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    OPTICAL ETCHING DEVICE FOR LASER MACHINING
    7.
    发明申请
    OPTICAL ETCHING DEVICE FOR LASER MACHINING 审中-公开
    用于激光加工的光学蚀刻装置

    公开(公告)号：US20110036818A1

    公开(公告)日：2011-02-17

    申请号：US12774642

    申请日：2010-05-05

    申请人： Chih-Kung Lee ,  Jyi-Tyan Yeh ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang

    发明人： Chih-Kung Lee ,  Jyi-Tyan Yeh ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang

    IPC分类号： B23K26/00

    CPC分类号： B23K26/066 ,  B23K26/0734 ,  B23K26/361 ,  B23K26/364

    摘要： An optical etching device for laser machining is provided and includes a laser light source and an optical head. The laser light source emits an incident beam. The optical head includes a transparent substrate, an opaque film and a sub-wavelength annular channel. The laser energy tolerance of the transparent substrate ranges from 8 J/cm2 to 12 J/cm2. The opaque film has a first surface and a second surface opposite to the first surface. The transparent substrate is adhered to the first surface. The sub-wavelength annular channel is formed in the opaque film and extends from the first surface to the second surface so that the incident beam from the transparent substrate generates a surface plasma wave on the opaque film.

    摘要翻译： 提供了一种用于激光加工的光刻蚀装置，包括激光光源和光头。 激光光源发射入射光束。 光头包括透明基板，不透明膜和亚波长环形通道。 透明基板的激光能量容差为8J / cm 2〜12J / cm 2。 不透明膜具有与第一表面相对的第一表面和第二表面。 透明基板粘附到第一表面。 亚波长环形通道形成在不透明膜中并且从第一表面延伸到第二表面，使得来自透明基板的入射光束在不透明膜上产生表面等离子体波。

    OPTICAL HEAD
    8.
    发明申请
    OPTICAL HEAD 有权
    光学头

    公开(公告)号：US20080304397A1

    公开(公告)日：2008-12-11

    申请号：US11960725

    申请日：2007-12-20

    申请人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

    发明人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

    IPC分类号： G11B7/135

    CPC分类号： G03F7/70383 ,  G11B7/1387 ,  G11B7/261

    摘要： A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.

    摘要翻译： 提供了一种微光学头，其提供亚波长聚焦点和非常长的焦深。 光头包括透明基板，不透明膜和至少一个亚波长环形通道。 相干光透过支撑光头并透过合适设计的亚波长环形通道的透明基板，可以克服衍射极限，有效提高透射能量。 透射光在光学头后方一定距离后会聚，形成保持非常长的距离而不发散的亚波长标度光束。

    Optical head
    9.
    发明授权
    Optical head 有权
    光头

    公开(公告)号：US07957250B2

    公开(公告)日：2011-06-07

    申请号：US11960725

    申请日：2007-12-20

    申请人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

    发明人： Chih-Kung Lee ,  Ding-Zheng Lin ,  Tsung-Dar Cheng ,  Chin-Kai Chang ,  Chih-Hao Chen ,  Chau-Shioung Yeh ,  You-Chia Chang

    IPC分类号： G11B7/00

    CPC分类号： G03F7/70383 ,  G11B7/1387 ,  G11B7/261

    摘要： A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.

    摘要翻译： 提供了一种微光学头，其提供亚波长聚焦点和非常长的焦深。 光头包括透明基板，不透明膜和至少一个亚波长环形通道。 相干光透过支撑光头并透过合适设计的亚波长环形通道的透明基板，可以克服衍射极限，有效提高透射能量。 透射光在光学头后方一定距离后会聚，形成保持非常长的距离而不发散的亚波长标度光束。