METHOD OF ASSEMBLY AND MANUFACTURING OF PIEZO ACTUATED FABRY-PEROT INTERFEROMETER
    3.
    发明申请
    METHOD OF ASSEMBLY AND MANUFACTURING OF PIEZO ACTUATED FABRY-PEROT INTERFEROMETER 审中-公开
    PIEZO激活的FABRY-PEROT干涉仪的组装和制造方法

    公开(公告)号:US20160349423A1

    公开(公告)日:2016-12-01

    申请号:US15137810

    申请日:2016-04-25

    Abstract: A device for tunable optical filter includes a substrate, one or more piezos, a bottom mirror, and a top mirror. The one or more piezos are placed on the substrate. The one or more piezos have a piezo thickness. The bottom mirror is placed on the substrate. The bottom mirror has a bottom mirror thickness greater than the piezo thickness. The top mirror is placed on the bottom mirror. The top mirror is attached to the one or more piezos.

    Abstract translation: 用于可调谐光学滤波器的装置包括基板,一个或多个压电体,底部反射镜和顶部反射镜。 一个或多个压电体被放置在基板上。 一个或多个压电体具有压电厚度。 底部镜子放置在基板上。 底部反射镜的底部镜面厚度大于压电厚度。 顶部镜子放置在底部镜子上。 顶部镜子连接到一个或多个压电体。

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