公开(公告)号：US4628531A

公开(公告)日：1986-12-09

申请号：US583867

申请日：1984-02-27

申请人： Keiichi Okamoto ,  Kozo Nakahata ,  Yukio Matsuyama ,  Hideaki Doi ,  Susumu Aiuchi ,  Mineo Nomoto

发明人： Keiichi Okamoto ,  Kozo Nakahata ,  Yukio Matsuyama ,  Hideaki Doi ,  Susumu Aiuchi ,  Mineo Nomoto

IPC分类号： G01B11/24 ,  G01N21/88 ,  G01N21/956 ,  G06T7/00 ,  G06K9/00

CPC分类号： G06T7/001 ,  G01N21/956 ,  G06T2207/10056 ,  G06T2207/30148

摘要： A pattern checking apparatus carries out the detection of candidate defects through a primary selection with a sensitivity high enough to detect any existing defect, and then carries out a detailed analysis by a controlling processor for a pattern including the periphery of the detected candidate defect through a secondary selection in which a candidate defect which is not a defect in a practical sense is removed from candidates, so that only real defects are detected.

摘要翻译： 模式检查装置通过具有足够高的灵敏度的主要选择来执行候选缺陷的检测，以检测任何现有缺陷，然后通过控制处理器对包括检测到的候选缺陷的外围的图案进行详细分析，通过 从候选者中删除不是实际意义上的缺陷的候选缺陷的次要选择，从而仅检测到真实的缺陷。

公开(公告)号：US4420233A

公开(公告)日：1983-12-13

申请号：US381675

申请日：1982-05-24

申请人： Mineo Nomoto ,  Katsuhiro Iwashita ,  Toru Otsubo ,  Susumu Aiuchi

发明人： Mineo Nomoto ,  Katsuhiro Iwashita ,  Toru Otsubo ,  Susumu Aiuchi

IPC分类号： G03B13/36 ,  G02B7/28 ,  G03B3/10 ,  G03F7/20 ,  G03F7/207 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G03B27/34 ,  G03B21/28

CPC分类号： G03F7/70891 ,  G03B3/10 ,  G03F9/70

摘要： A projecting apparatus for forming an image of a mask on a wafer by a projector of a unit magnification reflection system having a concave spherical mirror and a convex spherical mirror. The distance from the projector to the mask or the upper side of a mask holder for holding the mask and the distance from the projector to the wafer are measured. An error of the image-forming position is computed from the distance measurements. At least one of the mask, the wafer and the projector is moved along the direction of projection in a manner to eliminate the error of the image-forming position computed, thus attaining automatic focus adjustment.

摘要翻译： 一种用于通过具有凹球面镜和凸球面镜的单元放大反射系统的投影仪在晶片上形成掩模图像的投影设备。 测量从投影仪到掩模的距离或用于保持面罩的掩模支架的上侧以及从投影仪到晶片的距离。 从距离测量计算图像形成位置的误差。 掩模，晶片和投影仪中的至少一个沿着投影方向移动，以消除所计算的图像形成位置的误差，从而获得自动聚焦调整。

公开(公告)号：US07020306B2

公开(公告)日：2006-03-28

申请号：US09774723

申请日：2001-02-01

申请人： Takenori Hirose ,  Hiroyuki Kojima ,  Mineo Nomoto ,  Susumu Aiuchi

发明人： Takenori Hirose ,  Hiroyuki Kojima ,  Mineo Nomoto ,  Susumu Aiuchi

IPC分类号： G06K9/00

CPC分类号： B24B37/20 ,  B24B49/12 ,  G01N21/41 ,  G01N21/55

摘要： The object of the present invention is to establish a technology for directly evaluating polishing pad surface conditions, to allow high-precision CMP process management, and to improve process throughput. The pad surface is illuminated with light. The intensity of reflected light or fluorescence from the illuminated area or an intensity distribution image is used directly evaluate the pad surface condition. Based on the results of this evaluation, conditioning conditions for a conditioner are optimized, thus allowing high-precision CMP processing while maintaining good pad surface conditions.

