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公开(公告)号：US20220190245A1
公开(公告)日：2022-06-16
申请号：US17549066
申请日：2021-12-13
Applicant: Universal Display Corporation
Inventor： Kent Khuong NGUYEN , Sriram KRISHNASWAMI , Daniel TOET , Jeff HAWTHORNE , William E. QUINN
IPC: H01L51/00
Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
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公开(公告)号：US20240155931A1
公开(公告)日：2024-05-09
申请号：US18402792
申请日：2024-01-03
Applicant: Universal Display Corporation
Inventor： Kent Khuong NGUYEN , Sriram KRISHNASWAMI , Daniel TOET , Jeff HAWTHORNE , William E. QUINN
CPC classification number: H10K71/135 , C23C14/04 , C23C14/228 , C23C14/50 , H10K71/164 , H10K71/191
Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
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公开(公告)号：US20230357918A1
公开(公告)日：2023-11-09
申请号：US18311519
申请日：2023-05-03
Applicant: Universal Display Corporation
Inventor： Jeff HAWTHORNE , William E. QUINN , Kent Khuong NGUYEN , Sriram KRISHNASWAMI , Gregory McGRAW , Daniel TOET
CPC classification number: C23C14/228 , C23C14/12 , C23C14/50 , C23C14/54
Abstract: Methods, systems, and devices are provided for organic vapor jet deposition (OVJP), which require significantly fewer print heads than conventional OVJP deposition systems. The disclosed OVJP systems include half the number of OVJP print heads than a conventional system, or less, and provide for relative movement of the substrate and print heads to allow for rapid and comprehensive material deposition over the full surface of the substrate.
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