公开(公告)号：US20180065065A1

公开(公告)日：2018-03-08

申请号：US15696365

申请日：2017-09-06

Applicant: Tokyo Electron Limited

Inventor： Takashi SASA ,  Daisuke ISHIMARU ,  Katsuya HASHIMOTO ,  Hideo SHITE ,  Shinya WAKAMIZU ,  Kazuhiko KIMURA

IPC: B01D29/60 ,  G03F7/16 ,  B01D37/04 ,  B01D35/02

CPC classification number: B01D29/606 ,  B01D35/02 ,  B01D37/046 ,  B01D2201/20 ,  B01D2201/202 ,  F04B43/02 ,  F04B43/08 ,  F04B53/10 ,  F04B53/20 ,  G03F7/16 ,  G03F7/162 ,  G03F7/3021

Abstract: A treatment solution supply apparatus for supplying a treatment solution to a treatment solution discharge unit that discharges the treatment solution to a treatment body, includes: a temporary storage apparatus that temporarily stores the treatment solution supplied from a treatment solution supply source that stores the treatment solution; a filter that removes a foreign substance in the treatment solution from the temporary storage apparatus; and a pump that sends the treatment solution from which the foreign substance has been removed by the filter to the treatment solution discharge unit, wherein the temporary storage apparatus has a pressure-feeding function of pressure-feeding the treatment solution stored in the temporary storage apparatus.