Coplanar integrated optical waveguide electro-optical modulator
    1.
    发明授权
    Coplanar integrated optical waveguide electro-optical modulator 有权
    共平面集成光波导电光调制器

    公开(公告)号:US06760493B2

    公开(公告)日:2004-07-06

    申请号:US10185772

    申请日:2002-06-28

    IPC分类号: H01S300

    CPC分类号: G02F1/225 G02F2201/126

    摘要: A coplanar integrated optical waveguide electro-optical modulator comprises a substrate (1) of an electro-optic material, at least two optical waveguides (41, 42) integrated in the substrate in correspondence of a surface (71) thereof, and an electrode system (80, 90, 100; 80, 90, 900; 12-15; 120, 130, 140, 150, 160, 170) arranged on the surface for applying a modulating electric field to the waveguides suitable for causing a modulation of a refractive index of the two waveguides in a device modulation region (50). The waveguides are formed, for at least a section thereof (411, 421) in the device modulation region, in respective substrate regions (61, 62) which have electro-optic coefficients of opposite sign along an axis transversal to the waveguide sections, so that a modulating electric field of same direction and orientation in the waveguide sections causes refractive index modulations of opposite sign in the waveguide sections. Chirp-free coplanar waveguide modulators and single-drive double coplanar strip modulators can thus be obtained.

    摘要翻译: 共面的一体化光波导电光调制器包括电光材料的基片(1),至少两个与其表面(71)对应的基片中的光波导(41,42)和电极系 (80,90,100; 80,90,900; 12-15; 120,130,140,​​150,160,170),其布置在所述表面上,用于向所述波导施加调制电场,所述调制电场适于引起折射 器件调制区域(50)中的两个波导的折射率。 在器件调制区域的至少一部分(411,421)上,在沿着与波导部分横向的轴线具有相反符号的电光系数的各个衬底区域(61,62)中形成波导,因此 在波导部分中相同方向和取向的调制电场在波导部分中导致相反符号的折射率调制。 因此可以获得无啁啾共面波导调制器和单驱动双共面条带调制器。

    ELECTRO-OPTICAL DEVICE
    3.
    发明申请
    ELECTRO-OPTICAL DEVICE 有权
    电光器件

    公开(公告)号:US20060198581A1

    公开(公告)日:2006-09-07

    申请号:US11070931

    申请日:2005-03-03

    IPC分类号: G02F1/035

    CPC分类号: G02F1/0316 G02F1/035

    摘要: Accordingly, a preferred embodiment of the present invention comprises an electro-optical device having an optical waveguide that includes two optical pathways, wherein the optical waveguide is embedded within the substrate. A bias electrode layer is formed on the surface of the substrate. A buffer layer is formed on at least a portion of the bias electrode layer and the surface of the substrate. An RF electrode layer is formed on the buffer layer. A bias-tee electrically couples the bias electrode layer and the RF electrode layer.

    摘要翻译: 因此,本发明的优选实施例包括具有光波导的电光装置,该光波导包括两个光路,其中光波导嵌入基板内。 在基板的表面上形成偏置电极层。 在偏置电极层的至少一部分和基板的表面上形成缓冲层。 在缓冲层上形成RF电极层。 偏置电路将偏置电极层和RF电极层电耦合。

    Method and structure of electric field poling of Ti indiffused LiNbO3 substrates without the use of grinding process
    4.
    发明申请
    Method and structure of electric field poling of Ti indiffused LiNbO3 substrates without the use of grinding process 有权
    Ti不扩散LiNbO3基板的电场极化方法和结构,无需使用研磨工艺

    公开(公告)号:US20050281523A1

    公开(公告)日:2005-12-22

    申请号:US10871298

    申请日:2004-06-19

    CPC分类号: G02B6/1342 G02B2006/1204

    摘要: A method and structure are disclosed with a simplified approach for fabricating a LiNbO3 wafer with Ti indiffusion wafeguide on the surface that is domain inverted. The method involves indiffusing Ti into LiNbO3 with a predefined temperature and time indiffusion range, a Li enriched and dry oxygen atmosphere, which allows making optical waveguides on the z− crystal face without any significant domain inversion occurring on the z+ face of the crystal. This allows for subsequent poling without the need of any additional removal of the thin domain inverted layer which would otherwise appear on the z+ face. Even in instance where a thin domain inversion layer is formed, it is insufficient thick to prevent poling, eliminating the need for the grinding process.

    摘要翻译: 公开了一种简单的方法,用于在畴反转的表面上制造具有Ti扩散阱导向器的LiNbO 3晶片。 该方法包括以预定的温度和时间扩散范围(Li富集和干氧气氛)将Ti掺杂到LiNbO 3 N 3中,这允许在z-晶面上形成光波导而没有任何明显的畴反转发生在 晶体的z +面。 这允许随后的极化,而不需要任何额外去除否则将出现在z +面上的薄域反转层。 即使在形成薄的域反转层的情况下,也不足以防止极化,从而不需要研磨过程。

    METHOD TO PREPARE A STABLE TRANSPARENT ELECTRODE
    9.
    发明申请
    METHOD TO PREPARE A STABLE TRANSPARENT ELECTRODE 有权
    制备稳定透明电极的方法

    公开(公告)号:US20110114226A1

    公开(公告)日:2011-05-19

    申请号:US12997011

    申请日:2009-06-10

    IPC分类号: C23C8/10 B05D5/12

    CPC分类号: H01L31/022408 H01L33/42

    摘要: The present application discloses a method for producing a stable ultra thin metal film that comprises the following steps: a) deposition, on a substrate, of an ultra thin metal film, such as an ultra thin film of nickel, chromium, aluminium, or titanium; b) thermal treatment of the ultra thin metal film, optionally in combination with an O2 treatment; and c) obtaining a protective oxide layer on top of the ultra thin metal film.

    摘要翻译: 本申请公开了一种制造稳定的超薄金属膜的方法,包括以下步骤:a)在基材上沉积镍,铬,铝或钛的超薄金属膜 ; b)超薄金属膜的热处理,任选地与O 2处理组合; 以及c)在所述超薄金属膜的顶部获得保护性氧化物层。

    Periodic thermal poling of waveguides for quasi phase matching
    10.
    发明授权
    Periodic thermal poling of waveguides for quasi phase matching 失效
    用于准相位匹配的波导的周期热极化

    公开(公告)号:US06831776B2

    公开(公告)日:2004-12-14

    申请号:US10051153

    申请日:2002-01-22

    IPC分类号: G02F1365

    摘要: A method of creating a varying second order non-linearity profile along a waveguide, comprising: providing a waveguide structure with a waveguiding core and a surface adjacent to the waveguiding core; structuring the surface to produce a structured surface defining a varying distance between the structured surface and the waveguiding core along the waveguide; and thermally poling the waveguide structure to generate a varying second order non-linearity profile along the waveguide-derived from the varying distance between the structured surface and the waveguiding core. By the surface structuring the modulation of the second order non-linearly induced by the thermal poling can be enhanced. The waveguide structures can be used for making a variety of quasi-phase-matched (QPM) devices.

    摘要翻译: 一种沿着波导产生变化的二阶非线性分布的方法,包括:提供具有波导芯和波导核心相邻表面的波导结构; 构造表面以产生限定沿着波导的结构化表面和波导芯之间的变化距离的结构化表面; 并且热极化波导结构以沿着波导产生变化的二阶非线性分布,该轮廓源自结构化表面和波导核心之间的变化距离。 通过表面构造,可以提高由热极化引起的非线性二阶调制。 波导结构可用于制造各种准相位匹配(QPM)器件。