Hard X-Ray Photoelectron Spectroscopy Apparatus

    公开(公告)号:US20160327499A1

    公开(公告)日:2016-11-10

    申请号:US14970182

    申请日:2015-12-15

    IPC分类号: G01N23/227

    CPC分类号: G01N23/2273

    摘要: [Problem]The present invention aims to solve the problems that size of X-ray monochromater crystal assembly is restricted and the vacuum of the X-ray source and the vacuum of the analysis chamber cannot be separated.[Solution]A hard X-ray photoelectron spectroscopy apparatus comprises an X-ray source, an analyzer, a sample manipulator, an analysis chamber, and vacuum evacuation systems, wherein, in a three-dimensional space defined by a XYZ rectangular coordinate axis system, a plate-like sample is arranged to be rotatable around the Z-axis by said sample manipulator (2), wherein said X-ray source comprises an electron gun (3b) which accelerates and focuses electrons, a target which is irradiated with the electrons accelerated and focused by the electron gun to generate an X-ray, monochromater crystal assembly, wherein the monochromater crystal assembly meets the Bragg condition of X-ray diffraction in X-Y plane to diffract/reflect and monochromatize the X-ray generated in said target and extract characteristic X-rays only, and on the other hand, the electron-beam-irradiation position on the target-center of the monochromater crystal assembly-center of the sample is arranged on the Rowland circle to minimize focusing aberration to the sample, the monochromater crystal assembly is located on a circle having a radius twice as large as that of the Rowland circle in a X-Y plane, preferably electron-beam-irradiation position on said target and the center of the sample are located on each of two focuses of an ellipse coming in contact with said Rowland circle in the center of the monochromater crystal assembly, said monochromater crystal assembly has a toroidal surface in Z axial direction acquired by rotating said ellipse coming in contact with said Rowland circle around a straight line connecting the electron-beam-irradiation position on said target and the center of the sample, and, a vacuum vessel for installing these components, wherein the monochromater crystal assembly used for monochromatization with diffraction and reflection of said X-ray source is located on the Rowland circle together with said target and said sample to meet the condition that the dispersed X-ray beam concentrates on the surface of the sample with the minimum aberration, wherein said Rowland circle is located to be orthogonal to the surface of the sample, wherein an optical axis of said analyzer is placed to be perpendicular (in X axial direction) to the incident direction (in Y axial direction) of the X-ray or within a range of ±36 degree angle in a X-Y plane and within a range of ±49 degree angle in a X-Z plane, wherein the sample is such that said X-ray diffracted and reflected by a reflection surface is located on focus positions on the surface of said sample and is obliquely incident on the surface of said sample, so that the spot of said X-ray elongatedly extends along a line in substantially parallel to Y axis (substantially perpendicular to X axis), and wherein an aperture of a slit provided at the entrance of said analyzer is arranged in parallel to a direction where said X-ray spot on the sample surface elongatedly extends.

    X-RAY IRRADIATION DEVICE AND ANALYSIS DEVICE
    4.
    发明申请
    X-RAY IRRADIATION DEVICE AND ANALYSIS DEVICE 有权
    X射线辐射装置和分析装置

    公开(公告)号:US20130016813A1

    公开(公告)日:2013-01-17

    申请号:US13638197

    申请日:2011-03-30

    IPC分类号: G21K5/04 G21K1/06 H01J35/08

    摘要: [Object] The present invention provides an X-ray irradiation device capable of adjusting the energy of X-rays in a wide range, and an analysis device equipped with the X-ray irradiation device.[Solving Means] An X-ray irradiation device according to an embodiment of the present invention focuses X-rays emitted from an X-ray generation mechanism to a predetermined focal position by a focusing mechanism. The X-ray generation mechanism has a structure which generates a plurality of X-rays having different wavelengths. The focusing mechanism has a structure in which the plurality of X-rays are focused to the same focal position by focusing elements having diffraction characteristics suitable for the wavelengths of the respective X-rays generated by the X-ray generation mechanism.

    摘要翻译: 本发明提供能够在宽范围内调整X射线能量的X射线照射装置以及配备有X射线照射装置的分析装置。 本发明的实施方式的X射线照射装置通过聚焦机构将从X射线产生机构发射的X射线聚焦到预定的焦点位置。 X射线产生机构具有产生具有不同波长的多个X射线的结构。 聚焦机构具有通过具有适合于由X射线产生机构产生的各X射线的波长的衍射特性的聚焦元件将多个X射线聚焦到同一焦点位置的结构。

