公开(公告)号：US08884499B2

公开(公告)日：2014-11-11

申请号：US14125520

申请日：2012-08-06

申请人： Toshinari Noda ,  Takashi Kubo ,  Hisao Suzuki ,  Naoki Wakiya ,  Naonori Sakamoto

发明人： Toshinari Noda ,  Takashi Kubo ,  Hisao Suzuki ,  Naoki Wakiya ,  Naonori Sakamoto

IPC分类号： H01L41/047 ,  H01L41/08 ,  H01L41/187

CPC分类号： H01L41/047 ,  H01L41/0478 ,  H01L41/081 ,  H01L41/0815 ,  H01L41/1876

摘要： A piezoelectric element includes a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate and the piezoelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on piezoelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the piezoelectric layer.

摘要翻译： 压电元件包括​​基板，下电极层，压电层和上电极层。 下电极层固定在基板上，压电层形成在下电极层上。 上电极层形成在压电层上。 下电极层在其中含有孔，并且具有比压电层更大的热膨胀系数。

公开(公告)号：US07417808B2

公开(公告)日：2008-08-26

申请号：US11023411

申请日：2004-12-29

申请人： Toshinari Noda ,  Kazunari Nishihara

发明人： Toshinari Noda ,  Kazunari Nishihara

IPC分类号： G02B7/02

CPC分类号： G11B7/1372 ,  G02B7/021 ,  G11B7/22

摘要： A lens unit includes a lens holder having an opening and an inner wall, the lens having an optical axis passing through the opening, a first lens having an outer circumference, and arranged in the lens holder along the optical axis, a second lens having an outer circumference, and arranged in the lens holder along the optical axis, and three strut portions provided on the inner wall of the lens holder. The strut portions position the first lens and the second lens. The strut portions have surfaces facing the optical axis, respectively, the surfaces of the strut portions slanting with respect to the optical axis and contacting the outer circumference of the first lens and the outer circumference of the second lens. This lens unit has the lenses positioned accurately.

摘要翻译： 透镜单元包括具有开口和内壁的透镜保持器，透镜具有穿过开口的光轴，具有外周的第一透镜，沿着光轴布置在透镜保持器中，第二透镜具有 并且沿着光轴布置在透镜保持器中，以及设置在透镜保持器的内壁上的三个支柱部分。 支柱部分定位第一透镜和第二透镜。 支柱部分分别具有面向光轴的表面，支柱部分的表面相对于光轴倾斜并接触第一透镜的外圆周和第二透镜的外圆周。 该镜头单元具有精确定位的镜片。

公开(公告)号：US20050011757A1

公开(公告)日：2005-01-20

申请号：US10890126

申请日：2004-07-14

申请人： Toshinari Noda

发明人： Toshinari Noda

IPC分类号： C23C14/34 ,  C23C14/00 ,  C23C14/35 ,  H01J37/32 ,  H01J37/34 ,  H01L21/31

CPC分类号： C23C14/228 ,  C23C14/0047 ,  C23C14/352 ,  H01J37/32 ,  H01J37/3402

摘要： It comprises paired targets 31 disposed in vacuum chamber 30, substrate holder 33 disposed at a position nearly perpendicular to the paired target 31 and apart from a space formed by the paired targets 31, plasma source 37 for generating reaction plasma by after-glow plasma in the vicinity of the substrate holder 33, and lead-in pipe 38 which connects the plasma source 37 to the vacuum chamber 30. Since reaction plasma of after-glow plasma can be produced in the vicinity of the substrate holder 33, it is possible to form a thin film of compound close to bulk characteristics at a low substrate temperature without being damaged by plasma.

摘要翻译： 它包括设置在真空室30中的成对靶31，设置在几乎垂直于成对靶31的位置处的基板保持件33，并且与由成对靶31形成的空间隔开，用于通过后辉光等离子体产生反应等离子体的等离子体源37 衬底保持器33的附近，以及将等离子体源37连接到真空室30的引入管38.由于可以在衬底保持器33附近产生等离子体的等离子体的反应等离子体， 在低基板温度下形成接近体积特性的化合物薄膜，而不会被等离子体损坏。

公开(公告)号：US08188639B2

公开(公告)日：2012-05-29

申请号：US12994188

申请日：2009-06-24

申请人： Toshinari Noda ,  Kazuki Komaki

发明人： Toshinari Noda ,  Kazuki Komaki

IPC分类号： H01L41/16 ,  H01L41/047 ,  H01L41/187

CPC分类号： H01L41/0478 ,  H01L41/081 ,  H01L41/0815 ,  H01L41/318 ,  Y10T29/42

摘要： A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.

