Method and device to reduce dark current in image sensors
    6.
    发明授权
    Method and device to reduce dark current in image sensors 有权
    降低图像传感器暗电流的方法和装置

    公开(公告)号:US07879639B2

    公开(公告)日:2011-02-01

    申请号:US11735226

    申请日:2007-04-13

    IPC分类号: H01L21/00

    CPC分类号: H01L27/14689 H01L27/14609

    摘要: A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.

    摘要翻译: 制造图像传感器的方法包括提供具有像素区域和逻辑区域的半导体衬底,在像素区域中形成光感测元件,以及在像素区域中形成第一晶体管和在逻辑区域中形成第二晶体管。 在逻辑区域中的像素区域和第二晶体管中形成第一晶体管的步骤包括在像素区域和逻辑区域中执行第一注入处理,在像素区域和逻辑区域中执行第二注入处理,以及执行 仅在逻辑区域中进行第三次植入过程。

    METHOD AND DEVICE TO REDUCE DARK CURRENT IN IMAGE SENSORS
    8.
    发明申请
    METHOD AND DEVICE TO REDUCE DARK CURRENT IN IMAGE SENSORS 有权
    减少图像传感器中的暗电流的方法和装置

    公开(公告)号:US20080251821A1

    公开(公告)日:2008-10-16

    申请号:US11735226

    申请日:2007-04-13

    IPC分类号: H01L31/062 H01L21/00

    CPC分类号: H01L27/14689 H01L27/14609

    摘要: A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.

    摘要翻译: 制造图像传感器的方法包括提供具有像素区域和逻辑区域的半导体衬底,在像素区域中形成光感测元件,以及在像素区域中形成第一晶体管和在逻辑区域中形成第二晶体管。 在逻辑区域中的像素区域和第二晶体管中形成第一晶体管的步骤包括在像素区域和逻辑区域中执行第一注入处理,在像素区域和逻辑区域中执行第二注入处理,以及执行 仅在逻辑区域中进行第三次植入过程。

    Cross-talk reduction through deep pixel well implant for image sensors
    10.
    发明授权
    Cross-talk reduction through deep pixel well implant for image sensors 有权
    通过图像传感器的深像素阱植入进行串扰减少

    公开(公告)号:US07388187B1

    公开(公告)日:2008-06-17

    申请号:US11682428

    申请日:2007-03-06

    IPC分类号: H01L31/00

    CPC分类号: H01L27/14654 H01L27/1463

    摘要: An image sensor device includes a semiconductor substrate having a first type of conductivity, a semiconductor layer having the first type of conductivity formed on the semiconductor substrate, and pixels formed in the semiconductor layer. The semiconductor layer includes a first deep well having the first type of conductivity and substantially underlying the plurality of pixels, and a second deep well having a second type of conductivity different from the first type of conductivity and substantially underlying the first deep well.

    摘要翻译: 图像传感器装置包括具有第一导电类型的半导体衬底,在半导体衬底上形成具有第一类型导电性的半导体层和形成在半导体层中的像素。 半导体层包括具有第一类型导电性并且基本上位于多个像素下面的第一深阱,以及具有不同于第一类型导电性的第二类型导电性并且基本上位于第一深阱的第二深阱。