公开(公告)号：US20250102918A1

公开(公告)日：2025-03-27

申请号：US18574492

申请日：2022-04-26

Applicant: Tokyo Electron Limited

Inventor： Koji Ushimaru ,  Kenji Iizuka ,  Kei Miyazaki ,  Yukinobu Otsuka

IPC: G03F7/40 ,  F27B17/00 ,  F27D7/02 ,  H01L21/027

Abstract: A substrate processing apparatus includes a hot plate configured to support a substrate having a film formed thereon and perform a heat treatment of heating the substrate; a chamber configured to cover the substrate supported by the hot plate; a gas discharger, having a head member provided with multiple discharge holes distributed along a surface facing the substrate supported by the hot plate, configured to discharge a gas toward a surface of the substrate from the multiple discharge holes; a peripheral exhaust device configured to evacuate a processing space within the chamber from an outer peripheral region outside a periphery of the substrate supported by the hot plate; and a controller. The controller controls the peripheral exhaust device to increase an exhaust amount from the peripheral exhaust device in a state that the substrate is heated.

公开(公告)号：US09818654B2

公开(公告)日：2017-11-14

申请号：US15171240

申请日：2016-06-02

Applicant: Tokyo Electron Limited

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Kenji Iizuka ,  Naruaki Iida

IPC: H01L21/027 ,  H01L21/66 ,  H01L21/67 ,  G01N21/85 ,  G03F7/16

CPC classification number: H01L22/10 ,  G01N21/85 ,  G01N2021/8578 ,  G03F7/16 ,  G03F7/162 ,  H01L21/0273 ,  H01L21/67253

Abstract: An apparatus includes: measurement flow passage portions as part of a respective plurality of supply paths of fluids to be supplied to a substrate, the measurement flow passage portions constituting measurement regions for measurement of foreign matter in the fluids, and being disposed so as to form a row with each other; a light irradiating unit configured to form an optical path in one of the flow passage portions, the light irradiating unit being shared by the plurality of flow passage portions; a moving mechanism configured to move the light irradiating unit relatively along a direction of arrangement of the flow passage portions to form the optical path within the flow passage portion selected among the plurality of flow passage portions; a light receiving unit including a light receiving element, the light receiving element receiving light transmitted by the flow passage portion; and a detecting unit configured to detect foreign matter in the fluid on a basis of a signal output from the light receiving element. Consequently, the number of necessary light irradiating units can be reduced, and the apparatus can be miniaturized.