公开(公告)号：US07108953B2

公开(公告)日：2006-09-19

申请号：US10380990

申请日：2001-10-12

Applicant: Larry L. Berger ,  Jerald Feldman ,  Viacheslav Alexandrovich Petrov ,  Frank L. Schadt, III ,  Andrew E. Feiring ,  Fredrick Claus Zumsteg, Jr.

Inventor： Larry L. Berger ,  Jerald Feldman ,  Viacheslav Alexandrovich Petrov ,  Frank L. Schadt, III ,  Andrew E. Feiring ,  Fredrick Claus Zumsteg, Jr.

IPC: G03C1/73 ,  G03C1/76 ,  G03F7/039 ,  G03F7/20 ,  G03F7/30

CPC classification number: G03F7/0392 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0382 ,  G03F7/0395 ,  Y10S430/106 ,  Y10S430/108

Abstract: The invention relates to a photoresist composition comprising a polymeric binder; a photoactive component; and at least one dissolution inhibitor comprising a paraffinic or cycloparaffinic compound containing at least one functional group having the structure —C(Rf)(Rf′)OR wherein Rf and Rf′ are the same or different fluoroalkyl groups of from one or taken together are (CF2)a wherein a is an integer ranging from 2 to about 10 and R is a hydrogen atom or an acid labile protecting group. Typically, the dissolution inhibitor has an absorption coefficient of less than about 4.0 μm at a wavelength of 157 nm.

Abstract translation: 本发明涉及包含聚合物粘合剂的光致抗蚀剂组合物; 光活性成分; 和至少一种溶解抑制剂，其包含链烷烃或环烷烃化合物，其含有至少一个具有结构-C（R f） 另一方面，一个或多个氟烷基是相同或不同的氟代烷基，或一起为（CF 2） >其中a为2至约10的整数，R为氢原子或酸不稳定保护基。 通常，溶解抑制剂在157nm的波长下的吸收系数小于约4.0μm。

公开(公告)号：US06974657B2

公开(公告)日：2005-12-13

申请号：US10380922

申请日：2001-10-16

Applicant: Larry L. Berger ,  Michael Karl Crawford ,  Jerald Feldman ,  Lynda Kaye Johnson ,  Frank Leonard Schadt, III ,  Fredrick Claus Zumsteg, Jr.

Inventor： Larry L. Berger ,  Michael Karl Crawford ,  Jerald Feldman ,  Lynda Kaye Johnson ,  Frank Leonard Schadt, III ,  Fredrick Claus Zumsteg, Jr.

IPC: C08F232/08 ,  G03F7/004 ,  G03F7/039 ,  G03F7/038

CPC classification number: G03F7/0395 ,  C08F232/08 ,  G03F7/0045 ,  G03F7/0046 ,  Y10S430/106 ,  Y10S430/108

Abstract: A fluorine-containing polymer prepared from at least a spacer group selected from the group consisting of ethylene, alpha-olefins, 1,1′-disubstituted olefins, vinyl alcohols, vinyl ethers, and 1,3-dienes; and a norbornyl radical containing a functional group containing the structure: —C(Rf)(Rf′)Orb wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is an integer ranging from 2 to about 10 and Rb is a hydrogen atom or an acid- or base-labile protecting group; r is an integer ranging from 0-4. The fluorine-containing polymer has an absorption coefficient of less than 4.0 mm−1 at a wavelength of 157 nm. These polymers are useful in photoresist compositions for microlithography. They exhibit high transparency at this short wavelength and also possess other key properties, including good plasma etch resistance and adhesive properties.

Abstract translation: 由至少选自乙烯，α-烯烃，1,1'-二取代的烯烃，乙烯醇，乙烯基醚和1,3-二烯的间隔基组成的含氟聚合物; 和含有具有以下结构的官能团的降冰片基：-C（R）f（= O）或其中R是＆lt; SUB＆gt; F 1和R 2'是相同或不同的1至约10个碳原子的氟代烷基或一起为（CF 2） 其中n为2至约10的整数，R b为氢原子或酸或碱不稳定保护基; r为0-4以内的整数。 含氟聚合物在157nm的波长下的吸收系数小于4.0mm -1。 这些聚合物可用于微光刻的光致抗蚀剂组合物中。 它们在这种短波长下表现出高透明度，并且还具有其他关键性能，包括良好的等离子体耐蚀刻性和粘合性。