    HARD X-RAY PHOTOELECTRON SPECTROSCOPY APPARATUS

    公开(公告)号:US20220291155A1

    公开(公告)日:2022-09-15

    申请号:US17732301

    申请日:2022-04-28

    IPC分类号: G01N23/2273

    摘要: [Problem]
    The present invention aims to solve the problems that size of X-ray monochromater crystal assembly is restricted and the vacuum of the X-ray source and the vacuum of the analysis chamber cannot be separated.
    [Solution]
    A hard X-ray photoelectron spectroscopy apparatus comprises an X-ray source, an analyzer, a sample manipulator, an analysis chamber, and vacuum evacuation systems, wherein, in a three-dimensional space defined by a XYZ rectangular coordinate axis system, a plate-like sample is arranged to be rotatable around the Z-axis by said sample manipulator (2), wherein said X-ray source comprises an electron gun (3b) which accelerates and focuses electrons, a target which is irradiated with the electrons accelerated and focused by the electron gun to generate an X-ray, monochromater crystal assembly, wherein the monochromater crystal assembly meets the Bragg condition of X-ray diffraction in X-Y plane to diffract/reflect and monochromatize the X-ray generated in said target and extract characteristic X-rays only, and on the other hand, the electron-beam-irradiation position on the target-center of the monochromater crystal assembly-center of the sample is arranged on the Rowland circle to minimize focusing aberration to the sample, the monochromater crystal assembly is located on a circle having a radius twice as large as that of the Rowland circle in a X-Y plane, preferably electron-beam-irradiation position on said target and the center of the sample are located on each of two focuses of an ellipse coming in contact with said Rowland circle in the center of the monochromater crystal assembly, said monochromater crystal assembly has a toroidal surface in Z axial direction acquired by rotating said ellipse coming in contact with said Rowland circle around a straight line connecting the electron-beam-irradiation position on said target and the center of the sample, and, a vacuum vessel for installing these components, wherein the monochromater crystal assembly used for monochromatization with diffraction and reflection of said X-ray source is located on the Rowland circle together with said target and said sample to meet the condition that the dispersed X-ray beam concentrates on the surface of the sample with the minimum aberration, wherein said Rowland circle is located to be orthogonal to the surface of the sample, wherein an optical axis of said analyzer is placed to be perpendicular (in X axial direction) to the incident direction (in Y axial direction) of the X-ray or within a range of ±36 degree angle in a X-Y plane and within a range of ±49 degree angle in a X-Z plane, wherein the sample is such that said X-ray diffracted and reflected by a reflection surface is located on focus positions on the surface of said sample and is obliquely incident on the surface of said sample, so that the spot of said X-ray elongatedly extends along a line in substantially parallel to Y axis (substantially perpendicular to X axis), and wherein an aperture of a slit provided at the entrance of said analyzer is arranged in parallel to a direction where said X-ray spot on the sample surface elongatedly extends.

    DISPLAY DEVICE
    6.
    发明申请
    DISPLAY DEVICE 审中-公开
    显示设备

    公开(公告)号:US20150130729A1

    公开(公告)日:2015-05-14

    申请号:US14398661

    申请日:2012-07-19

    IPC分类号: G06F3/041

    摘要: A display device includes a liquid crystal display panel 5, a touch panel 3 that is disposed on a display surface side of the liquid crystal display panel 5 and that has a touch operation area wider than a display area of the above-mentioned liquid crystal display panel 5, and a guard 4 or 4a that is disposed between an area 3a included in the touch operation area and corresponding to the display area, and an area 3b included in the touch operation area and corresponding to an outside of the display area, and that physically restricts an operation object which performs an operation on the above-mentioned touch operation area from moving between the areas.

    摘要翻译: 显示装置包括液晶显示面板5,设置在液晶显示面板5的显示面侧的触摸面板3,并且具有比上述液晶显示器的显示区域宽的触摸操作区域 面板5和设置在触摸操作区域中包括的对应于显示区域的区域3a之间的防护件4或4a以及包括在触摸操作区域中并对应于显示区域的外部的区域3b,以及 物理地限制对上述触摸操作区域执行操作的操作对象在区域之间移动。

    INFORMATION APPARATUS
    9.
    发明申请
    INFORMATION APPARATUS 审中-公开
    信息设备

    公开(公告)号:US20150116235A1

    公开(公告)日:2015-04-30

    申请号:US14403086

    申请日:2012-09-04

    IPC分类号: G06F3/041

    CPC分类号: G06F3/041 G01C21/20

    摘要: An information apparatus includes a liquid crystal display unit 6; a touch panel 3 that is mounted on the display surface of the liquid crystal display unit 6, that has a touch operation area wider than the display area of the liquid crystal display unit 6, and that has a specific operation handling section 3b which is formed on an area corresponding to an extra-display area of the touch operation area and which accepts an operation for a specific operation item of an information apparatus 1; a controller 7 that carries out control in a manner that causes the specific operation handling section 3b to accept an operation corresponding to a specific operation item of external equipment 2.

    摘要翻译: 信息装置包括:液晶显示单元6; 安装在液晶显示单元6的显示表面上的触摸面板3具有比液晶显示单元6的显示区域宽的触摸操作区域,并且具有形成的特定操作处理部分3b 在对应于触摸操作区域的超显示区域并且接受信息装置1的特定操作项目的操作的区域上; 以使特定操作处理部3b接受与外部设备2的特定操作项目相对应的操作的方式进行控制的控制器7。