摘要翻译： 本发明的目的是建立一种用于直接评估抛光垫表面状态，允许高精度CMP处理管理并提高工艺生产能力的技术。 焊盘表面用光照亮。 使用来自照射区域的反射光或荧光的强度或强度分布图像直接评估焊盘表面状况。 根据该评价结果，对调理剂的调理条件进行优化，从而在保持良好的垫表面状态的同时进行高精度的CMP处理。

公开(公告)号：US4391511A

公开(公告)日：1983-07-05

申请号：US245193

申请日：1981-03-18

申请人： Nobuyuki Akiyama ,  Yukio Kembo ,  Yasuo Nakagawa ,  Susumu Aiuchi ,  Mineo Nomoto

发明人： Nobuyuki Akiyama ,  Yukio Kembo ,  Yasuo Nakagawa ,  Susumu Aiuchi ,  Mineo Nomoto

IPC分类号： G03F7/20 ,  G03F7/24 ,  G03F9/02 ,  H01L21/683 ,  G03B27/52

CPC分类号： G03F7/707 ,  G03F7/24 ,  H01L21/6838 ,  H01L21/68735 ,  H01L21/6875 ,  Y10T279/11

摘要： A light exposure device and method for exposing and printing a predetermined pattern on an exposure surface of a substrate comprises measuring means for measuring curvature of the exposure surface of the substrate, a chuck including suck and hold means for sucking and holding a back surface of the substrate opposite to the exposure surface and deforming means for imparting a force to the back surface of the substrate to deform the substrate, and control means for controlling the deforming means of the chuck in accordance with the curvature of the exposure surface of the substrate measured by the measuring means such that the exposure surface of the substrate conforms to an image surface of the pattern over an entire exposure area within a predetermined allowable error.

摘要翻译： 一种用于在基板的曝光表面上曝光和印刷预定图案的曝光装置和方法，包括：用于测量基板的曝光表面的曲率的测量装置，包括用于吸附和保持基板的背面的吸持和保持装置的卡盘 与曝光面相反的基板和用于赋予基板背面使其变形的变形机构，以及控制装置，用于根据基板的曝光面的曲率来控制卡盘的变形装置，该曲率由 所述测量装置使得所述基板的曝光表面在预定的允许误差范围内在整个曝光区域上符合所述图案的图像表面。

公开(公告)号：US4872187A

公开(公告)日：1989-10-03

申请号：US156179

申请日：1988-02-16

申请人： Kozo Nakahata ,  Toshimitsu Hamada ,  Yasuo Nakagawa ,  Mineo Nomoto

发明人： Kozo Nakahata ,  Toshimitsu Hamada ,  Yasuo Nakagawa ,  Mineo Nomoto

IPC分类号： G01N23/04 ,  G01N23/18

CPC分类号： G01N23/18 ,  G01N23/046 ,  G01N2223/419

摘要： In an X-ray tomographic imaging system and method, an object to be inspected is irradiated with X-rays from an X-ray source to obtain an X-ray transmission image of the object. The X-ray transmission image is converted by an X-ray fluorescence image intensifier into a detection image. The intensity of the detection image is also intensified by the X-ray fluorescence image intensifier. A photo-electric converter converts the intensified detection image from the X-ray fluorescence image intensifier into an electrical signal. The object to be inspected is held by an object holder rotatably at a position in proximity to the X-ray source and movably in a direction of the axis of rotation of the object and a direction perpendicular to the rotation axis. The electrical signal from the photo-electric converter is processed to a cross-sectional image.

