公开(公告)号：US20220190245A1

公开(公告)日：2022-06-16

申请号：US17549066

申请日：2021-12-13

Applicant: Universal Display Corporation

Inventor： Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Daniel TOET ,  Jeff HAWTHORNE ,  William E. QUINN

IPC: H01L51/00

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US20230363244A1

公开(公告)日：2023-11-09

申请号：US18311550

申请日：2023-05-03

Applicant: Universal Display Corporation

Inventor： Steven Shigeki AOCHI ,  Vadim BOGUSLAVSKIY ,  Evan HERNANDEZ ,  Kent Khuong NGUYEN ,  Michael FILIPPI ,  Matthew KING ,  Daniel TOET

IPC: H10K71/13 ,  H10K71/40 ,  H10K71/20 ,  H10K85/30

CPC classification number: H10K71/13 ,  H10K71/40 ,  H10K71/221 ,  H10K85/341 ,  H10K85/324

Abstract: An organic vapor jet printing (OVJP) device is provided that includes an OVJP print die having one or more delivery channels to deliver organic material and carrier gas to a region below the print die and one or more exhaust channels to remove material from below the print die. A directly-heated delivery line connected to the one or more delivery channels and a source of the organic material external to the OVJP print die includes a resistive material and a plurality of electrical connections to the resistive material. When a current is applied to the resistive material via the plurality of electrical connections, the resistive material heats the interior of the directly-heated delivery line.

公开(公告)号：US20240155931A1

公开(公告)日：2024-05-09

申请号：US18402792

申请日：2024-01-03

Applicant: Universal Display Corporation

Inventor： Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Daniel TOET ,  Jeff HAWTHORNE ,  William E. QUINN

IPC: H10K71/13 ,  C23C14/04 ,  C23C14/22 ,  C23C14/50 ,  H10K71/10 ,  H10K71/16

CPC classification number: H10K71/135 ,  C23C14/04 ,  C23C14/228 ,  C23C14/50 ,  H10K71/164 ,  H10K71/191

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US20230357918A1

公开(公告)日：2023-11-09

申请号：US18311519

申请日：2023-05-03

Applicant: Universal Display Corporation

Inventor： Jeff HAWTHORNE ,  William E. QUINN ,  Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Gregory McGRAW ,  Daniel TOET

IPC: C23C14/22 ,  C23C14/12 ,  C23C14/50 ,  C23C14/54

CPC classification number: C23C14/228 ,  C23C14/12 ,  C23C14/50 ,  C23C14/54

Abstract: Methods, systems, and devices are provided for organic vapor jet deposition (OVJP), which require significantly fewer print heads than conventional OVJP deposition systems. The disclosed OVJP systems include half the number of OVJP print heads than a conventional system, or less, and provide for relative movement of the substrate and print heads to allow for rapid and comprehensive material deposition over the full surface of the substrate.