公开(公告)号：US06790587B1

公开(公告)日：2004-09-14

申请号：US09959077

申请日：2001-10-17

Applicant: Andrew Edward Feiring ,  Jerald Feldman ,  Frank Leonard Schadt, III

Inventor： Andrew Edward Feiring ,  Jerald Feldman ,  Frank Leonard Schadt, III

IPC: G03F7004

CPC classification number: C08F214/18 ,  C08F214/186 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/038 ,  G03F7/039 ,  G03F7/0395 ,  Y10S430/108

Abstract: Fluorinated polymers, photoresists and associated processes for microlithography are described. These polymers and photoresists are comprised of a fluoroalcohol functional group which simultaneously imparts high ultraviolet (UV) transparency and developability in basic media to these materials. The materials of this invention have high UV transparecy, particularly at short wavelengths, e.g., 157 nm, which makes them highly useful for lithography at these short wavelengths.

Abstract translation: 描述了用于微光刻的氟化聚合物，光致抗蚀剂和相关工艺。 这些聚合物和光致抗蚀剂由氟代醇官能团构成，其同时赋予这些材料在基本介质中高的紫外（UV）透明度和显影性。 本发明的材料具有高的UV透明度，特别是在短波长例如157nm，这使得它们在这些短波长下对于光刻非常有用。

公开(公告)号：US6103920A

公开(公告)日：2000-08-15

申请号：US899032

申请日：1997-07-23

Applicant: Lynda Kaye Johnson ,  Jerald Feldman ,  Kristina Ann Kreutzer ,  Stephan James Mclain ,  Alison Margaret Anne Bennett ,  Edward Bryan Coughlin ,  Dennis Scott Donald ,  Lissa Taka Jennings Nelson ,  Anju Parthasarathy ,  Xing Shen ,  Wilson Tam ,  Yueli Wang

Inventor： Lynda Kaye Johnson ,  Jerald Feldman ,  Kristina Ann Kreutzer ,  Stephan James Mclain ,  Alison Margaret Anne Bennett ,  Edward Bryan Coughlin ,  Dennis Scott Donald ,  Lissa Taka Jennings Nelson ,  Anju Parthasarathy ,  Xing Shen ,  Wilson Tam ,  Yueli Wang

IPC: C07F15/04 ,  C08F4/06 ,  C08F4/70 ,  C08F10/00 ,  C08F10/02 ,  C08F12/00 ,  C08F12/04 ,  C08F12/08 ,  C08F32/08 ,  C08F36/00 ,  C08F36/20 ,  C08F110/02 ,  C08F210/02

CPC classification number: C08F32/08 ,  C07F15/04 ,  C08F10/00 ,  C08F10/02 ,  C08F12/08 ,  C08F110/02 ,  C08F210/02

Abstract: Disclosed herein is a process for the polymerization of ethylene, norbornenes and styrenes, by contacting in solution a selected nickel compound and a selected compound which is or can coordinated to the nickel with the olefin(s). The polymers produced are useful for films and molding resins.

Abstract translation: 本文公开了通过使溶液中的选定的镍化合物和选择的与镍与烯烃配位的化合物接触来聚合乙烯，降冰片烯和苯乙烯的方法。 所生产的聚合物可用于膜和模制树脂。

公开(公告)号：US5886224A

公开(公告)日：1999-03-23

申请号：US891403

申请日：1997-07-10

Applicant: Maurice S. Brookhart ,  Lynda Kaye Johnson ,  Samuel David Arthur ,  Jerald Feldman ,  Kristina Ann Kreutzer ,  Alison Margaret Anne Bennett ,  Edward Bryan Coughlin ,  Steven Dale Ittel ,  Anju Parthasarathy ,  Daniel Joseph Tempel

Inventor： Maurice S. Brookhart ,  Lynda Kaye Johnson ,  Samuel David Arthur ,  Jerald Feldman ,  Kristina Ann Kreutzer ,  Alison Margaret Anne Bennett ,  Edward Bryan Coughlin ,  Steven Dale Ittel ,  Anju Parthasarathy ,  Daniel Joseph Tempel

IPC: B01J31/00 ,  B01J37/00 ,  C07C2/32 ,  C07C69/52 ,  C07C251/08 ,  C07F7/00 ,  C07F15/00 ,  C07F19/00 ,  C08F4/02 ,  C08F4/06 ,  C08F4/60 ,  C08F4/70 ,  C08F4/80 ,  C08F10/00 ,  C08F10/02 ,  C08F10/06 ,  C08F10/08 ,  C08F12/30 ,  C08F20/06 ,  C08F110/02 ,  C08F110/06 ,  C08F110/14 ,  C08F132/04 ,  C08F210/02 ,  C08F210/14 ,  C08F210/16 ,  C08F220/10 ,  C08F232/00 ,  C08F232/04 ,  C08F255/00 ,  C08L23/02