摘要翻译： 在X射线层析成像系统和方法中，从X射线源照射X射线检查对象物，得到被检体的X射线透过图像。 通过X射线荧光图像增强器将X射线透射图像转换成检测图像。 X射线荧光图像增强器也增强了检测图像的强度。 光电转换器将强化的检测图像从X射线荧光图像增强器转换成电信号。 待检查对象由物体保持器可旋转地保持在靠近X射线源的位置，并且可沿物体的旋转轴线和垂直于旋转轴线的方向移动。 来自光电转换器的电信号被处理成横截面图像。

公开(公告)号：US4776023A

公开(公告)日：1988-10-04

申请号：US850681

申请日：1986-04-11

申请人： Toshimitsu Hamada ,  Mineo Nomoto ,  Kozo Nakahata

发明人： Toshimitsu Hamada ,  Mineo Nomoto ,  Kozo Nakahata

IPC分类号： H04N7/18 ,  G01N21/956 ,  G06T7/00 ,  H01L51/00 ,  G06K9/64

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G06T2207/30148

摘要： Two kinds of image corresponding to a reference pattern and a pattern to be inspected are converted into binary images and local images cut out from the binary images are compared with each other to detect differences between the cut out images and recognize these differences as a defect. One of the main subjects of the inspecting method is to moderate excess sensitivity to the different portions to the extent of allowing non-serious actual defects. By setting don't care areas each of which consists of one pixel row neighboring on a binary boundary line in the image, and comparing the remaining portions of the images other than the don't care areas by logical processing it is possible to detect various defects without regarding the quantization error as a defect.

摘要翻译： 对应于参考图案和待检查图案的两种图像被转换为​​二进制图像，并且将从二进制图像切出的局部图像彼此进行比较，以检测切出的图像之间的差异并将这些差异识别为缺陷。 检查方法的主要课题之一是对不同部位的过度敏感度进行调节，使得不严重的实际缺陷达到程度。 通过设置不关心区域，每个区域由图像中的二进制边界线上相邻的一个像素行组成，并且通过逻辑处理比较除了无关区域之外的图像的剩余部分，可以检测各种 缺陷而不考虑量化误差作为缺陷。

公开(公告)号：US06072899A

公开(公告)日：2000-06-06

申请号：US12739

申请日：1998-01-23

申请人： Yoko Irie ,  Hideaki Doi ,  Hiroya Koshishiba ,  Mineo Nomoto

发明人： Yoko Irie ,  Hideaki Doi ,  Hiroya Koshishiba ,  Mineo Nomoto

IPC分类号： G01B11/24 ,  G06T1/00 ,  G06T7/00 ,  H05K3/00 ,  H05K3/06 ,  G06K9/00

CPC分类号： G01B11/24 ,  G06T7/0008 ,  G06T2207/10028 ,  G06T2207/10064 ,  G06T2207/30141

摘要： A three-dimensional shaped defect inspecting method including a three-dimensional shape detection region selecting step for detecting a two-dimensional picture signal by taking a two-dimensional optical picture fluorescence emitted from a detection object and selecting a three-dimensional shape detection region in respect of the detection object based on the detected two-dimensional picture signal, and a three-dimensional shape determining step for detecting a picture signal by taking an optical picture in accordance with a height by reflected light from the detection object and sampling height information with a desired two-dimensional pixel size in respect of the selected three-dimensional shape inspection region with respect to the detected picture signal, thereby calculating and determining a three-dimensional shape, whereby a defect caused by a deficiency in thickness or the like on a wiring pattern of a solid shape, formed on a detection object of a circuit board or the like, can be detected in a short period of time, and its device.

摘要翻译： 一种三维形缺陷检查方法，包括：三维形状检测区域选择步骤，用于通过从检测对象发出的二维光学图像荧光检测二维图像信号，并选择三维形状检测区域 基于检测到的二维图像信号对检测对象的尊重;以及三维形状确定步骤，用于通过根据来自检测对象的反射光和高度信息采集光学图像来检测图像信号，并且具有采样高度信息 相对于检测到的图像信号，对于所选择的三维形状检查区域的期望的二维像素尺寸，由此计算和确定三维形状，由此由于厚度等不足导致的缺陷 可以形成在电路板等的检测对象上的实心形状的布线图案 在短时间内被检测到，其设备。

