公开(公告)号：US20220388785A1

公开(公告)日：2022-12-08

申请号：US17664461

申请日：2022-05-23

申请人： TOKYO ELECTRON LIMITED

发明人： Tadashi ENOMOTO ,  Nao AKASHI ,  Youngtai KANG ,  Keishi SHIONAGA

IPC分类号： B65G47/90 ,  G06T7/73 ,  G06T7/00 ,  H01L21/68

摘要： An information processing apparatus for controlling a conveying apparatus to convey a substrate to be processed by a substrate processing apparatus includes a processor that performs operations including controlling the conveying apparatus, according to teaching data, to perform a first movement operation including putting the substrate into a container configured to carry the substrate and a second movement operation including getting the substrate from the container, acquiring image data including an image of a placement position for the substrate in the container during the first movement operation and the second movement operation, performing image processing on the image data to quantify a relationship between a position of the container and a position of the substrate, determining the quantified relationship to yield a determination result, and outputting correction data for correcting the conveying apparatus with respect to the first movement operation and the second movement operation, based on the determination result.

公开(公告)号：US20240020895A1

公开(公告)日：2024-01-18

申请号：US18220757

申请日：2023-07-11

申请人： Tokyo Electron Limited

发明人： Nobutoshi TERASAWA ,  Kazushi SHOJI ,  Nao AKASHI ,  Shintaro SARUWATARI ,  Motokatsu MIYAZAKI

IPC分类号： G06T11/20

CPC分类号： G06T11/206

摘要： A chart generation method includes: extracting history information for sensor data detected from an apparatus that corresponds to the state of the apparatus at the time when a specific event has occurred; generating a chart representing time-series data obtained by statistically processing the extracted sensor data history information with reference to a memory unit that defines a statistical processing technique; and displaying the generated chart on a display unit.

公开(公告)号：US20220383536A1

公开(公告)日：2022-12-01

申请号：US17824730

申请日：2022-05-25

申请人： Tokyo Electron Limited

发明人： Tadashi ENOMOTO ,  Nao AKASHI ,  Yutai MATSUHASHI

IPC分类号： G06T7/70 ,  G06T7/00 ,  H01L21/68 ,  H01L21/677

摘要： An information processing apparatus of a substrate processing apparatus including a transport device includes an image data acquisition unit that acquires image data of a disposing position of a processing target substrate, a first image processing unit that digitizes a positional relationship among the transport source object, the transport device, and the substrate, a second image processing unit that digitizes a positional relationship among the transport destination object, the transport device, and the substrate, a first transfer teaching unit that outputs first correction data of the moving operation of the transport device of receiving the substrate from the transport source object, and a second transfer teaching unit that outputs second correction data of the moving operation of the transport device of disposing the substrate in the transport destination object.

公开(公告)号：US20240012373A1

公开(公告)日：2024-01-11

申请号：US18218408

申请日：2023-07-05

申请人： Tokyo Electron Limited

发明人： Nao AKASHI ,  Nobutoshi TERASAWA ,  Kazushi SHOJI

IPC分类号： G05B13/04

CPC分类号： G05B13/044

摘要： An information processing apparatus includes an acquisition unit that acquires a physical sensor output value output from a plurality of physical sensors installed in a substrate processing apparatus; a prediction unit that predicts a virtual sensor output value of a virtual sensor corresponding to a prediction target physical sensor by using a statistical model or a physical model, based on a degree of similarity between the physical sensor output value and data learned by the statistical model; an abnormality determination unit that compares the physical sensor output value of the prediction target physical sensor with the virtual sensor output value of the virtual sensor, thereby determining whether an abnormality occurs in the physical sensor; and an instruction unit that switches from a control based on the physical sensor output value to a control based on the virtual sensor output value when determined that the abnormality occurs in the physical sensor.

公开(公告)号：US20230154776A1

公开(公告)日：2023-05-18

申请号：US17889624

申请日：2022-08-17

申请人： Tokyo Electron Limited

发明人： Tadashi ENOMOTO ,  Nao AKASHI ,  Yutai MATSUHASHI ,  Masakazu YAMAMOTO

IPC分类号： H01L21/673 ,  H01L21/68

CPC分类号： H01L21/67309 ,  H01L21/681

摘要： A substrate processing apparatus includes: a chamber that accommodates a boat; a transfer mechanism that is provided inside the chamber, and transfers a substrate; a first camera that captures an image of a support column of the boat and the substrate; a support member that is inserted through an opening formed in a wall surface of the chamber, and supports the first camera; and a driver that drives the support member in order to move the first camera between a standby position and a measurement position.