CPC classification number: C08F110/02 ,  C08F110/06 ,  C08F210/02 ,  C08F210/14 ,  C08F210/16 ,  C08L23/02 ,  C08F10/00 ,  C08F10/02 ,  C08F10/06 ,  C08F110/14 ,  C08F232/00 ,  Y10S430/165 ,  Y10T428/1352 ,  Y10T428/1386 ,  Y10T428/139 ,  Y10T428/24942 ,  Y10T428/2878 ,  Y10T428/31692 ,  Y10T428/31855 ,  Y10T428/31895 ,  Y10T428/31938 ,  Y10T442/20 ,  Y10T442/60 ,  Y10T442/626

Abstract: Disclosed herein are processes for polymerizing ethylene, acyclic olefins, and/or selected cyclic olefins, and optionally selected olefinic esters or carboxylic acids, and other monomers. The polymerizations are catalyzed by selected transition metal compounds, and sometimes other co-catalysts. Since some of the polymerizations exhibit some characteristics of living polymerizations, block copolymers can be readily made. Many of the polymers produced are often novel, particularly in regard to their microstructure, which gives some of them unusual properties. Numerous novel catalysts are disclosed, as well as some novel processes for making them. The polymers made are useful as elastomers, molding resins, in adhesives, etc. Also described herein is the synthesis of linear .alpha.-olefins by the oligomerization of ethylene using as a catalyst system a combination a nickel compound having a selected .alpha.-diimine ligand and a selected Lewis or Bronsted acid, or by contacting selected .alpha.-diimine nickel complexes with ethylene.

Abstract translation: 本文公开了聚合乙烯，无环烯烃和/或选择的环烯烃，和任选选择的烯属酯或羧酸和其它单体的方法。 聚合由选择的过渡金属化合物，有时是其他助催化剂催化。 由于一些聚合表现出活性聚合的某些特性，因此可以容易地制备嵌段共聚物。 所生产的许多聚合物通常是新颖的，特别是在它们的微结构方面，这给出了其中一些不寻常的性质。 公开了许多新颖的催化剂，以及一些制备它们的新方法。 制备的聚合物可用作弹性体，模塑树脂，粘合剂等。本文还描述了通过使用作为催化剂体系的乙烯低聚来合成线性α-烯烃，将具有选定的α-二亚胺配体的镍化合物和 选择的Lewis或布朗斯台德酸，或通过使选择的α-二亚胺镍络合物与乙烯接触。

公开(公告)号：US5866663A

公开(公告)日：1999-02-02

申请号：US891332

申请日：1997-07-10

Applicant: Maurice S. Brookhart ,  Lynda Kaye Johnson ,  Christopher Moore Killian ,  Samuel David Arthur ,  Jerald Feldman ,  Elizabeth Forrester McCord ,  Stephan James McLain ,  Kristina Ann Kreutzer ,  Alison Margaret Anne Bennett ,  Edward Bryan Coughlin ,  Steven Dale Ittel ,  Anju Parthasarathy ,  Lin Wang ,  Zhen-Yu Yang

Inventor： Maurice S. Brookhart ,  Lynda Kaye Johnson ,  Christopher Moore Killian ,  Samuel David Arthur ,  Jerald Feldman ,  Elizabeth Forrester McCord ,  Stephan James McLain ,  Kristina Ann Kreutzer ,  Alison Margaret Anne Bennett ,  Edward Bryan Coughlin ,  Steven Dale Ittel ,  Anju Parthasarathy ,  Lin Wang ,  Zhen-Yu Yang

IPC: B01J31/00 ,  B01J37/00 ,  C07C2/32 ,  C07C69/52 ,  C07C251/08 ,  C07F7/00 ,  C07F15/00 ,  C07F19/00 ,  C08F4/02 ,  C08F4/06 ,  C08F4/60 ,  C08F4/70 ,  C08F4/80 ,  C08F10/00 ,  C08F10/02 ,  C08F10/06 ,  C08F10/08 ,  C08F12/30 ,  C08F20/06 ,  C08F110/02 ,  C08F110/06 ,  C08F110/14 ,  C08F132/04 ,  C08F210/02 ,  C08F210/14 ,  C08F210/16 ,  C08F220/10 ,  C08F232/00 ,  C08F232/04 ,  C08F255/00 ,  C08L23/02

