摘要:
Provided is a rotary motor actuator capable of simplifying the manufacture and assembly process.A base 22, a table 21, a stator 25 and a rotor 26 of a rotary motor 31 and a first member 12 and a second member 14 of a guide mechanism 24 have a plurality of base segments 22a, a plurality of table segments 21a, a plurality of stator segments 25a, a plurality of rotor segments 26a, a plurality of first member segments 12a and a plurality of second member segments 14, respectively, which all arranged circumferentially around a center line C. The stator segments 25a are connected to the base segments 22a, to which the first member segments 12a are connected. The rotor segments 26a are connected to the table segments 21a, to which the second member segments 14a are connected.
摘要:
A distributed-arrangement linear motor in which stators are arranged in a distributed manner and a method of controlling the distributed-arrangement linear motor are provided. The linear motor 1 is a linear motor in which a stator and a movable member are relatively movable, wherein the stator and the movable member respectively have periodic structures in which plural kinds of poles of the stator and the movable member (12a, 12b, 12c) (22a, 22b, 22c) which magnetically act each other and arranged periodically subsequently in an order according to the arrangement in a direction of the relative motion therebetween; a plurality of stators are arranged in a distributed manner in the direction of the relative motion; a distance D1, D2 between adjacent stators is not more than a length Lmv of the movable member; the pole of the stator is formed of a coil 11; and a current control unit that controls current to be supplied to the coil based on the distance between the stators is provided.
摘要:
A drive guide device capable of effectively releasing heat produced by a mover. The drive guide device has a movement unit 100 moved by a linear motor while being guided by a rail 230. The movement unit 100 has the mover 140 to which electricity is conducted to produce a magnetic field, a table 110 placed on the mover 140 on the opposite side of a base 210 to which the rail 230 is fixed, a heat sink 130 having heat radiation fins for releasing heat produced by the mover 140 and placed between the mover 140 and the table 110, and a heat transmission route for transmitting heat, which cannot be released by the heat sink 130, to the table 110. The table 110 is made from a material having a low thermal expansion coefficient.
摘要:
A rotary moto actuator with a base 22, a table 21, a stator 25 and a rotor 26 of a rotary motor 31 and a first member 12 and a second member 14 of a guide mechanism 24 that have a plurality of base segments 22a, a plurality of table segments 21a, a plurality of stator segments 25a, a plurality of rotor segments 26a, a plurality of first member segments 12a and a plurality of second member segments 14, respectively, which all arranged circumferentially around a center line C. The stator segments 25a are connected to the base segments 22a, to which the first member segments 12a are connected. The rotor segments 26a are connected to the table segments 21a, to which the second member segments 14a are connected.
摘要:
A distributed-arrangement linear motor in which stators are arranged in a distributed manner and a method of controlling the distributed-arrangement linear motor are provided. The linear motor 1 is a linear motor in which a stator and a movable member are relatively movable, wherein the stator and the movable member respectively have periodic structures in which plural kinds of poles of the stator and the movable member (12a, 12b, 12c) (22a, 22b, 22c) which magnetically act each other and arranged periodically subsequently in an order according to the arrangement in a direction of the relative motion therebetween; a plurality of stators are arranged in a distributed manner in the direction of the relative motion; a distance D1, D2 between adjacent stators is not more than a length Lmv of the movable member; the pole of the stator is formed of a coil 11; and a current control unit that controls current to be supplied to the coil based on the distance between the stators is provided.
摘要:
A drive guide device capable of effectively releasing heat produced by a mover. The drive guide device has a movement unit 100 moved by a linear motor while being guided by a rail 230. The movement unit 100 has the mover 140 to which electricity is conducted to produce a magnetic field, a table 110 placed on the mover 140 on the opposite side of a base 210 to which the rail 230 is fixed, a heat sink 130 having heat radiation fins for releasing heat produced by the mover 140 and placed between the mover 140 and the table 110, and a heat transmission route for transmitting heat, which cannot be released by the heat sink 130, to the table 110. The table 110 is made from a material having a low thermal expansion coefficient.
摘要:
There is provided a linear actuator provided with a dust-proof mechanism capable of preventing dust-proof belts from being deformed, improving a sealing performance between the dust-proof belts and a housing member, and achieving high dust-proof performance irrespective of a size of the linear actuator. The linear actuator provided with the dust-proof mechanism includes: a housing member disposed so as to cover at least a ball screw; an opening portion formed in the housing member so as to extend along a moving locus of a movable stage; and dust-proof belts stretched inside the housing member so as to close the opening portion by being mounted to mounting members disposed both end portions of the housing member, wherein a bypass member for bypassing the dust-proof belts positioned at position overlapped with the movable stage is provided for the movable stage so as to realize movement of the movable member along the opening portion while closing and sealing the opening portion by the dust-proof belts, and in such a linear actuator provided with the dust-proof mechanism, the dust-proof belts are wound up around the mounting member and sandwiched between the mounting member and the end portions of the housing member.
摘要:
A position detection system includes a linear motor having a rod in which magnetic poles of N pole and S pole are arranged alternately in an axial direction and a plurality of coils surrounding the rod a magnetic sensor for detecting change in the direction of the magnetic field of the rod caused by linear movement of the rod relative to the coils to output a sine wave signal and a cosine wave signal which are 90° phase shifted with respect to one another, and a position detecting circuit for detecting a position of the rod relative to the coils. As the magnetic sensor detects the change in the direction of the magnetic field of the rod, the sine wave signal and the cosine wave signal output from the magnetic sensor hardly vary even when the distance between the rod and the magnetic sensor is changed.
摘要:
Disclosed is a micro actuator capable of being formed in compact as a whole, such as 10 mm in diameter by diminishing a difference between a stroke distance of a moving member and an overall length, and by reducing a sectional area taken in a direction orthogonal to a stroke direction. The micro actuator includes: a spline shaft formed as a cylinder with a hollow part and having an axially extending slit opening; a spline nut fit-engaged with the spline shaft and axially guiding the spline shaft; a pair of end caps fixed to openings at both ends of the spline shaft; a magnet rod supported at both ends within the hollow part of the spline shaft by the end caps; and a forcer loosely fit-engaged with a periphery of the magnet rod within the hollow part of the spline shaft to constitute a linear motor together with the magnet rod and connected with the spline nut through the slit opening.
摘要:
Provided is an X-Y table actuator, which is capable of moving and positioning a movable table (5) freely in an X-Y plane with a sufficient thrust, and can be simply manufactured at a low cost. The X-Y table actuator is constituted by stacking a stationary plate (2), an intermediate plate (4), and a movable plate (5). Between the stationary plate (2) and the intermediate plate (4), arranged is an X-direction drive means for driving the intermediate plate (4) in an X-direction with respect to the stationary plate (2). Between the intermediate plate (4) and the movable plate (5), on the other hand, there is provided a Y-direction drive means (7) for moving the movable plate (5) forward and backward in a Y-direction with respect to the intermediate plate (4). By stacking the stationary plate (2) and the movable plate (5), which are formed into a substantially channel-shape, and the intermediate plate (4), which is formed into a substantially flat-shape on each other, a housing chamber (60) for the X-direction drive means is formed between the stationary plate (2) and the intermediate plate (4), and a housing chamber (70) for the Y-direction drive means is formed between the intermediate plate (4) and the movable plate (5).