PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
    7.
    发明申请
    PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME 审中-公开
    用于制造包含层的工艺和材料及其制品

    公开(公告)号:US20130087779A1

    公开(公告)日:2013-04-11

    申请号:US13704003

    申请日:2011-06-16

    IPC分类号: B05D3/06 H01L51/52 H01L51/56

    摘要: There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of priming layer, wherein the pattern of priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of priming layer on the first layer.The priming material has Formula I or Formula I′: In Formula I or Formula I′: Ar1 and Ar2 are the same or different and are aryl groups; R1 through R5 are independently the same or different at each occurrence and are D, F, alkyl, aryl, alkoxy, silyl, or a crosslinkable group; R6 is H, D, or halogen; a through e are independently an integer from 0 to 4; f is 1 or 2; g is 0, 1 or 2; h is 1 or 2; and n is an integer greater than 0.

    摘要翻译: 提供了一种用于在第一层上形成包含的第二层的方法,包括以下步骤:形成具有第一表面能的第一层; 用起动材料处理第一层以形成起动层; 以辐射模式曝光引发层,导致曝光区域和未曝光区域; 开发底漆层以有效地从未曝光区域去除底漆层,从而产生具有起泡层图案的第一层,其中底漆层的图案具有高于第一表面能的第二表面能; 以及通过在第一层上的起动层的图案上的液体沉积形成第二层。 起始材料具有式I或式I':在式I或式I'中:Ar 1和Ar 2相同或不同,为芳基; R 1至R 5各自独立地相同或不同,为D,F,烷基,芳基,烷氧基,甲硅烷基或可交联基团; R6是H,D或卤素; a至e独立地为0至4的整数; f为1或2; g为0,1或2; h为1或2; 并且n是大于0的整数。