摘要:
The invention is a method, an apparatus, and a coated product-manufacturing method each capable of applying a coating solution to a flexible backing sheet using a die coater while preventing contaminants from forming defects. A virtual line L is drawn to pass through the discharge port 74 of the die coater 7 and to extend perpendicular to the backing sheet 1, the distance D1 between a starting line P1 and a boundary line P2 is 50 mm or less, and the distance between the starting line P1 and a line on the roller P3 is 5 μm or more.
摘要:
The invention is a method, an apparatus, and a coated product-manufacturing method each capable of applying a coating solution to a flexible backing sheet using a die coater while preventing contaminants from forming defects. A virtual line L is drawn to pass through the discharge port 74 of the die coater 7 and to extend perpendicular to the backing sheet 1, the distance D1 between a starting line P1 and a boundary line P2 is 50 mm or less, wherein the starting line P1 is defined as a line intersecting with the virtual line L on the second surface of the backing sheet 1, and the boundary line P2 is defined as a line at a boundary where the second surface of the backing sheet 1 begins to separate, upstream of the starting line P1, from the outer surface of the backup roller 8 as the backup roller 8 rotates, and the distance between the starting line P1 and a line on the roller P3 is 5 μm or more, wherein the line on the roller P3 is defined as a line intersecting with the virtual line L on the outer surface of the backup roller 8.
摘要:
A centralized control server for controlling each computer includes a step for setting monitoring rules including warning conditions and processing forms at the time of warning for web accesses which are improper from a business or educational point of view. A client computer is provided with a filtering module for monitoring web accesses. Said filtering module includes a step for analyzing the communication contents of the client computer and detecting the occurrence of a web access to an object to be monitored prescribed by the monitoring rules, a step for counting an access quantity at the time of detection of the web access, and a step for issuing warning processing in real time to a user or an administrator in accordance with the processing forms at the time of warning when it is judged that the access quantity has reached an upper limit value prescribed by the warning conditions.
摘要:
The present invention relates, in a projection aligner wherein a mask and a wafer are held proximate to one another and wherein a circuit pattern depicted on the mask is transferred onto the wafer, to a method of detecting the respective positions of the mask and the wafer for the relative positioning between the mask and the wafer. To the end of dispensing with the withdrawal of a microscope objective in such a way that the objective of a microscope for detecting the mask and the wafer and projection light, for example, an X-ray, are prevented from interfering, thereby to achieve the enhancement of throughput and to permit the detection of the positions of the mask and the wafer even during projection, the present invention consists in that the objective of the microscope is inclined with respect to a perpendicular to the plane of the mask or the plane of the wafer being a plane to-be-detected, so as not to interfere with the projection light, for example, the X-ray, whereby the circuit pattern can be transferred while the relative positions of the mask and the wafer are being detected.
摘要:
A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images of the position detecting marks from the respective objects to reach a scanning mechanism, the scanning mechanism scanning the optical images at the same time, a plurality of detectors, each of which consists of a slit and a photoelectric element, the slits being arranged on an identical optical axis so that the optical images of the position detecting marks of the respective objects as scanned by the scanning mechanism may be detected respectively and individually, and a driving device which moves one of the plurality of objects on the basis of signals from the detectors, to effect the relative positioning of the plurality of objects.
摘要:
A development support system for supporting new product development activities including designing, manufacturing experimental models and testing the functions of the experimental models and for providing an environment for the cooperative activities of a plurality of members of a development project team has a model storage for storing product models, resource models of resources to be used for product development and product development activity models; a target storage for storing target values of schedules of product development, and the cost and the performance of the product; an estimating unit for estimating schedules of product development and the cost and the performance of the product on the basis of the models stored in the model storage; a support unit for support the operations of the members of the development project team for making reference to the models, the target values and the estimated values, and changing and particularizing the models, the target values and the estimated values; a notifying unit for deciding, when each model is changed or particularized, whether or not the estimated values meet the corresponding target values and, when the estimated values do not meet the corresponding target values, for notifying the members of the development project team to that effects; and a unit for monitoring electronic mail necessary for carrying out tasks essential to the development of the product, extracting information relating to the progress of tasks essential to carrying out the development of the product, and providing the members of the development project team with information about the progress of the tasks.
摘要:
An apparatus for testing printed wiring patterns for use in combination with an apparatus including a plurality of dedicated pattern generators for generating arcuate wiring patterns. In contrast to the conventional LSI pattern inspection effected with design data being inputted, the apparatus can inspect the pattern including curved portions peculiar to the printed wiring pattern. Although the conventional LSI inspection technique involves an impracticably increased amount of design data, the invention allows the test or inspection to be performed at a high speed with an improved reliability and can be applied to the inspection of any pattern including arcuate patterns. By inputting graphic data in conformance with the order for generating patterns, pattern generation can be accomplished not only through ordinary raster scan but also by other various scanning methods.
摘要:
A pattern checking apparatus carries out the detection of candidate defects through a primary selection with a sensitivity high enough to detect any existing defect, and then carries out a detailed analysis by a controlling processor for a pattern including the periphery of the detected candidate defect through a secondary selection in which a candidate defect which is not a defect in a practical sense is removed from candidates, so that only real defects are detected.
摘要:
The present invention discloses a scanning photoelectric microscope in which a first reference object to be measured which is mounted on a stationary support is disposed relative to a second object to be measured which is disposed on a slidable table so as to form on both sides of the first object to be measured two indication intervals, which are caused to coincide with each other for alignment. The scanning photoelectric microscope according to the present invention comprises a scanning device for scanning an image reflected from the two indication intervals formed by the first and second objects to be measured at a constant speed to effect parallel displacement, a marker device for detecting positions of a scanned image corresponding to those of motion of the scanning device, and a circuit for detecting the two indication intervals detected by the scanning device in terms of time in response to a signal from the marker device, the second object to be measured being shifted until the two indication intervals coincide with each other.
摘要:
A server controlling each computer is provided with means for distributing file patterns for identifying unauthorized communication programs. Said computer is provided with a filtering module for performing monitoring and regulation processing on communications originating from the computer. Said filtering module is provided with a database for storing the file patterns acquired from the server, means for monitoring the communications of a communication module started by the computer and detecting the occurrence of a communication start request to other computers, means for comparing the file pattern of the communication module to the file patterns within the database and inspecting whether or not the communication module is an unauthorized communication program, and means for regulating the communications of the communication module when the inspection means has judged it to be an unauthorized communication program.