公开(公告)号：US20210398342A1

公开(公告)日：2021-12-23

申请号：US17354062

申请日：2021-06-22

Applicant: Tokyo Electron Limited

Inventor： Masakazu YAMAMOTO ,  Tadashi ENOMOTO ,  Yuta KUNITAKE ,  Yutai MATSUHASHI

IPC: G06T15/20 ,  G06T15/08 ,  G06T15/00 ,  G06T17/30 ,  G06T19/20 ,  G06N20/00 ,  G06K9/62

Abstract: There is provided a teaching method for a transfer device configured to transfer a substrate between a transfer source object and a transfer destination object on which the substrate is disposable. The teaching method includes: generating three-dimensional image data of a shape of the transfer source object, a shape of the transfer destination object, and a state of the substrate based on captured image data of the transfer source object, the transfer destination object, and the substrate captured by a capturing unit, and based on design data of the transfer source object, the transfer destination object, and the substrate; and teaching the transfer device based on the three-dimensional image data so that the substrate is transferred between the transfer source object and the transfer destination object without colliding with the transfer source object and the transfer destination object.

公开(公告)号：US20230154776A1

公开(公告)日：2023-05-18

申请号：US17889624

申请日：2022-08-17

Applicant: Tokyo Electron Limited

Inventor： Tadashi ENOMOTO ,  Nao AKASHI ,  Yutai MATSUHASHI ,  Masakazu YAMAMOTO

IPC: H01L21/673 ,  H01L21/68

CPC classification number: H01L21/67309 ,  H01L21/681

Abstract: A substrate processing apparatus includes: a chamber that accommodates a boat; a transfer mechanism that is provided inside the chamber, and transfers a substrate; a first camera that captures an image of a support column of the boat and the substrate; a support member that is inserted through an opening formed in a wall surface of the chamber, and supports the first camera; and a driver that drives the support member in order to move the first camera between a standby position and a measurement position.

公开(公告)号：US20250038022A1

公开(公告)日：2025-01-30

申请号：US18778435

申请日：2024-07-19

Applicant: Tokyo Electron Limited

Inventor： Huizhen BU ,  Toshiyuki FUKUMOTO ,  Yutai MATSUHASHI

IPC: H01L21/67 ,  G05B23/02

Abstract: A status determination method includes: (a) acquiring vibration data from a sensor that detects vibration of a vacuum pump provided in a substrate processing apparatus that performs a substrate processing based on a recipe including a plurality of steps, in a specific step among the steps; (b) calculating a vibration change feature amount of a predetermined frequency band from the vibration power spectrum calculated based on the vibration data; (c) calculating, in the specific step, a first divergence degree between a normal vibration feature amount and the vibration change feature amount of the predetermined frequency band based on the vibration data acquired from the sensor that detects the vibration of the vacuum pump at the time of replacement or a brand-new vacuum pump; and (d) outputting a warning about a state of the vacuum pump when the first divergence degree is equal to or greater than a first threshold.

公开(公告)号：US20240255928A1

公开(公告)日：2024-08-01

申请号：US18418580

申请日：2024-01-22

Applicant: Tokyo Electron Limited

Inventor： Yutai MATSUHASHI ,  Tsutomu SUGAWARA ,  Shigehisa HAYASHI ,  Tadashi ENOMOTO

IPC: G05B19/418

CPC classification number: G05B19/4185 ,  G05B19/4183 ,  G05B2219/34308

Abstract: An information collection device includes a power supply unit that supplies power to operate the information collection device; an input unit that is connected to a sensor capable of detecting a state of the substrate processing apparatus and inputs sensor data indicating the state of the substrate processing apparatus detected by the sensor, a relay unit that relays transmission of the sensor data; and a control unit that collects the sensor data input by the input unit through the relay unit.

公开(公告)号：US20220383536A1

公开(公告)日：2022-12-01

申请号：US17824730

申请日：2022-05-25

Applicant: Tokyo Electron Limited

Inventor： Tadashi ENOMOTO ,  Nao AKASHI ,  Yutai MATSUHASHI

IPC: G06T7/70 ,  G06T7/00 ,  H01L21/68 ,  H01L21/677

Abstract: An information processing apparatus of a substrate processing apparatus including a transport device includes an image data acquisition unit that acquires image data of a disposing position of a processing target substrate, a first image processing unit that digitizes a positional relationship among the transport source object, the transport device, and the substrate, a second image processing unit that digitizes a positional relationship among the transport destination object, the transport device, and the substrate, a first transfer teaching unit that outputs first correction data of the moving operation of the transport device of receiving the substrate from the transport source object, and a second transfer teaching unit that outputs second correction data of the moving operation of the transport device of disposing the substrate in the transport destination object.