Thin-film device
    4.
    发明授权
    Thin-film device 失效
    薄膜装置

    公开(公告)号:US5266825A

    公开(公告)日:1993-11-30

    申请号:US864937

    申请日:1992-04-07

    摘要: A thin-film transistor using hydrogenated amorphous silicon (a-Si:H), and particularly a thin-film device such as a thin-film transistor having high conductivity, large drivability and high process margin, and a display panel using the same transistors. The object of the invention is to reduce defects due to shorts between the gate and the source or between the gate and the drain, to prevent signal line defect even in case defects develop due to shorts, and to expand the design margin and process margin in the array. A capacity is connected to the gate electrode of the channel side and a voltage is applied to the gate electrode via the capacity.

    摘要翻译: 使用氢化非晶硅(a-Si:H)的薄膜晶体管,特别是具有高导电性,大驱动性和高工艺裕度的诸如薄膜晶体管的薄膜器件以及使用相同晶体管的显示面板 。 本发明的目的是减少由于栅极和源极之间或者栅极与漏极之间的短路导致的缺陷,即使在由于短路导致的缺陷发生的情况下也可防止信号线缺陷,并且扩大设计余量和工艺裕度 阵列。 电容器连接到沟道侧的栅电极,并通过该电容将电压施加到栅电极。

    Thin-film device
    5.
    发明授权
    Thin-film device 失效
    薄膜装置

    公开(公告)号:US5153690A

    公开(公告)日:1992-10-06

    申请号:US597323

    申请日:1990-10-15

    摘要: A thin-film transistor using hydrogenated amorphous silicon (a-Si:H), and particularly a thin-film device such as a thin-film transistor having high conductivity, large drivability and high process margin, and a display panel using the same transistors. The object of the invention is to reduce defects due to shorts between the gate and the source or between the gate and the drain, to prevent signal line defect even in case defects develop due to shorts, and to expand the design margin and process margin in the array. A capacity is connected to the gate electrode of the channel side and a voltage is applied to the gate electrode via the capacity.

    摘要翻译: 使用氢化非晶硅(a-Si:H)的薄膜晶体管,特别是具有高导电性,大驱动性和高工艺裕度的诸如薄膜晶体管的薄膜器件以及使用相同晶体管的显示面板 。 本发明的目的是减少由于栅极和源极之间或者栅极与漏极之间的短路导致的缺陷,即使在由于短路导致的缺陷发生的情况下也可防止信号线缺陷,并且扩大设计余量和工艺裕度 阵列。 电容器连接到沟道侧的栅电极,并通过该电容将电压施加到栅电极。

    Optical image sensor apparatus with grouped photosensors connected in
common
    6.
    发明授权
    Optical image sensor apparatus with grouped photosensors connected in common 失效
    具有分组光电传感器的光学图像传感器装置共同连接

    公开(公告)号:US4556800A

    公开(公告)日:1985-12-03

    申请号:US479893

    申请日:1983-03-29

    摘要: An optical image sensor apparatus in which a plurality of photosensors arrayed in a primary scanning direction are scanned to produce readout signals. The plurality of photosensors are classified into a number of groups each including a predetermined number of the photosensors, wherein those photosensors occupying equivalently the same position in the different groups are combined in common. The outputs of the photosensors are sequentially and selectively scanned on a group basis to produce readout signal for each of the groups. To provide a scanning readout operation at an increased speed, an integrating circuit is provided for each of the photosensors exchangeably for each group. The outputs of all the photosensors belonging to a given one of the group are simultaneously supplied to the respective integrating circuits. The readout signal output is obtained by scanning sequentially the outputs of the integrating circuits.

    摘要翻译: 其中扫描沿主扫描方向排列的多个光电传感器以产生读出信号的光学图像传感器装置。 多个光电传感器被分成多个组,每个组包括预定数量的光传感器,其中在不同组中占据相同位置的那些光传感器共同组合。 依次选择性地扫描光电传感器的输出,以产生每个组的读出信号。 为了以增加的速度提供扫描读出操作,为每组可更换的每个光电传感器提供积分电路。 属于给定组中的所有光电传感器的输出被同时提供给各个积分电路。 通过依次扫描积分电路的输出来获得读出信号输出。

    Thin film transistor substrate, manufacturing method thereof, liquid
crystal display panel and liquid crystal display equipment
    9.
    发明授权
    Thin film transistor substrate, manufacturing method thereof, liquid crystal display panel and liquid crystal display equipment 失效
    薄膜晶体管基板,其制造方法,液晶显示面板和液晶显示设备

