公开(公告)号：US5676757A

公开(公告)日：1997-10-14

申请号：US628016

申请日：1996-04-04

申请人： Towl Ikeda ,  Katsumi Ishii ,  Yoji Iizuka

发明人： Towl Ikeda ,  Katsumi Ishii ,  Yoji Iizuka

IPC分类号： B01J3/03 ,  C23C14/56 ,  H01L21/00 ,  C23C16/00

CPC分类号： H01L21/67017 ,  B01J3/03 ,  C23C14/566

摘要： There is a gap between the respective inner regions of the end face of the cylindrical side wall and the abutting portion of the top plate, which are situated inside the seal member. Even though the top plate is bent inward by atmospheric pressure when the container is decompressed to a predetermined degree of vacuum, therefore, the abutting portion thereof cannot come into contact with the inner edge of the end face of the cylindrical side wall. Thus, if decompression and exposure to atmospheric pressure are repeated to bend the cylindrical side wall repeatedly, there is no possibility of the inner edge portion of the end face of the cylindrical side wall being separated or rubbed off to produce dust. Moreover, the cylindrical side wall and top plate are joined together in the region outside the seal member. If dust is produced by the contact between the cylindrical side wall and top plate at their junctions outside the seal member, therefore, it is prevented from entering the container by the seal member. Thus, a clean atmosphere in the container cannot be contaminated by the dust.

摘要翻译： 在圆筒形侧壁的端面的各个内部区域和位于密封构件内部的顶板的抵接部分之间存在间隙。 因此，即使当容器减压到预定的真空度时顶板向内弯曲，因此其抵接部分不能与圆筒形侧壁的端面的内边缘接触。 因此，如果重复减压和暴露于大气压力以反复地弯曲圆筒形侧壁，则不会使圆柱形侧壁的端面的内边缘部分分离或摩擦而产生灰尘。 此外，圆筒形侧壁和顶板在密封构件外部的区域中接合在一起。 因此，如果在密封部件外侧的接合处产生圆筒形侧壁和顶板之间的灰尘，则可防止密封件进入容器。 因此，容器中的清洁气氛不会被灰尘污染。

公开(公告)号：US5520142A

公开(公告)日：1996-05-28

申请号：US409427

申请日：1995-03-24

申请人： Towl Ikeda ,  Katsumi Ishii ,  Yoji Iizuka

发明人： Towl Ikeda ,  Katsumi Ishii ,  Yoji Iizuka

IPC分类号： B01J3/03 ,  C23C14/00 ,  C23C14/56 ,  C23C16/44 ,  H01L21/00 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00

CPC分类号： H01L21/67017 ,  B01J3/03 ,  C23C14/564 ,  C23C16/4401

摘要： A gap is defined between an inner region of an end face of a first container member of a container and an inner region of an abutting portion of a second container member, the inner regions being situated inside a seal member. The respective inner regions of the end face of the first container member and the abutting portion of the second container member, which are situated inside the seal member, are prevented from coming into contact with each other when the interior of the container is decompressed. Even though the second container member is bent inward by atmospheric pressure when the container is decompressed to a predetermined degree of vacuum, therefore, the abutting portion thereof cannot come into contact with the inner edge of the end face of the first container member. Thus, if decompression and exposure to atmospheric pressure are repeated to bend the container member repeatedly, there is no possibility of the inner edge portion of the end face of the first container member being separated or rubbed off to produce dust.

摘要翻译： 在容器的第一容器构件的端面的内部区域和第二容器构件的抵接部的内部区域之间限定有间隙，内部区域位于密封构件的内部。 当容器内部减压时，防止位于密封构件内部的第一容器构件的端面的各个内部区域和第二容器构件的抵接部分彼此接触。 因此，即使当容器减压至预定的真空度时第二容器构件向内弯曲，因此其抵接部分不能与第一容器构件的端面的内边缘接触。 因此，如果重复减压和暴露于大气压力以反复地使容器构件弯曲，则不会使第一容器构件的端面的内边缘部分分离或摩擦而产生灰尘。