公开(公告)号：US4744047A

公开(公告)日：1988-05-10

申请号：US793219

申请日：1985-10-31

申请人： Keiichi Okamoto ,  Toshimitsu Hamada ,  Mineo Nomoto

发明人： Keiichi Okamoto ,  Toshimitsu Hamada ,  Mineo Nomoto

IPC分类号： G06K9/00 ,  G01R31/28 ,  G06F11/00 ,  G06F15/70

CPC分类号： G01R31/281

摘要： An apparatus for testing printed wiring patterns for use in combination with an apparatus including a plurality of dedicated pattern generators for generating arcuate wiring patterns. In contrast to the conventional LSI pattern inspection effected with design data being inputted, the apparatus can inspect the pattern including curved portions peculiar to the printed wiring pattern. Although the conventional LSI inspection technique involves an impracticably increased amount of design data, the invention allows the test or inspection to be performed at a high speed with an improved reliability and can be applied to the inspection of any pattern including arcuate patterns. By inputting graphic data in conformance with the order for generating patterns, pattern generation can be accomplished not only through ordinary raster scan but also by other various scanning methods.

摘要翻译： 一种用于测试印刷布线图案的装置，用于与包括用于产生弓形布线图案的多个专用图案发生器的装置组合使用。 与通过输入设计数据进行的常规LSI图案检查相反，该设备可以检查包括印刷布线图案特有的弯曲部分的图案。 虽然传统的LSI检测技术涉及到不切实际地增加的设计数据量，但是本发明允许以高速度提高测试或检查的可靠性，并且可以应用于包括弧形图案的任何图案的检查。 通过根据生成图案的顺序输入图形数据，不仅可以通过普通光栅扫描也可以通过其他各种扫描方法来实现图案生成。

公开(公告)号：US20070041410A1

公开(公告)日：2007-02-22

申请号：US11588387

申请日：2006-10-27

申请人： Mikio Hongo ,  Sachio Uto ,  Mineo Nomoto ,  Toshihiko Nakata ,  Mutsuko Hatano ,  Shinya Yamaguchi ,  Makoto Ohkura

发明人： Mikio Hongo ,  Sachio Uto ,  Mineo Nomoto ,  Toshihiko Nakata ,  Mutsuko Hatano ,  Shinya Yamaguchi ,  Makoto Ohkura

IPC分类号： H01S3/10 ,  G02B27/10

CPC分类号： H01L21/02683 ,  H01L21/0268 ,  H01L21/02691 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1285 ,  H01L29/04 ,  H01L29/66757

摘要： Apparatus for fabricating a display device includes a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate, linear scales which detect a position or moving distance of the substrate, a laser oscillator which generates continuous-waves laser light, a modulator which turns ON/OFF the continuous-wave laser light, a beam forming optic which shapes the continuous-wave laser light passing through the modulator into a linear or rectangular form, an objective lens which projects the at least one of the laser light on the insulating substrate so as to irradiate the insulating substrate with the laser light. The controller counts signals generated by the linear scales for every movement of the stage for a given distance, causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the laser light is projected, and causes the modulator to turn the generated continuous-wave laser light in an OFF state at another time.

摘要翻译： 用于制造显示装置的装置包括能够安装显示装置的绝缘基板并移动绝缘基板的台，检测基板的位置或移动距离的线性标尺，产生连续波激光的激光振荡器， 将连续波激光切换为ON / OFF的调制器，将通过调制器的连续波激光成形为直线或矩形的光束形成光学器件，将至少一个激光投射到的物镜 绝缘基板，以激光照射绝缘基板。 控制器对于给定距离的级的每次移动来对由线性标尺产生的信号进行计数，使得调制器将产生的连续波激光在其上的激光的绝缘基板的位置处于接通状态 照射开始到达投射激光的区域，并且使得调制器在另一时间将所产生的连续波激光转为OFF状态。

公开(公告)号：US20060215171A1

公开(公告)日：2006-09-28

申请号：US11188732

申请日：2005-07-26

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02003 ,  G01B9/02081 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70775

摘要： In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.