公开(公告)号：US20220056571A1

公开(公告)日：2022-02-24

申请号：US17273074

申请日：2020-07-09

Applicant: ULVAC, INC.

Inventor： Kengo Tsutsumi ,  Shinji Kohari ,  Kouji Sogabe ,  Toshimitsu Uehigashi ,  Takahiro Nanba

IPC: C23C14/00 ,  C23C14/06 ,  C23C14/54

Abstract: A film forming method is provided in which, when a dielectric film is formed by sputtering a target, the number of particles to get adhered to the surface of a to-be-processed substrate immediately after film formation can be decreased to the extent possible without impairing the function of effectively suppressing the induction of abnormal discharging. A film forming method, according to this invention, of forming a dielectric film on a surface of a to-be-processed substrate by sputtering a target inside a vacuum chamber includes: at the time of sputtering the target, applying negative potential to the target in the form of pulses; and a frequency of applying the negative potential in the form of pulses is set to a range of 100 kHz or more and 150 kHz or below and an application time (Ton) of the negative potential is set to a range of 5 μsec or longer and 8 μsec or shorter.

公开(公告)号：US10435783B2

公开(公告)日：2019-10-08

申请号：US15527754

申请日：2015-06-16

Applicant: ULVAC, INC.

Inventor： Shinya Nakamura ,  Yoshihiro Ikeda ,  Yuusuke Miyaguchi ,  Kazuyoshi Hashimoto ,  Kengo Tsutsumi ,  Yoshinori Fujii

IPC: H01J37/34 ,  C23C14/34 ,  C23C14/08

Abstract: A target assembly is provided in which an abnormal discharging between a projected portion of a backing plate and a side surface of the target is prevented and also in which a bonding material to bond the target and the backing plate can be surely prevented from seeping to the outside and also which is easy in reusing the backing plate. The target assembly according to this invention having: a target made of an insulating material; and a backing plate bonded to one surface of the target via a bonding material, the backing plate having a projected portion which is projected outward beyond an outer peripheral edge of the target, further has an annular insulating plate. The annular insulating plate: encloses a circumference of the target while maintaining a predetermined clearance to a side surface of the target; and covers that surface of the projected portion.

公开(公告)号：US20170268097A1

公开(公告)日：2017-09-21

申请号：US15527754

申请日：2015-06-16

Applicant: ULVAC, INC.

Inventor： Shinya Nakamura ,  Yoshihiro Ikeda ,  Yuusuke Miyaguchi ,  Kazuyoshi Hashimoto ,  Kengo Tsutsumi ,  Yoshinori Fujii

IPC: C23C14/34 ,  H01J37/34

CPC classification number: C23C14/3407 ,  C23C14/081 ,  H01J37/3491

Abstract: A target assembly is provided in which an abnormal discharging between a projected portion of a backing plate and a side surface of the target is prevented and also in which a bonding material to bond the target and the backing plate can be surely prevented from seeping to the outside and also which is easy in reusing the backing plate. The target assembly according to this invention having: a target made of an insulating material; and a backing plate bonded to one surface of the target via a bonding material, the backing plate having a projected portion which is projected outward beyond an outer peripheral edge of the target, further has an annular insulating plate. The annular insulating plate: encloses a circumference of the target while maintaining a predetermined clearance to a side surface of the target; and covers that surface of the projected portion.