摘要翻译： 压电元件包括​​基板，以及顺序形成在基板上的下电极层，压电层和上电极层。 基板的线膨胀系数高于压电层的热膨胀系数，压电层包括在压缩方向上具有面内应力的多晶体。 因此，压电元件实现了在偏振轴方向上具有高取向的压电层，相对于施加电压的位移量的高比例性以及位移量的绝对值较大。

公开(公告)号：US07542221B2

公开(公告)日：2009-06-02

申请号：US11017882

申请日：2004-12-22

申请人： Kazunari Nishihara ,  Shigeo Furukawa ,  Toshinari Noda ,  Naoki Tatehata

发明人： Kazunari Nishihara ,  Shigeo Furukawa ,  Toshinari Noda ,  Naoki Tatehata

IPC分类号： G02B7/02

CPC分类号： G02B7/02 ,  G02B13/00

摘要： A lens unit includes a first lens (2) and a second lens (3) housed in a holder (1) which may improve aberration. The first lens (2) is cylindrical having a top that functions as a lens (2a), and the second lens (3) is pressed into the cylindrical portion (2b) of the first lens (2) having a top in such a manner that the inner periphery of the cylindrical portion (2b) of the first lens (2) is pressed by the outer periphery of the second lens (3).

摘要翻译： 透镜单元包括容纳在保持器（1）中的可以改善像差的第一透镜（2）和第二透镜（3）。 第一透镜（2）是圆柱形的，具有用作透镜（2a）的顶部，并且第二透镜（3）以这种方式被压入具有顶部的第一透镜（2）的圆柱形部分（2b）中 第一透镜（2）的圆筒部（2b）的内周被第二透镜（3）的外周按压。

公开(公告)号：US20050200979A1

公开(公告)日：2005-09-15

申请号：US11017882

申请日：2004-12-22

申请人： Kazunari Nishihara ,  Shigeo Furukawa ,  Toshinari Noda ,  Naoki Tatehata

发明人： Kazunari Nishihara ,  Shigeo Furukawa ,  Toshinari Noda ,  Naoki Tatehata

IPC分类号： G02B7/02 ,  G02B13/00 ,  H04N5/225

CPC分类号： G02B7/02 ,  G02B13/00

摘要： The object of the present invention is to provide a lens unit with first lens (2) and second lens (3) housed in holder (1) which may improve the aberration. It comprises cylindrical holder (1), first lens (2) and second lens (3) housed in holder (1). First lens (2) is cylindrical having a top that functions as lens (2a), and second lens (3) is pressed into cylindrical portion (2b) of first lens (2) having a top in such manner that the inner periphery of cylindrical portion (2b) of first lens (2) is pressed by the outer periphery of second lens (3).

摘要翻译： 本发明的目的是提供一种具有容纳在保持器（1）中的第一透镜（2）和第二透镜（3）的透镜单元，其可以改善像差。 它包括容纳在保持器（1）中的圆柱形保持器（1），第一透镜（2）和第二透镜（3）。 第一透镜（2）是圆柱形的，具有用作透镜（a2）的顶部，并且第二透镜（3）被压入具有顶部的第一透镜（2）的圆柱形部分（2b）中，使得内周 第一透镜（2）的圆柱形部分（b）被第二透镜（3）的外周按压。

公开(公告)号：US20050152050A1

公开(公告)日：2005-07-14

申请号：US11023411

申请日：2004-12-29

申请人： Toshinari Noda ,  Kazunari Nishihara

发明人： Toshinari Noda ,  Kazunari Nishihara

IPC分类号： G02B7/02 ,  G11B7/00 ,  G11B7/135 ,  G11B7/22

CPC分类号： G11B7/1372 ,  G02B7/021 ,  G11B7/22

摘要： A lens unit includes a lens holder having an opening and an inner wall, the lens having an optical axis passing through the opening, a first lens having a outer circumference, and arranged in the lens holder along the optical axis, a second lens having a outer circumference, and arranged in the lens holder along the optical axis, and three strut portions provided on the inner wall of the lens holder. The strut portions position the first lens and the second lens. The strut portions have surfaces facing the optical axis, respectively, the surfaces of the strut portions slanting with respect to the optical axis and contacting the outer circumferences of the first lens and the outer circumferences of the second lens. This lens unit have the lenses positioned accurately.