CPC classification number: C08F110/02 ,  C08F110/06 ,  C08F210/02 ,  C08F210/14 ,  C08F210/16 ,  C08L23/02 ,  C08F10/00 ,  C08F10/02 ,  C08F10/06 ,  C08F110/14 ,  C08F232/00 ,  Y10S430/165 ,  Y10T428/1352 ,  Y10T428/1386 ,  Y10T428/139 ,  Y10T428/24942 ,  Y10T428/2878 ,  Y10T428/31692 ,  Y10T428/31855 ,  Y10T428/31895 ,  Y10T428/31938 ,  Y10T442/20 ,  Y10T442/60 ,  Y10T442/626

Abstract: Disclosed herein are processes for polymerizing ethylene, acyclic olefins, and/or selected cyclic olefins, and optionally selected olefinic esters or carboxylic acids, and other monomers. The polymerizations are catalyzed by selected transition metal compounds, and sometimes other co-catalysts. Since some of the polymerizations exhibit some characteristics of living polymerizations, block copolymers can be readily made. Many of the polymers produced are often novel, particularly in regard to their microstructure, which gives some of them unusual properties. Numerous novel catalysts are disclosed, as well as some novel processes for making them. The polymers made are useful as elastomers, molding resins, in adhesives, etc. Also described herein is the synthesis of linear .alpha.-olefins by the oligomerization of ethylene using as a catalyst system a combination a nickel compound having a selected .alpha.-diimine ligand and a selected Lewis or Bronsted acid, or by contacting selected .alpha.-diimine nickel complexes with ethylene.

Abstract translation: 本文公开了聚合乙烯，无环烯烃和/或选择的环烯烃，和任选选择的烯属酯或羧酸和其它单体的方法。 聚合由选择的过渡金属化合物，有时是其他助催化剂催化。 由于一些聚合表现出活性聚合的某些特性，因此可以容易地制备嵌段共聚物。 所生产的许多聚合物通常是新颖的，特别是在它们的微结构方面，这给出了其中一些不寻常的性质。 公开了许多新颖的催化剂，以及一些制备它们的新方法。 制备的聚合物可用作弹性体，模塑树脂，粘合剂等。本文还描述了通过使用作为催化剂体系的乙烯低聚来合成线性α-烯烃，将具有选定的α-二亚胺配体的镍化合物和 选择的Lewis或布朗斯台德酸，或通过使选择的α-二亚胺镍络合物与乙烯接触。

公开(公告)号：US5852145A

公开(公告)日：1998-12-22

申请号：US897805

申请日：1997-07-21

Applicant: Stephan James McLain ,  Jerald Feldman

Inventor： Stephan James McLain ,  Jerald Feldman

IPC: C07C251/20 ,  C07F15/04 ,  C08F4/70 ,  C08F10/00 ,  C08F32/08 ,  C08F297/08

CPC classification number: C08F32/08 ,  C07C251/20 ,  C07F15/045 ,  C08F10/00 ,  C08F297/08 ,  C07C2103/20 ,  C08F110/14

Abstract: Certain olefins such as ethylene, .alpha.-olefins and cyclopentene can be polymerized by using catalyst system containing a nickel or palladium .alpha.-diimine complex, a metal containing hydrocarbylation compound, and a selected Lewis acid, or a catalyst system containing certain nickel �II! or palladium �II! compounds, an .alpha.-diimine, a metal containing hydrocarbylation compound, and optionally a selected Lewis acid. The process advantageously produces polyolefins useful for molding resins, films, elastomers and other uses.

Abstract translation: 某些烯烃如乙烯，α-烯烃和环戊烯可以通过使用含有镍或钯的α-二亚胺络合物，含有金属的烃基化合物和选择的路易斯酸的催化剂体系或含有某些镍[II] 或钯[II]化合物，α-二亚胺，含金属的烃基化合物和任选的选择的路易斯酸。 该方法有利地产生可用于模制树脂，薄膜，弹性体和其它用途的聚烯烃。

公开(公告)号：US5352812A

公开(公告)日：1994-10-04

申请号：US88712

申请日：1993-07-08

Applicant: Jerald Feldman ,  Marcia B. France

Inventor： Jerald Feldman ,  Marcia B. France

IPC: B01J31/04 ,  B01J31/22 ,  B01J31/24 ,  C07C6/04 ,  C07C67/343 ,  C07C67/475 ,  C08F4/60 ,  C11C3/00

CPC classification number: C11C3/00 ,  B01J31/04 ,  B01J31/2295 ,  B01J31/2404 ,  C07C6/04 ,  C07C67/343 ,  C07C67/475 ,  B01J2231/543 ,  B01J2531/827 ,  B01J2540/20

Abstract: The metathesis of functionalized and unfunctionalized acyclic olefins using catalyst compositions containing iridium and silver in a molar ration of 3 to 1.