    公开(公告)号:US5889573A

    公开(公告)日:1999-03-30

    申请号:US928719

    申请日:1997-09-12

    摘要: The present invention concerns an active-matrix addressed TFT substrate using a thin film transistor, a manufacturing method and an anodic oxidation method thereof, a liquid crystal display panel using the TFT substrate and a liquid crystal display equipment using the liquid crystal display panel and, more in particular, it relates to a structure and a manufacturing method which enables to improve the characteristics thereof.In the present invention, Cr or Ta is used for gate terminals, aluminum or a metal mainly composed of aluminum is used for gate bus-lines extended therefrom, gate electrodes and thin film capacitances (additional capacitance, storage capacitance) and an anodic oxidized film composed of the metal and free from defect is used for at least one of gate insulators, dielectric films of the thin film capacitances and interlayer insulation films for the intersections between the bus-lines. In a more preferred structure, the anodic oxidized film is used for all of the gate insulators, the dielectric films for the thin film capacitances and the interlayer insulation films for the intersections between the bus-lines.The present invention also relates to a method of selectively forming an anodic oxidized film on an aluminum pattern. That is, in a case of forming a selective oxidation mask to a desired region on the aluminum pattern with a positive type photoresist, in the present invention, an angle (.theta.) formed between the selective oxidation mask and the aluminum pattern is made as: .theta..gtoreq.110-20T (T: film thickness of the positive type photoresist).

    摘要翻译: 本发明涉及使用薄膜晶体管的有源矩阵寻址TFT基板,其制造方法和阳极氧化方法,使用TFT基板的液晶显示面板和使用该液晶显示面板的液晶显示设备, 更具体地,涉及能够改善其特性的结构和制造方法。 在本发明中,Cr或Ta用于栅极端子,铝或主要由铝组成的金属用于从其延伸的栅极总线,栅电极和薄膜电容(附加电容,存储电容)和阳极氧化膜 由金属构成并且没有缺陷用于栅极绝缘体,薄膜电容的介电膜和用于总线之间的交叉点的层间绝缘膜中的至少一个。 在更优选的结构中,阳极氧化膜用于所有栅极绝缘体,用于薄膜电容的介电膜和用于总线之间的交叉点的层间绝缘膜。 本发明还涉及在铝图案上选择性地形成阳极氧化膜的方法。 也就是说,在使用正型光致抗蚀剂在铝图案上的期望区域上形成选择性氧化掩模的情况下,在本发明中,在选择性氧化掩模和铝图案之间形成的角度(θ)为: θ= 110-20T(T:正型光致抗蚀剂的膜厚度)。

    Thin film transistor substrate, liquid crystal display panel and liquid
crystal display equipment
    10.
    发明授权
    Thin film transistor substrate, liquid crystal display panel and liquid crystal display equipment 失效
    薄膜晶体管基板,液晶显示面板和液晶显示设备

    公开(公告)号:US5359206A

    公开(公告)日:1994-10-25

    申请号:US674328

    申请日:1991-04-15

    摘要: Disclosed is an active-matrix addressed TFT substrate using a thin film transistor, a manufacturing method and an anodic oxidation method thereof, a liquid crystal display panel using the TFT substrate and a liquid crystal display equipment using the liquid crystal display panel. In the TFT substrate, Cr or Ta is used for gate terminals, aluminum or a metal mainly composed of aluminum is used for gate bus-lines extending therefrom, for gate electrodes, and for electrodes of thin film capacitors (additional capacitance, storage capacitance), and an anodic oxidized film composed of the metal and free from defect is used for at least one of gate insulators, dielectric films of the thin film capacitances and interlayer insulating films for the intersections between the bus-lines. Also disclosed is a method of selectively forming an anodic oxidized film on an aluminum pattern. That is, in a case of forming a selective oxidation mask to a desired region on the aluminum pattern with a positive type photoresist, in the present invention, an angle (.theta.) formed between the selective oxidation mask and the aluminum pattern is made as: .theta..gtoreq.110-20T (T: film thickness of the positive type photoresist).

    摘要翻译: PCT No.PCT / JP90 / 01039 Sec。 371日期:1991年4月15日 102(e)日期1991年4月15日PCT提交1990年8月13日PCT公布。 WO91 / 02999 PCT出版物 1991年3月7日公开。公开是使用薄膜晶体管的有源矩阵寻址TFT基板,其制造方法和阳极氧化方法,使用TFT基板的液晶显示面板和使用液体的液晶显示设备 水晶显示面板。 在TFT基板中,使用Cr或Ta作为栅极端子,铝或主要由铝构成的金属用于从栅极电极延伸的栅极总线,以及用于薄膜电容器的电极(附加电容,存储电容) 并且由金属构成并且没有缺陷的阳极氧化膜用于栅极绝缘体,薄膜电容的介电膜和用于总线之间的交叉点的层间绝缘膜中的至少一种。 还公开了在铝图案上选择性地形成阳极氧化膜的方法。 也就是说,在使用正型光致抗蚀剂在铝图案上的期望区域上形成选择性氧化掩模的情况下,在本发明中,在选择性氧化掩模和铝图案之间形成的角度(θ)为: θ= 110-20T(T:正型光致抗蚀剂的膜厚度)。