摘要翻译： 透镜单元包括具有开口和内壁的透镜保持器，透镜具有穿过开口的光轴，具有外周的第一透镜，并沿着光轴布置在透镜保持器中，第二透镜具有 并且沿着光轴布置在透镜保持器中，以及设置在透镜保持器的内壁上的三个支柱部分。 支柱部分定位第一透镜和第二透镜。 支柱部分分别具有面向光轴的表面，支柱部分的表面相对于光轴倾斜并接触第一透镜的外圆周和第二透镜的外圆周。 该镜头单元具有精确定位的镜片。

公开(公告)号：US20130328451A1

公开(公告)日：2013-12-12

申请号：US14000825

申请日：2012-04-16

申请人： Takashi Kubo ,  Toshinari Noda

发明人： Takashi Kubo ,  Toshinari Noda

IPC分类号： H01L41/08

CPC分类号： H01L41/081 ,  H01L41/1876 ,  H01L41/318

摘要： A dielectric element substrate includes a board, a diffusion layer, a first isolation layer, and a lower electrode layer. The diffusion layer is provided on the board. The first isolation layer is provided on and unitarily with the diffusion layer. The lower electrode layer is provided on the first isolation layer at an opposite side with respect to the diffusion layer of, and is isolated from the diffusion layer by the first isolation layer. The diffusion layer is formed by allowing a first metal element and a second metal element to diffuse from the board to the same composition material as that of the first isolation layer. The first isolation layer is free from the first and second metal elements. A coefficient of thermal expansion of the diffusion layer decreases monotonously from the board to the first isolation layer.

摘要翻译： 电介质元件基板包括基板，扩散层，第一隔离层和下电极层。 扩散层设在板上。 第一隔离层设置在扩散层上并与扩散层一体地设置。 下电极层相对于扩散层的相对侧设置在第一隔离层上，并且通过第一隔离层与扩散层隔离。 通过使第一金属元件和第二金属元件从基板扩散到与第一隔离层相同的组成材料而形成扩散层。 第一隔离层不含第一和第二金属元件。 扩散层的热膨胀系数从板到第一隔离层单调减小。

公开(公告)号：US20110101828A1

公开(公告)日：2011-05-05

申请号：US12994188

申请日：2009-06-24

申请人： Toshinari Noda ,  Kazuki Komaki

发明人： Toshinari Noda ,  Kazuki Komaki

IPC分类号： H01L41/053 ,  H01L41/22

CPC分类号： H01L41/0478 ,  H01L41/081 ,  H01L41/0815 ,  H01L41/318 ,  Y10T29/42

摘要： A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.

摘要翻译： 压电元件包括​​基板，以及顺序形成在基板上的下电极层，压电层和上电极层。 基板的线膨胀系数高于压电层的热膨胀系数，压电层包括在压缩方向上具有面内应力的多晶体。 因此，压电元件实现了在偏振轴方向上具有高取向的压电层，相对于施加电压的位移量的高比例性以及位移量的绝对值较大。

公开(公告)号：US07338581B2

公开(公告)日：2008-03-04

申请号：US10890126

申请日：2004-07-14

申请人： Toshinari Noda

发明人： Toshinari Noda

IPC分类号： C23C14/54 ,  C23C14/35

CPC分类号： C23C14/228 ,  C23C14/0047 ,  C23C14/352 ,  H01J37/32 ,  H01J37/3402

摘要： A sputtering apparatus includes paired targets 31 disposed in a vacuum chamber 30, substrate holder 33 disposed at a position nearly perpendicular to the paired target 31 and apart from a space formed by the paired targets 31, a plasma source 37 for generating reaction plasma by after-glow plasma in the vicinity of the substrate holder 33, and a lead-in pipe 38 which connects the plasma source 37 to the vacuum chamber 30. Since reaction plasma of after-glow plasma can be produced in the vicinity of the substrate holder 33, it is possible to form a thin film of compound close to bulk characteristics at a low substrate temperature without the film being damaged by plasma.

摘要翻译： 溅射装置包括设置在真空室30中的成对靶31，设置在与成对靶31近似垂直的位置处的基板保持件33，并且与由成对靶31形成的空间分离;等离子体源37，用于通过后置 - 衬底保持器33附近的等离子体，以及将等离子体源37连接到真空室30的引入管38。 由于可以在衬底保持器33附近产生后辉光等离子体的反应等离子体，所以可以在低的衬底温度下形成接近体积特性的化合物的薄膜，而不会被膜等离子体损坏。