公开(公告)号：US5857827A

公开(公告)日：1999-01-12

申请号：US910057

申请日：1997-08-12

申请人： Teruo Asakawa ,  Hiroaki Saeki ,  Yoji Iizuka ,  Keiichi Matsushima

发明人： Teruo Asakawa ,  Hiroaki Saeki ,  Yoji Iizuka ,  Keiichi Matsushima

IPC分类号： B65G49/07 ,  H01L21/677 ,  B25J11/00

CPC分类号： H01L21/67775 ,  Y10S414/14

摘要： A cassette chamber according to the present invention comprises a housing defining a space stored with a cassette for holding a plurality of objects of treatment, a lift base having a rotatable shaft and located in the housing for up-and-down motion, an auxiliary base fixed to the shaft and inclined at a predetermined angle to the longitudinal direction of the shaft, a cassette support having a bottom support portion set on the lift base and bearing the bottom face of the cassette and a back support portion rotatably supported by the auxiliary base and bearing the back face of the cassette, a rotation mechanism for rotating the shaft as the lift base ascends or descends, thereby rotating the auxiliary base and the cassette support between a first position inside the housing and a second position outside the housing, and a support section for keeping the back support portion of the cassette support parallel to the shaft by engaging the back support portion being rotated to the second position by the rotation mechanism and causing the back support portion to rotate relatively to the auxiliary base.

摘要翻译： 根据本发明的盒室包括限定存储有用于保持多个处理对象的盒的空间的壳体，具有可旋转轴并位于壳体中用于上下运动的升降台，辅助基座 固定在轴上并且以与轴的纵向方向成预定角度倾斜;盒支架，其具有设置在提升基座上并承载盒的底面的底部支撑部分，以及由辅助基座可旋转地支撑的后支撑部分 并且承载所述盒的后表面，所述旋转机构用于当所述提升基座上升或下降时使所述轴旋转，从而使所述辅助基座和所述盒支撑件在所述壳体内部的第一位置和所述壳体外部的第二位置之间旋转， 支撑部分，用于通过使旋转的第二支撑部分接合到第二支杆上来保持盒支撑件的后支撑部分平行于轴 并且使后支撑部相对于辅助基座旋转。

公开(公告)号：US6092786A

公开(公告)日：2000-07-25

申请号：US60546

申请日：1998-04-15

申请人： Hiroki Oka ,  Yoji Iizuka ,  Kenichi Nakagawa ,  Jun Hirose ,  Tatsuya Nakagome ,  Hiroshi Koizumi ,  Hiroshi Ohno

发明人： Hiroki Oka ,  Yoji Iizuka ,  Kenichi Nakagawa ,  Jun Hirose ,  Tatsuya Nakagome ,  Hiroshi Koizumi ,  Hiroshi Ohno

IPC分类号： C23F4/00 ,  F16K1/16 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/677 ,  F16K3/18 ,  H01L21/66

CPC分类号： F16K1/16

摘要： Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.

摘要翻译： 提供了一种用于打开和关闭形成在室体中的孔的闸阀，其设计成使得物体被装载到或者从室卸载，包括设置在室主体的侧部上的提升机构，支撑部分 由用于上下运动的升降机构支撑的阀板，由支撑部分支撑并可在闭合位置之间移动的阀板，以关闭室主体的孔口和打开位置，使得阀板与阀板分离 孔由于支撑部分由提升机构上下移动而使孔开放，以及分离机构，用于允许阀板移动到孔前方的位置，使得阀板与孔分离。

公开(公告)号：US6013112A

公开(公告)日：2000-01-11

申请号：US927563

申请日：1997-09-09

申请人： Yoji Iizuka ,  Teruo Asakawa

发明人： Yoji Iizuka ,  Teruo Asakawa

IPC分类号： B65G49/07 ,  H01L21/673 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67303 ,  H01L21/67781 ,  Y10T29/41

摘要： A relay apparatus according to the invention is provided for transferring to-be-treated objects between a transfer mechanism for carrying the objects into and out of a treatment chamber, and a cassette containing the objects. The relay apparatus comprises a transfer unit including holding portions for each holding a corresponding one of the objects from below, the transfer unit transferring the objects between the cassette and a transfer position at which the objects are transferred to the transfer mechanism, while holding the object with the holding portions, and a stopper located in the transfer position for adjusting positions of edge portions of all the objects held by the holding portions of the transfer means, thereby preventing the objects from moving horizontally relative to the holding portions.

摘要翻译： 根据本发明的中继设备被提供用于在用于将物体搬入和移出处理室的传送机构和包含物体的盒子之间传送待处理物体。 中继装置包括一个传送单元，它包括保持部分，每个保持部分从下方保持对应的一个物体，传送单元将物体在盒子之间传送到传送位置，在该传送位置将物体传送到传送机构，同时保持物体 保持部分和位于转移位置的止动件，用于调节由转印装置的保持部分保持的所有物体的边缘部分的位置，从而防止物体相对于保持部分水平移动。