公开(公告)号：US20210011468A1

公开(公告)日：2021-01-14

申请号：US16919992

申请日：2020-07-02

申请人： Tokyo Electron Limited

发明人： Nobutoshi TERASAWA ,  Noriaki KOYAMA ,  Tomonori YAMASHITA ,  Takazumi TANAKA ,  Takehiro KINOSHITA ,  Fumiaki NAGAI ,  Eiji KIKAMA

IPC分类号： G05B23/02 ,  G05B19/418 ,  H01L21/67 ,  G06F17/18

摘要： A substrate processing system includes: an acquiring unit configured to acquire process data of each step when each step included in a predetermined process is executed under different control conditions; an extracting unit configured to divide each step into a first section in which the process data fluctuates and a second section in which the process data is converged, and extract first data belonging to the first section and second data belonging to the second section from the process data; and a monitoring unit configured to monitor the process data by comparing one or both of an evaluation value that evaluates the first data and an evaluation value that evaluates the second data with corresponding upper and lower limit values.

公开(公告)号：US20130148817A1

公开(公告)日：2013-06-13

申请号：US13708048

申请日：2012-12-07

申请人： TOKYO ELECTRON LIMITED

发明人： Tsuyoshi MORIYA ,  Nobutoshi TERASAWA ,  Yuki KATAOKA ,  Masahiro YATABE ,  Shirou ARAKI

IPC分类号： H04R29/00

CPC分类号： H04R29/00

摘要： An abnormality detection apparatus for a periodic driving system includes a detection unit; a data obtaining unit for time series data from the detected sound; a determinism derivation unit configured to derive a plurality of values representing determinism providing an indicator of whether the time series data is deterministic or stochastic or a plurality of intermediate variations in a calculation process of the values representing determinism at a predetermined interval from the time series data; a probability distribution calculation unit. The abnormality detection apparatus further includes a determination unit configured to determine existence or non-existence of abnormality in the periodic driving system based on the probability distribution of the values representing determinism or the intermediate variations.

摘要翻译： 一种用于周期性驱动系统的异常检测装置，包括检测单元; 数据获取单元，用于根据检测到的声音的时间序列数据; 确定性推导单元，被配置为导出表示确定性的多个值，所述确定性提供时间序列数据是确定性还是随机性的指示符，或者表示从时间序列数据以预定间隔表示确定性的值的计算处理中的多个中间变化 ; 概率分布计算单元。 异常检测装置还包括：判定部，其基于代表确定性或中间变化的值的概率分布，来确定周期性驱动系统中的异常的存在或不存在。

公开(公告)号：US20240012373A1

公开(公告)日：2024-01-11

申请号：US18218408

申请日：2023-07-05

申请人： Tokyo Electron Limited

发明人： Nao AKASHI ,  Nobutoshi TERASAWA ,  Kazushi SHOJI

IPC分类号： G05B13/04

CPC分类号： G05B13/044

摘要： An information processing apparatus includes an acquisition unit that acquires a physical sensor output value output from a plurality of physical sensors installed in a substrate processing apparatus; a prediction unit that predicts a virtual sensor output value of a virtual sensor corresponding to a prediction target physical sensor by using a statistical model or a physical model, based on a degree of similarity between the physical sensor output value and data learned by the statistical model; an abnormality determination unit that compares the physical sensor output value of the prediction target physical sensor with the virtual sensor output value of the virtual sensor, thereby determining whether an abnormality occurs in the physical sensor; and an instruction unit that switches from a control based on the physical sensor output value to a control based on the virtual sensor output value when determined that the abnormality occurs in the physical sensor.

公开(公告)号：US20210397169A1

公开(公告)日：2021-12-23

申请号：US17350444

申请日：2021-06-17

申请人： Tokyo Electron Limited

发明人： Kazushi SHOJI ,  Shintaro SARUWATARI ,  Nobutoshi TERASAWA ,  Motokatsu MIYAZAKI

IPC分类号： G05B19/418

摘要： An information processing apparatus detects an abnormality sign in a semiconductor manufacturing apparatus. The apparatus includes: a sensor data collector configured to acquire sensor waveform data with respect to a sensor value axis and a time axis measured by a semiconductor manufacturing apparatus that is executing a process according to a same recipe; a monitoring band calculator configured to calculate each monitoring band for the sensor value axis and the time axis used in a waveform monitoring method from a predetermined number or more of the sensor waveform data; and an abnormality sign detector configured to monitor a waveform of the sensor waveform data using each monitoring band for the sensor value axis and the time axis and detect an abnormality sign of the semiconductor manufacturing apparatus.

公开(公告)号：US20240020895A1

公开(公告)日：2024-01-18

申请号：US18220757

申请日：2023-07-11

申请人： Tokyo Electron Limited

发明人： Nobutoshi TERASAWA ,  Kazushi SHOJI ,  Nao AKASHI ,  Shintaro SARUWATARI ,  Motokatsu MIYAZAKI

IPC分类号： G06T11/20

CPC分类号： G06T11/206

摘要： A chart generation method includes: extracting history information for sensor data detected from an apparatus that corresponds to the state of the apparatus at the time when a specific event has occurred; generating a chart representing time-series data obtained by statistically processing the extracted sensor data history information with reference to a memory unit that defines a statistical processing technique; and displaying the generated chart on a display unit.

公开(公告)号：US20220270940A1

公开(公告)日：2022-08-25

申请号：US17675225

申请日：2022-02-18

申请人： Tokyo Electron Limited

发明人： Shingo HISHIYA ,  Nobutoshi TERASAWA ,  Fumiaki NAGAI ,  Kazuaki SASAKI ,  Hiroaki KIKUCHI ,  Masayuki KITAMURA ,  Kazuo YABE ,  Motoshi FUKUDOME ,  Tatsuya MIYAHARA ,  Eiji KIKAMA ,  Yuki TANABE ,  Tomoyuki NAGATA

IPC分类号： H01L21/66 ,  C23C16/52 ,  C23C16/455 ,  H01L21/02

摘要： An abnormality detection method includes: supplying a gas controlled to a selected rate to a gas supply pipe via the gas pipe connected to the gas supply pipe, thereby introducing the gas into a reaction region of a processing container provided in a processing apparatus from a gas hole of the gas supply pipe; measuring a pressure inside the gas pipe by a pressure gauge attached to the gas pipe; and detecting an abnormality of at least one of the gas supply pipe and the gas pipe based on the pressure measured at the measuring.