Abstract translation: 使用含有铱和银的催化剂组合物的官能化和未官能化的无环烯烃的复分解，摩尔比为3:1。

公开(公告)号：US08026333B2

公开(公告)日：2011-09-27

申请号：US11639083

申请日：2006-12-13

Applicant: Jerald Feldman ,  Stephan J. McLain ,  Robert John Barsotti ,  James William O'Neil

Inventor： Jerald Feldman ,  Stephan J. McLain ,  Robert John Barsotti ,  James William O'Neil

IPC: C08G18/24 ,  C08L75/04 ,  C09D175/04

CPC classification number: C08G18/792 ,  C08G18/242 ,  C08G18/244 ,  C08G18/341 ,  C08G18/718 ,  H05K3/285

Abstract: This invention relates to a protected organotin-based catalyst system for polyurethane synthesis that is useful in coatings applications. The catalyst has a formula according to; R1aR2bR3cSn[CH(OX)R4]d, wherein R1, R2, and R3 are the same or different and represent an optionally substituted hydrocarbyl, aromatic, alkoxide, amide, halide or stannyl group, R4 represents an optionally substituted hydrocarbyl or optionally substituted aryl group. a, b, and c are independently 0, 1, 2, or 3; d is 1, 2 or 3; and a+b+c+d=4; and X is an acid-labile or moisture-labile protecting group. When a coating mixture comprising the catalyst is sprayed and/or applied to a substrate as a thin film in air, the catalyst is activated. For solvent-based refinish systems comprising hydroxyl and isocyanate species at high solids levels, the catalyst system therefore provides extended viscosity stability, i.e., pot life.

Abstract translation: 本发明涉及用于聚氨酯合成的受保护的有机锡基催化剂体系，其可用于涂料应用。 催化剂具有下式： R1aR2bR3cSn [CH（OX）R4] d，其中R1，R2和R3相同或不同，表示任选取代的烃基，芳族，醇盐，酰胺，卤化物或甲锡烷基，R4表示任选取代的烃基或任选取代的芳基 组。 a，b和c独立地为0,1,2或3; d为1,2或3; 和a + b + c + d = 4; X是酸不稳定或潮湿不稳定的保护基。 当包含催化剂的涂料混合物在空气中作为薄膜喷涂和/或施加到基材上时，催化剂被活化。 对于含有高固体含量的羟基和异氰酸酯物质的基于溶剂的修补体系，催化剂体系因此提供了延长的粘度稳定性，即适用期。

公开(公告)号：US20110092076A1

公开(公告)日：2011-04-21

申请号：US12993202

申请日：2009-05-19

Applicant: Charles D. Lang ,  James Daniel Tremel ,  Paul Anthony Sant ,  Stephen Sorich ,  David K. Flattery ,  Gary A. Johansson ,  Jerald Feldman ,  Steven Dale Ittel ,  George Simpson

Inventor： Charles D. Lang ,  James Daniel Tremel ,  Paul Anthony Sant ,  Stephen Sorich ,  David K. Flattery ,  Gary A. Johansson ,  Jerald Feldman ,  Steven Dale Ittel ,  George Simpson

IPC: H01L21/02 ,  C23C16/00

CPC classification number: G03F7/167 ,  B05D1/60 ,  C23C14/22 ,  C23C14/228 ,  H01L51/001 ,  H01L51/56

Abstract: An apparatus and method for vapor phase deposition of a reactive surface area (RSA) material onto a substrate of an electronic device. The vapor phase deposition is conducted at ambient pressures in air, and provides capture of residual vapor to minimize environmental release of RSA and other constituents used in the processing.

Abstract translation: 将反应性表面积（RSA）材料气相沉积到电子器件的衬底上的装置和方法。 气相沉积在空气中在环境压力下进行，并提供残余蒸气的捕获，以最小化RSA和处理中使用的其它成分的环境释放。