公开(公告)号：US20100316815A1

公开(公告)日：2010-12-16

申请号：US12855809

申请日：2010-08-13

申请人： Tomoko TAKAGI ,  Masashi UEDA

发明人： Tomoko TAKAGI ,  Masashi UEDA

IPC分类号： C23C16/50

CPC分类号： H01J37/321 ,  C23C16/509 ,  H01J37/3211 ,  H01J37/32119 ,  H01J37/32128 ,  H01J37/32137 ,  H01J37/32146 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32174 ,  H01J37/32183 ,  H01J37/32541 ,  H01J37/32559

摘要： A plasma CVD method uses an electrode array in a reaction chamber, the electrode array including a plurality of inductively coupled electrodes, each electrode being folded back at the center so that each electrode is substantially U-shaped with two parallel straight portions, the electrodes are arranged such that all of the parallel straight portions are arranged parallel to each other in a common plane, each of the electrodes having at least a portion with a diameter of 10 mm or less, and a phase controlled power supply for feeding high frequency power to the feeding portions so as to establish a standing wave of a half wavelength or natural number multiple of a half wavelength between a feeding portion and a folded back portion and between a grounded portion and the folded back portion, and is controlled to have a phase difference between adjacent two feeding portions.

摘要翻译： 等离子体CVD法在反应室中使用电极阵列，电极阵列包括多个电感耦合电极，每个电极在中心折回，使得每个电极基本上为U形，具有两个平行的直线部分，电极为 被布置为使得所有平行的直线部分在公共平面中彼此平行地布置，每个电极具有至少一个直径为10mm或更小的部分，以及用于将高频功率馈送到 馈送部分，以便在馈送部分和折回部分之间以及在接地部分和折回部分之间建立半波长或自然数倍的半波长的驻波，并被控制为具有相位差 在相邻的两个进给部分之间。

公开(公告)号：US20090148624A1

公开(公告)日：2009-06-11

申请号：US12368740

申请日：2009-02-10

申请人： Tomoko TAKAGI ,  Masashi Ueda

发明人： Tomoko TAKAGI ,  Masashi Ueda

IPC分类号： B01J19/08 ,  C23C16/54

CPC分类号： H01J37/321 ,  C23C16/509 ,  H01J37/3211 ,  H01J37/32119 ,  H01J37/32128 ,  H01J37/32137 ,  H01J37/32146 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32174 ,  H01J37/32183 ,  H01J37/32541 ,  H01J37/32559

摘要： A plasma CVD apparatus includes a an electrode array in a reaction chamber, the electrode array including a plurality of inductively coupled electrodes, each electrode being folded back at the center so that each electrode is substantially U-shaped with two parallel straight portions, the electrodes are arranged such that all of the parallel straight portions are arranged parallel to each other in a common plane, each of the electrodes having at least a portion with a diameter of 10 mm or less, and a phase controlled power supply for feeding high frequency power to the feeding portions so as to establish a standing wave of a half wavelength or natural number multiple of a half wavelength between a feeding portion and a folded back portion and between a grounded portion and the folded back portion, and is controlled to have a phase difference between adjacent two feeding portions.

摘要翻译： 等离子体CVD装置包括在反应室中的电极阵列，该电极阵列包括多个电感耦合电极，每个电极在中心折回，使得每个电极基本上为U形，具有两个平行的直线部分，电极 被布置成使得所有平行的直线部分在公共平面中彼此平行地布置，每个电极具有至少一个直径为10mm或更小的部分，以及用于馈送高频功率的相位控制电源 到馈送部分，以便在馈送部分和折回部分之间以及在接地部分和折回部分之间建立半波长的半波长或自然数倍的驻波，并被控制成具有相位 相邻两个供电部分之间的差异。