因特网协议（IP）多媒体应用的访问的方法，即由无线电信服务的用户设备（UE）（10） 系统。 该方法包括：在UE（10）和UE（10）正在漫游的被访问网络的本地接入网关（30）之间建立第一IP隧道（20），第一隧道（20）锚定在 本地接入网关（30）; 在所述UE（10）和所述UE（10）所属的归属网络的家庭网关（40'）之间建立第二IP隧道（22'），所述第二隧道（22'）锚定在所述家庭网关 40'）; 在所述UE（10）的本地接入网关（30）处接收数据分组; 过滤在本地接入网关（30）处接收到的分组，以适当地将对应的流量分类为在改变服务质量（QoS）的情况下支持在第一隧道（20）内的多个数据流（20a，20b，...，20n）之一 ）水平; 在所述家庭网关（40'）处为所述UE（10）接收数据分组; 并且对在家庭网关（40'）处接收到的分组进行过滤以将相应的业务适当地分类为在不同QoS级别下支持在第二隧道（22'）内的多个数据流（22a，22b，...，22n）中的一个 。

    System, method and apparatus for automatic control of an RF generator for maximum efficiency
    4.
    发明授权
    System, method and apparatus for automatic control of an RF generator for maximum efficiency 有权
    用于自动控制RF发生器以最大效率的系统，方法和装置

    公开(公告)号：US07326581B2

    公开(公告)日：2008-02-05

    申请号：US11112334

    申请日：2005-04-22

    申请人： Thomas W. Anderson ,  Andras Kuthi

    发明人： Thomas W. Anderson ,  Andras Kuthi

    IPC分类号： H01L21/66

    CPC分类号： H01L21/67253 ,  H01L21/67057

    摘要： A method of dynamically adjusting a RF generator to an instantaneous resonant frequency of a transducer includes providing an RF input signal from an oscillator to the RF generator and measuring a supply voltage applied to the RF generator. A peak voltage in the RF generator is also measured. A frequency control signal is produced when the peak voltage is not equal to a selected ratio of the supply voltage. The frequency control signal is applied to a frequency control input of the oscillator.

    摘要翻译： 将RF发生器动态地调节到换能器的瞬时谐振频率的方法包括从RF振荡器向RF发生器提供RF输入信号并测量施加到RF发生器的电源电压。 还测量RF发生器中的峰值电压。 当峰值电压不等于所选择的电源电压比时，产生频率控制信号。 频率控制信号被施加到振荡器的频率控制输入。

    System, method and apparatus for automatic control of an RF generator for maximum efficiency
    5.
    发明授权
    System, method and apparatus for automatic control of an RF generator for maximum efficiency 失效
    用于自动控制RF发生器以最大效率的系统，方法和装置

    公开(公告)号：US06998349B2

    公开(公告)日：2006-02-14

    申请号：US10360316

    申请日：2003-02-06

    申请人： Thomas W. Anderson ,  Andras Kuthi

    发明人： Thomas W. Anderson ,  Andras Kuthi

    IPC分类号： H01L21/302

    CPC分类号： H01L21/67253 ,  H01L21/67057

    摘要： A system and method of generating RF includes a supply voltage source, an oscillator, an output amplifier, a load network, a peak voltage detector and a comparator circuit. The oscillator has a control signal input and an RF signal output. The output amplifier is coupled to the oscillator output. The load network is coupled between an output of the output amplifier and an output of the RF generator. The peak voltage detector is coupled across the output amplifier. The comparator circuit includes a first input coupled to the supply voltage source, a second input coupled to an output of the peak voltage detector, and a comparator output coupled to the oscillator control signal input.

    摘要翻译： 产生RF的系统和方法包括电源电压源，振荡器，输出放大器，负载网络，峰值电压检测器和比较器电路。 振荡器具有控制信号输入和RF信号输出。 输出放大器耦合到振荡器输出。 负载网络耦合在输出放大器的输出端和RF发生器的输出端之间。 峰值电压检测器跨输出放大器耦合。 比较器电路包括耦合到电源电压源的第一输入端，耦合到峰值电压检测器的输出端的第二输入端和耦合到振荡器控制信号输入端的比较器输出端。

    Method and apparatus for providing switch-based features
    8.
    发明授权
    Method and apparatus for providing switch-based features 失效
    用于提供基于开关的特征的方法和装置

    公开(公告)号：US5521919A

    公开(公告)日：1996-05-28

    申请号：US334308

    申请日：1994-11-04

    申请人： Thomas W. Anderson ,  Thomas E. Bowers ,  Charles C. Byers

    发明人： Thomas W. Anderson ,  Thomas E. Bowers ,  Charles C. Byers

    IPC分类号： H04M3/00 ,  H04M3/40 ,  H04Q11/04 ,  H04Q11/08

    CPC分类号： H04M3/002 ,  H04M3/40 ,  H04Q11/04

    摘要： A system and method to provide voice enhancement circuits on a voice path on an individual basis, without having in-line circuits inserted into the lines or trunks. The enhancement circuit is inserted within one or more of the switches. This system comprises a switching system having a switching fabric and a central control, wherein the switching fabric includes several extended time slot interchange (XTSI) units connected to a time multiplex switch. The extended time slot interchange unit has approximately twice the capacity of a standard time slot interchange unit. Such XTSI is connected to voice enhancing circuits, which the TSI may then switch enhancement circuits into a call path. A method of setting up a call according to this invention includes routing the call to a switch, routing the call in the switch into an XTSI, which routes a call through the enhancement circuit, and then back through the XTSI.

    摘要翻译： 在单独的语音路径上提供语音增强电路的系统和方法，而不会将线内电路插入到线路或中继线中。 增强电路插入在一个或多个开关内。 该系统包括具有交换结构和中央控制的交换系统，其中交换结构包括连接到时间复用交换机的几个扩展时隙交换（XTSI）单元。 扩展时隙交换单元具有标准时隙交换单元容量的大约两倍。 这样的XTSI连接到语音增强电路，TSI然后可以将增强电路切换成呼叫路径。 根据本发明的建立呼叫的方法包括将呼叫路由到交换机，将交换机中的呼叫路由到XTSI，其通过增强电路路由呼叫，然后通过XTSI返回。

    Rocket nozzle shield
    9.
    发明授权
    Rocket nozzle shield 失效
    火箭喷嘴护罩

    公开(公告)号：US5074187A

    公开(公告)日：1991-12-24

    申请号：US674271

    申请日：1991-03-08

    申请人： Carl A. Vollersen ,  Thomas W. Anderson ,  Wayne M. Brown ,  Lozelle L. Pratt

    发明人： Carl A. Vollersen ,  Thomas W. Anderson ,  Wayne M. Brown ,  Lozelle L. Pratt

    IPC分类号： F02K9/97 ,  F42B15/20

    CPC分类号： F42B15/20 ,  F02K9/978

    摘要： A shield for the nozzle of the nozzle of a missile launched from beneath water, can be formed of a rigid plate spaced from the aft end of the nozzle to form a gap of area at least equal to the throat area of the nozzle. The gap reduces overpressure of the missile during launch while keeping water out of the nozzle by being directed perpendicular to the water flow direction.

    摘要翻译： 用于从水下方发射的导弹喷嘴的喷嘴的护罩可以由与喷嘴的后端间隔开的刚性板形成，以形成至少等于喷嘴的喉部区域的面积的间隙。 间隙在发射期间减少导弹的超压，同时通过垂直于水流方向定向将水从喷嘴中排出。