Architecture for piezoelectric MEMS devices
    6.
    发明授权
    Architecture for piezoelectric MEMS devices 有权
    压电MEMS器件的结构

    公开(公告)号:US08456061B2

    公开(公告)日:2013-06-04

    申请号:US13013494

    申请日:2011-01-25

    IPC分类号: H01L41/09

    摘要: A piezoelectric thin film device comprises a piezoelectric thin film having upper and lower surfaces and a defined tilted crystal morphology, a top electrode disposed on the upper surface, a substrate having a surface morphology that corresponds to the defined crystallographically tilted morphology, and a bottom electrode disposed between and crystallographically linked to both the lower surface of the piezoelectric thin film and the substrate surface, the bottom and top electrodes having a parallel planar configuration relative to the plane of the substrate and the defined crystallographically tilted morphology having a crystallographic c-axis direction oriented at a >0° angle relative to the normal to the plane of the electrodes; and method of making the device.

    摘要翻译: 压电薄膜器件包括具有上表面和下表面的压电薄膜和限定的倾斜晶体形态,设置在上表面上的顶电极,具有对应于限定的晶体倾斜形态的表面形态的基底,以及底电极 设置在晶体学上与压电薄膜的下表面和基板表面相关联,底部和顶部电极相对于基板的平面具有平行的平面结构,并且具有限定的晶体学倾斜的形态,具有晶体c轴方向 相对于电极平面的法线> 0°角定向; 以及制造该装置的方法。

    PIEZOELECTRIC MECHANISM HAVING ELECTRODES WITHIN THIN FILM SHEET THAT ARE SUBSTANTIALLY PERPENDICULAR TO SUBSTRATE
    8.
    发明申请
    PIEZOELECTRIC MECHANISM HAVING ELECTRODES WITHIN THIN FILM SHEET THAT ARE SUBSTANTIALLY PERPENDICULAR TO SUBSTRATE 有权
    在薄膜的电极之间的压电机制,其基本上是基本上是基本的

    公开(公告)号:US20130105594A1

    公开(公告)日:2013-05-02

    申请号:US13703121

    申请日:2010-06-30

    摘要: A piezoelectric actuator is formed by forming first and second electrodes on a substrate, and depositing a material on the substrate and between side surfaces of adjacent first and second electrodes to form a thin film sheet within which the first and the second electrodes extend from a first surface of the thin film sheet towards a second surface of the thin film sheet opposite the first surface. The second electrode is interdigitated in relation to the first electrode. The side surfaces of the first and the second electrodes are at least substantially perpendicular to the substrate. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet via application of a voltage across the first and the second electrodes.

    摘要翻译: 通过在衬底上形成第一和第二电极并在衬底上和相邻的第一和第二电极的侧表面之间沉积材料以形成薄膜片而形成压电致动器,其中第一和第二电极从第一和第二电极延伸 薄膜片的表面朝向与第一表面相对的薄膜片的第二表面。 第二电极相对于第一电极交错。 第一和第二电极的侧表面至少基本上垂直于衬底。 薄膜片通过施加跨越第一和第二电极的电压而响应于在薄膜片内感应的电场物理变形。

    Piezoelectric actuator having embedded electrodes
    10.
    发明授权
    Piezoelectric actuator having embedded electrodes 失效
    具有嵌入电极的压电致动器

    公开(公告)号:US08668311B2

    公开(公告)日:2014-03-11

    申请号:US13384101

    申请日:2009-10-30

    摘要: A piezoelectric actuator includes a thin film sheet, a first electrode, and a second electrode. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet. The first electrode is embedded within the thin film sheet. The second electrode is embedded within the thin film sheet, and is interdigitated in relation to the first electrode. The electric field is induced within the thin film sheet via application of a voltage across the first and the second electrodes.

    摘要翻译: 压电致动器包括薄膜片,第一电极和第二电极。 薄膜片是为了响应于在薄膜片内感应的电场而物理地变形的。 第一电极嵌入薄膜片内。 第二电极嵌入在薄膜片内,并且相对于第一电极交错。 通过施加跨越第一和第二电极的电压,在薄膜片内感应出电场。