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    ADHESIVE SHEET FOR WATER JET LASER DICING
    1.
    发明申请
    ADHESIVE SHEET FOR WATER JET LASER DICING 审中-公开
    水喷射激光胶粘剂表

    公开(公告)号：US20080182095A1

    公开(公告)日：2008-07-31

    申请号：US11931168

    申请日：2007-10-31

    申请人： Fumiteru Asai ,  Takatoshi Sasaki ,  Tsubasa Miki ,  Tomokazu Takahashi ,  Toshio Shintani ,  Akiyoshi Yamamoto

    发明人： Fumiteru Asai ,  Takatoshi Sasaki ,  Tsubasa Miki ,  Tomokazu Takahashi ,  Toshio Shintani ,  Akiyoshi Yamamoto

    IPC分类号： B32B5/02 ,  B32B7/10 ,  B32B3/10

    CPC分类号： H01L21/6836 ,  B23K26/146 ,  B23K26/40 ,  B23K2103/50 ,  C09J7/21 ,  C09J2203/326 ,  H01L21/78 ,  H01L2221/68327 ,  Y10T428/249962

    摘要： The present invention provides an adhesive sheet for water jet laser dicing, comprising an adhesive layer laminated on a base film, wherein the base film is composed of mesh formed by a fiber. According to the adhesive sheet for water jet laser dicing in the present invention, a film composed of mesh is used as the base film to ensure that the perforation size and opening area are relatively larger than in nonwoven fabric and perforated sheets, thus making it possible to maintain stable permeability to liquids originating in the liquid stream during water jet laser dicing and to provide an adhesive sheet that allows extremely thin semiconductor wafers or materials to be processed while preventing die fly-off or defects such as cracking and chipping in IC components, chips, or the like.

    摘要翻译： 本发明提供了一种水射流激光切割用粘合片，其特征在于，包括层叠在基膜上的粘合剂层，其中，所述基膜由纤维形成的网构成。 根据本发明的喷水激光切割用粘合片，使用由网状构成的膜作为基膜，以确保穿孔尺寸和开口面积比无纺布和穿孔片材相对大，从而使其成为可能 在喷水激光切割期间保持对源自液体流的液体的稳定的渗透性，并且提供允许极薄的半导体晶片或材料被加工同时防止芯片脱落或缺陷如IC部件中的破裂和碎裂的粘合片， 芯片等。

    ADHESIVE SHEET FOR WATER JET LASER DICING
    2.
    发明申请
    ADHESIVE SHEET FOR WATER JET LASER DICING 审中-公开
    水喷射激光胶粘剂表

    公开(公告)号：US20080108262A1

    公开(公告)日：2008-05-08

    申请号：US11931124

    申请日：2007-10-31

    申请人： Fumiteru Asai ,  Takatoshi Sasaki ,  Toshio Shintani ,  Tomokazu Takahashi ,  Tsubasa Miki ,  Akiyoshi Yamamoto

    发明人： Fumiteru Asai ,  Takatoshi Sasaki ,  Toshio Shintani ,  Tomokazu Takahashi ,  Tsubasa Miki ,  Akiyoshi Yamamoto

    IPC分类号： D03D9/00 ,  B32B7/00

    CPC分类号： H01L21/6836 ,  B23K26/146 ,  B23K26/40 ,  B23K2103/50 ,  B26F3/004 ,  C09J7/21 ,  C09J7/22 ,  C09J2201/20 ,  C09J2203/326 ,  H01L21/78 ,  H01L2221/68327 ,  Y10T428/26 ,  Y10T428/28 ,  Y10T442/10

    摘要： The present invention provides an adhesive sheet for water jet laser dicing, comprising an adhesive layer laminated on a base film which has a mean opening diameter of 5 μm to 30 μm. According to the adhesive sheet of the invention, a base film having a mean opening diameter of a certain size is used, thus ensuring better permeability to liquids originating in a liquid stream, and preventing the material that is being processed from being separated by the liquids from the adhesive sheet. In addition, the relatively low mean opening diameter makes it possible to control rippling on the surface of the base film and kept the surface flat, resulting in better adhesion to the material being processed and ensuring that the material being processed is secured during the dicing stage. The ability to improve the adhesion between the base film and the adhesive layer also makes it possible to prevent the separation of the adhesive form the base film and the adhesion of the adhesion on the material being processed when picked up after dicing.

    摘要翻译： 本发明提供一种水喷射激光切割用粘合片，其特征在于，具有层叠在平均开口直径为5〜30μm的基底膜上的粘合剂层。 根据本发明的粘合片，使用具有一定尺寸的平均开口直径的基膜，从而确保对来自液体流的液体的更好的渗透性，并且防止被处理的材料被液体分离 从粘合片。 另外，相对低的平均开口直径使得可以控制基膜的表面上的波纹并保持表面平坦，导致对被处理材料的更好的附着力，并确保在切割阶段期间确保正在加工的材料 。 提高基膜和粘合剂层之间的粘合力的能力也使得可以防止粘合剂从基膜剥离，以及在切割后拾取时对待处理材料的粘合的粘附。

    Adhesive sheet for laser processing
    6.
    发明申请
    Adhesive sheet for laser processing 审中-公开
    用于激光加工的粘合片

    公开(公告)号：US20080057306A1

    公开(公告)日：2008-03-06

    申请号：US11892216

    申请日：2007-08-21

    申请人： Takatoshi Sasaki ,  Tomokazu Takahashi ,  Fumiteru Asai ,  Akiyoshi Yamamoto ,  Toshio Shintani

    发明人： Takatoshi Sasaki ,  Tomokazu Takahashi ,  Fumiteru Asai ,  Akiyoshi Yamamoto ,  Toshio Shintani

    IPC分类号： B32B7/12

    CPC分类号： B23K26/18 ,  C09J7/29 ,  Y10T428/2848

    摘要： An adhesive sheet for laser processing, comprises a base film and an adhesive layer laminated on the surface of the base film, wherein the base film has a melting protection layer on the back side thereof. According to the adhesive sheet for laser processing of the present invention, the melting of the base film caused by the local concentration of laser beam energy at the places irradiated with the laser beam can be effectively prevented. Accordingly, the back side of the base film can be prevented from locally adhering to the processing table in the dicing apparatus, and subsequent steps, namely, drawing the base film to separate the workpiece from the adhesive layer, and individually recovering these, can be carried out easily and efficiently.

    摘要翻译： 一种用于激光加工的粘合片，包括基膜和层压在基膜表面上的粘合剂层，其中基膜在其背面具有熔融保护层。 根据本发明的激光加工用粘合片，能够有效地防止由激光束照射的部位的激光能量的局部浓度引起的基膜熔化。 因此，可以防止基膜的背面局部粘附在切割装置的处理台上，随后的步骤即拉出基膜以将粘合剂层分离出来，并单独地回收它们，可以是 轻松高效地进行。